Series PF2W Digital Flow Switch For Water

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) 15 27 57 86 160 224 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCUK N S NBR 40 50 40 50 Silicon rubber Urethane rubber Fluororubber Pad type U F E EPR 63 63 AMJ H Heavy duty 80 80 100 100 AMV Add NBR mass to the table on the right for other materials. 125 125 AEP Dimensions HEP ZP H 40 50 63 80 ZP H 100 125 ZP H Related Equipment 3 x 6.5 3 x 4 4 x 8 4 x 5 4 x 9.5 4

Compact Cylinder with Air Cushion Series RQ

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H effective thread depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !2 q @1 Component Parts Component Parts Description Material Aluminum bearing alloy Polyurethane Chromium steel NBR NBR NBR Aluminum alloy Aluminum alloy Aluminum alloy Special steel Special steel No. !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 Note No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Manifold Type: 42 (Base Mounted), Valve Stations: 4 Stations, A, B Port: 01N (NPT1/8), CE Marked: Q (CE Marked)

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

4 q o !3 @1 @0 !1 !0 !2 r MHZ w u MHF e MHL !5 MHR y !9 u t MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR3 !4 !3 MHS q !1 @0 @1 MHC w o MHT e i MHY !5 MHW MRHQ r !7 !6 t !8 !0 !2 i !9 y u Misc.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock 583 LECP2 Series Controller Details e r No. Display Description Details t q PWR Power supply LED Power supply ON/Servo ON : Green turns on. Power supply ON/Servo OFF: Green flashes. q y w w ALM Alarm LED With alarm : Red turns on.

Compact Cylinder

C D E F H I K L M N OA OB Q RA RB T 20 25 43 37 10 10 36 5.5 M6 x 1.0 43 8 6 22 4.5 M5 x 0.8 7.5 13 10 5 0.8 45 39 10 12 40 5.5 M6 x 1.0 48 10 6 26 4.5 M5 x 0.8 7.5 13 10 5 0.8 6 Series C55 Dimensions 32 to 63 2-G1/8 Port size Auto switch Z Q F 2 x 4-OB counterbore RB H thread effective depth C J E I 4-N through T D M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

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Rubber Bumper 1 1 Return Spring Steel 1 Zinc Chromate 1 0 Spring Guide Aluminum Alloy 1 Chmmate Auto Switch I Magnet 1 7 Bolt Stainless Steel Bore g e7t"" Borc O %" Alloy Sleel 4 Nickel Plating Borc A 11,4" -4" Bushing Oil lmpregnated Bronze 1 Bore g s7,u" -1'^u' Bronze Casting 1 Bore F 1%" -4" 5 Piston Rod Stainless Steel 1 Urcge/16"-11/16' Carbon Steel 1 B,orc A 1%" -4" 4 Piston Aluminum

VZ100/300/500

1 2 Spool spring Stainless steel Nil F N T Rc G NPT NPTF 4-6-31 32 Series VZ500 Body Ported Grommet (G), (H) VZ52-01(-F) G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com G: 300 mm H

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

L8 + Stroke H + Stroke A WH + Stroke G With rod boot at one end d e f l h h + L8 + H + 2 x Stroke With rod boot at both ends d e d e L8 + Stroke h f l 2 x h + L8 + 2 x Stroke h + Stroke l + Stroke f A B d11 D EE PL RT L12 KK SW G BG L8 VD WA WB WH ZY Bore size (mm) Stroke range (mm) L2 L9 32 40 50 63 80 100 125 190 26 7 4 4 94 16 32 10 M10 x 1.25 6 M6 x 1 13 G 1/8 4 12 15 30 Up to 1000 22

Air Cylinder NCQ7 Series Compact Cylinder

Rubber Bumper 1 1 Return Spring Steel 1 Zinc Chromate 1 0 Spring Guide Aluminum Alloy 1 Chmmate Auto Switch I Magnet 1 7 Bolt Stainless Steel Bore g e7t"" Borc O %" Alloy Sleel 4 Nickel Plating Borc A 11,4" -4" Bushing Oil lmpregnated Bronze 1 Bore g s7,u" -1'^u' Bronze Casting 1 Bore F 1%" -4" 5 Piston Rod Stainless Steel 1 Urcge/16"-11/16' Carbon Steel 1 B,orc A 1%" -4" 4 Piston Aluminum

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

3 Port Solenoid Valve Base Mounted and Body Ported VQZ Series Choice of Rubber or Metal Seal Compact Design With Large Flow Long Life Interchangeable One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Product Features .pages 4-5 Preferred Options Guide.page 7 Q Q Base Mounted Valves and Manifolds.page 9 Specifications.pages 10-11 How To Order .pages 12-15 Options

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot

LX Series Compact Electric Actuators

Without brake 5.8 t-_1 r l o l : r = tl-Model D F J K L N L X S H _ B _ 5 0 4 6 270 1 7 7 177 6 52 55 L X S H _ B _ . 7 5 4 6 295 202 202 6 47 65 LXSH B -1OO 8 320 227 227 6 47 75 LXSH B -125 4 8 70 345 252 252 6 4 7 85 T-slot A dimensions T-slot B dimensions LXSH _ B .150 6 I 370 277 277 8 47 65 $efie$ [)( tleclnh Arlualors 0inol|$im$ Slido $ffi||l Iy0[ LxsHnsE E;IEI9' With brake Brake

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Power Valve: Economy Valve Series VEX5

N Port 2 (A),1 (P) Port size A Model E F G H I J L M P R T U B C D K N O Q S Port 3 (R) VEX5510 VEX5511 160 50 25 10 7 25 173 80 60 98 Center 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 Thread depth 9 116.5 , ,1 25 VEX5710 VEX5711 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1,1 1 c Bracket mounting dimensions g Grommet

Direct Solenoid

NPTF PO RTS) INCLUDES 1-Elock XT01&2 4-Soc Hd S..ews NxT02G10 11l4.2Ot2\ 2-Flush Plugs 3/8 " NPT Porl Felocalion Block DIMENSIONS DIMENSIONS A B c D E F G H 1.47 137) 1.36 (34.5) 0.87 4 (22.2:) 1 . 1 0 127.91 0.51 112.9) 0.43i1 (10.9) o.42 110.4 0.31 (7,9) Millimeters in Parentheses A B c D E F G H '1.75 144.4) 1.25 (31.7) 0.995 (25.3) 1 . 1 4 (28.9) 0.75 (19.1) (16.0) 0.47 0.19) 0.56 ('t4.21

XLAQ/XLDQ

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17