Low Profile Slide Table Series MXF Model Bolt Maximum tightening torque (Nm) Maximum screw-in depth L (mm) Model Bolt Maximum tightening torque (Nm) Maximum screw-in depth L (mm) MXF8 MXF8 6 6.5 0.9 0.9 M3 x 0.5 M3 x 0.5 MXF12 MXF12 6 5.5 0.9 0.9 M3 x 0.5 M3 x 0.5 MXF16 MXF16 10 6.5 2.1 2.1 M4 x 0.7 M4 x 0.7 MXF20 MXF20 12 9.5 4.4 4.4 M5 x 0.8 M5 x 0.8 Caution To prevent the workpiece holding bolts from touching the guide
PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series
( 0.8 ppm) [AFD] Max. 0.1 mg/m3 (Before saturated with oil 0.01 mg/m3 or less 0.008 ppm) Compressed air purity class*5 [AFM] ISO 8573-1:2010 [ 3 : 7 : 3 ]*6 [AFD] ISO 8573-1:2010 [ 1 : 7 : 2 ]*7 Drain capacity 8 cm3 25 cm3 45 cm3 Bowl material Polycarbonate Bowl guard Semi-standard (Steel) Standard (Polycarbonate) Weight 0.10 kg 0.18 kg 0.37 kg 0.40 kg *1 Inlet pressure: 0.7 MPa.
The intersection H is the amount of moisture included in the compressed air 1 m3 at 102 psi (0.7 MPa), and a pressure dew point 77F (25C). The amount of moisture is 3.0 g/m3. 10.
bracket Switch mounting nut Hexagon socket head cap bolt (M3 x 0.5 x 14 spring wasdher 2 pcs.)
Model Bolt Maximum tightening torque (Nm) Maximum tightening torque (Nm) Maximum screw-in depth L (mm) Maximum screw-in depth L (mm) Model Bolt Selection Caution MXF8 MXF8 6 6.5 M3 x 0.5 0.9 M3 x 0.5 0.9 MXF12 MXF12 6 5.5 M3 x 0.5 0.9 M3 x 0.5 0.9 1. If intermediate stop by external stopper is done, avoid ejection. If ejection occurs, it may cause damage.
Unscrew the M4 screws (47, 3 pcs.), M3 screws (48, 2 pcs.) and M3 screw (49). Remove the spool valve assembly. The spool valve may be cleaned if special attention is paid to a clean environment and proper procedure. After unscrewing the M4 screws (47, 3 pcs.) the spool valve may be lifted from the fixture.
/h 23 m3/h 29 m3/h 32 m3/h 39 m3/h 72 m3/h Outlet air temp. 10C The data for ANR is referring to the conditions of 20C, 1atm. pressure & relative humidity of 65%.
X83 M3 Note 1) M-3G2 M5 Note 2) M-5G2 X226 Gasket material: Stainless steel 304, FKM Applicable thread Gasket part No. M3 M3G-DPH00489 X112 Gasket material: Stainless steel 316, special FKM Applicable thread Gasket part No. M5 M-5G3 Note 1) Compatible with models using M3 excluding M-3-2.
mounting attachment) M3 x 0.5 (Finger closing port) Auto switch mounting groove (2 positions) Adjustment needle for finger speed 11.6 3 9.4 S 4 6 0 0.05 4 7 7 Note) For single acting, one port is used as a breather port. 2.3 17.5 M3 x 0.5 (Finger opening port) MHKL2-12: Long stroke type 9 2-M3 x 0.5 thread depth 5 (Mounting thread) 20 3H9 depth 3 +0.025 0 13H9 depth 1.5 +0.043 0 2-M3 x 0.5
17.5 M3 x 0.5 (Finger opening port) MHKL2-12: Long stroke type 9 2-M3 x 0.5 thread depth 5 (Mounting thread) 20 3H9 depth 3 +0.025 0 13H9 depth 1.5 +0.043 0 2-M3 x 0.5 thread depth 6 (Mounting thread) 4-M4 x 0.7 thread depth 8 (Mounting thread) Bottom hole 3.4 through (Mounting hole) 0 0.1 5 Open 20 +1.2 0 4 8 10 0.02 41.6 30 20 3 22 43 0 0.2 Closed 9 26 3H9 depth 3 +0.025 0 15 36 13 57
for mounting attachment) M3 X 0.5 (Finger closing port) Groove position for auto switch mounting (2 positions) Adjustment needle for finger speed 11.6 3 9.4 S 4 6 0 -0.05 4 7 7 Note) For single acting, one port is used as bleed port. 2.3 17.5 M3 X 0.5 (Finger opening port) MHKL2-12l/Long stroke model 9 20 2-M3 X 0.5 thread depth 5 (Mounting thread) 3H9 depth 3 +0.025 0 2-M3 X 0.5 thread
M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.
Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override
M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.
At compressor discharge concentration 30 mg/m3 (ANR) Modular, Mist separator Series AFM Rated flow rate (l/min (ANR)) Oil mist concentration at outlet side 200 450 1100 Filtration (m) Port size Rc Model AFM20 AFM30 AFM40 AFM40-06 1 8 1 4 , , , , Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) 1100 1 4 3 8 0.3 1 4 3 8 1 2 3 4 At inlet pressure 0.7 MPa (Rated flow depends on inlet pressure.)
Dimensions Grommet VQ1l0l-lGlM5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 Mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking style manual override 30.7 28 11 A P (4.1) (5.9) (5.9) 7 5 5 5 4.9 9.7 4.9 3-M5 (M3) (18.1) ( ): M3 Broken line: locking style manual override 2.9-8 Series VQ100 Dimensions L plug connector VQ1l0l-lLlM5 (M3) (37.8) 31.4 Manual override 6.1 4.9 12.4
(VJA314) ZX1-VJ114K1, J1 q Misc. 1 2 M3 M5 M3 x 0.5 Pilot port/ External release port M5 x 0.8 ZX1-VJ3 4w K3, J2 1 2 e ZX1-VJA3 4 K8 Table (4) How to Order Ejector Assembly Air operated N.C. (ZX1A) ZX1AK6 r 05 ZX1 1 D W Table (2) How to Order Solenoid Valves Assembly no.
indicator LED M3 Ground terminal Position indicator LED LINK OUT GATEWAY UNIT EX500 SERIES IN EX500 SERIES GATEWAY UNIT (M12, 5 pins, socket) LAN PE PE PWR PWR LINK LINK SOL 100 L RUN OUT Power source connector Note 1) MS L ERR.
Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override