Precision Regulator Series IR1000/2000/3000

o q o i !

Micro-Mist Separator with Prefilter Series AMH

V~V ::;; Q) /-Y :; ~0 . 04 '// ~ / /,/ ~ 0.04 Q) a. 0.3MPa 0.5MPa 0.7MPa ~ VMax.ftOWline-r<~ ~ V 80.02 Max.fIow line 0.3MPa 80.02 ---::'.'_. .. <:. --"i,, _ , .. " ... .::;::.. , 0 3000 6000 9000 12000 15000 Air flow rate Qlmin (ANR) rr ---:--~!'--.. -. .,.. -_---0.7MPa .:':: .,.' ..".'

VCW

N.O. q q w w e e r r t y u t y u Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IN IN Component Parts Component parts Description Material Description Material No. No.

Clamp Cylinder with Lock

8 e w q @2 @1 @0 !5 #2 o i y Extension locking (F) !2 o !1 @8 #3 @5 #1 #0 @9 @4 !3 !4 !0 u @3 t r @7 @6 !7 !6 !9 #6 #5 #4 e w q @2 @1 @0 !5 !8 y #2 i Description Component Parts No. No.

Process Valve Series VNA

0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve How to Order Pilot Solenoid Valves Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open.

HRX-OM-T002

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

Low Friction Cylinders Series MQ

Y F I 4 x N through 0.2 D E M B + Stroke L K 0.2 A + Stroke M E 25, 30, 40 2 x P H effective thread depth C Q Y F 2 x 4 x OB Depth of counterbore RB 2 x 4 x OA effective depth RA J I 4 x N through 0.2 D W E M K B + Stroke L 0.2 A + Stroke M E (mm) Bore size (mm) P Stroke range (mm) RB Note) H OA A B C D E F W I Y J K L M N OB Q RA TN TF 10 39.5 M3 x 0.5 M4 x 0.7 10 to 40 31.5 6 6 ( 5.8)

2/3 Port Valve for Various

Description Standard Brass Stainless steel Body Valve assembly q Stainless steel, Brass NBR,Polyacetal Stainless steel FKM/EPDM w Piston assembly Piston spring Polyacetal, NBR e y t O-ring Pilot cover NBR Aluminum Stainless steel r FKM/EPDM 17-3-94 Series VXA21/22 Direct Air Operated 2 Port Valve For Air, Gas, Vacuum, Water and Oil The VX series will be revised shortly.

KA

(mm) L M Weight (g) D Q Model 3-applicable tubing KAT23-00 17.5 18 20 4 3.2 4.3 4.5 5.3 18.5 21 22 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 45.4 45.4 28.4 28.4 17.7 17.7 10 7 5 KAT04-00 KAT06-00 13.4 13.4 6.4 6.9 3.4 2.9 8 6 KAT08-00 6 6.8 7.5 23 26.5 28.5 15 25 KAT10-00 12 10 KAT12-00 29 Union Y: KAU Effective area (mm2) Applicable tubing O.D.

MXW

w e r t y u i o !

HRX-OM-S004

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

CM2

Construction Construction 1.4-8 Series CM2 Construction Component Parts Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Stainless steel Aluminum alloy Carbon steel Material Note Note White anodized No. q e r t y u i o !0 !1 No. !2 !3 !4 !5 !6 !

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

HRX-OM-R026

/Japanese 1pc.) 3 Y strainer (40meshes) 25A 1pc. 4 Barrel nipple 25A 1pc. 5 Anchor brackets The anchor bolts are not attached 2pc.

AR20-B to AR60-B

IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Stroke Reading Cylinder and Counter

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 y t r q e u q !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ3B60 [N.O. valve x 2] SJ3B60 [N.O. valve x 2] SJ3B60K with back pressure check valve !0 y t r w e u w !2 i !

HRX-OM-W032

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.