Digital Flow Switches

times each Impact resistance Noise resistance 1000Vp-p, Pulse width 1s, Rise time 1ns Weight Note 3) 410g 470g 650g 1,100g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W3.

HRX-OM-W038

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRX-OM-O021

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRL

HRL A 40 100 Cooling capacity DI option Cooling method CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW Nil CH2 With electric conductivity control D1 CH1, CH2 With electric conductivity control A Air-cooled refrigeration Pipe thread type Power supply Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) 40 3-phase 380 to 415 VAC (50/60 Hz) 3-phase 460 to 480

CJ2X/CUX/CQSX/CQ2X/CM2X

: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM-01 ASD430FM-02 Model 6, 8 8, 10 6 Metric size 4, 6 J Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" Inch size DAir flow (l/min (ANR)) 7 12 38 Controlled flow -X Effective area (mm2) 0.1 0.6 0.2 Air flow (l/min (ANR)) 175 350 75 295 Free flow 20Effective area (mm2) 1.1 5.3 2.7 4.5 Note) Supply pressure

CJ2X/CUX/CQSX/CQ2X/CM2X

Data Low speed cylinder Conventional cylinder Low speed cylinder Time 10-3-2 10-3-3 3 Low Speed Cylinder Specific Product Precautions Be sure to read before handling.

CEx-OMQ0013

CE*-OMQ0013-F / / 1 7 1-1 1-2 1-3 1-4 8 2-1 2-2 2-3 13 3-1 3-2 3-3 15 4-1 4-2 4-3 17 5-1 5-2 5-3 21 6-1 6-2 22 7-1 7-1-1 7-1-2 7-2 7-2-1 7-2-2 7-3 7-3-1 7-3-2 7-3-3 INPUT 7-3-4 OUTPUT 7-3-5 7-3-6 28 36 9-1 9-1-1 9-1-2 9-1-3 9-2 9-2-1 9-2-2 9-3 9-3-1 45 10-1 10-2 46 11-1 11-2 50 12-1 CE2/CEU2 / *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

VXD21/22/23

LVA LVH Connection 1 4 3 8 1 2 3 4 02 03 04 06 10 LVD Thread type Nil T F N Refer to the table (2) given below for availability. Rc NPTF G NPT Thread LVQ Refer to page 17-3-16 for ordering coil only. 1 LQ 32 40 50 For 32A For 40A For 50A Flange LVN Refer to the table (1) given below for availability.

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Brake mechanism added

Black 0 V G Shield Connector pin arrangement A phase output pulse G A DB phase output pulse F B H E D C -X Counter value 0 1 2 3 4 3 2 1 699

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Manual override P L 5 24 VDC 02 Rc 1/4 (8A) Rc 3/8 (10A) 9 Other 03 3-9-1 2 Series VS410 Accessory (Option) Apparent Power (Power Consumption) 1.

CE2

200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

Serial Transmission System Series EX250 Series EX500

Input block type (Fill out for I/O unit only) Ports 2, 4 size (metric) Nil Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3-pin) Ports 2, 4 Symbol C8 C10 C12 02 03 B CM 1 2 3 Ports 1, 3, 5 8 One-touch fitting 10 One-touch fitting 12 One-touch fitting 1/4 3/8 Bottom ported Rc 1/4 Mixed Input block (Fill out for I/O unit only) 1: 1/2 3, 5: 3/4 Nil Without SI unit/input block

Digital Flow Switches, Series PF2A, Series PF2W

times each Impact resistance Noise resistance 1000Vp-p, Pulse width 1s, Rise time 1ns Weight Note 3) 410g 470g 650g 1,100g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W3.

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

Ionizer Nozzle type IZN10 Series IZS

Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 5 5 0.1 MPa 0.05 MPa 4 4 0.3 MPa 0.05 MPa Discharge time [s] Discharge time [s] 3 3 0.1 MPa 2 2 0.7 MPa 0.3 MPa 1 1 0.5 MPa 0.5 MPa 0.7 MPa 0 0 200 400 0 0 400 200 Distance [mm] Distance [mm] (3) Female threads for piping/IZN10

VT307

Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E