CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

Speed Controller with Indicator

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 15 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.

Fieldbus System

size M5 x 0.8 1/8 Applicable series SY3000 SY5000 Symbol M5 01 Only metal seal type is available for the high pressure type.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

CJ5-S

8 83 118 25 Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 RHC 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125 40 Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13

CJ5-S

8 83 118 25 Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 RHC 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125 40 Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

MQQ

1 !6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Electric Actuators

General purpose input/output connector: CN2 LJ1 LG1 LC1 LX LC6D/LC6C Switches Controller model Mounting screw Mounting bracket assembly M3 x 0.5 LC1-1-N3 LC1-1-N3 Power terminal: TB M5 x 0.8 LC1-1-N5 LC1-1-N5 M3 LC1-1-L3 LC1-1-L3 M5 LC1-1-L5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Controller Command

JIS Standard Hydraulic Cylinder

Refer to Best Pneumatics No. 2-1 for details. 361 CH2E/CH2F/CH2G/CH2H Series Construction @7 q y i @8 !4 #1 @6 @1 u @0 #0 o w !5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

KJ

KQ2H05-01S KQ2H05-02S KQ2H07-M5 KQ2H07-01S KQ2H07-02S 3.5 M5 x 0.8 1 4 Applicable tubing M5 x 0.8 2.5 13.6 M5> 1 8 1 4 1 4 14 4.6 17 3 8 KQ2H07-03S 23 16.5 17 27 15 16 1 8 1 4 5 16 KQ2H09-01S KQ2H09-02S 24 20.5 28 26.5 14 6 18.5 3 8 KQ2H09-03S 22.5 15.5 24 31 29 Width across flats 8 17 1 4 KQ2H11-02S KQ2H11-03S 27.5 22.5 33.5 29 17 3 8 3 8 M5 x 0.8 21 7 1 2 KQ2H11

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Modular Type Filter Regulator Series AW

Modular Type Filter Regulator Series AW Filter regulator Series AW Filtration Accessory Model Port size AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 Pages 56 through 60 Filter regulator with back flow mechanism Series AWK 5m AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket Square embedded type pressure gauge (except for AR10) AW40K-06 3/4 Pages 63 through

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

How to Order Rated pressure range ISE20B 0.1 to 1 MPa M For positive pressure ISE20B M5 X For vacuum/ compound pressure ZSE20B X M M5 q w e r t y u q Rated pressure range w Output specification e Unit specification ZSE20B 0 to 101 kPa ZSE20BF 100 to 100 kPa Symbol Description R NPN open collector 2 outputs + Analog voltage output*1 S NPN open collector 2 outputs + Analog current output*1