AC Servo Motor Driver (CC-Link Type ）

Regenerative power [W] Driver Built-in regenerative LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] resistor LECSC2-T5 30 LECSC2-T7 10 30 100 LECSC2-T8 10 30 100 LECSC2-T9 20 30 100 (2) Parameter setting Set parameter No.PA02 according to the option to be used.

AC Servo Motor Driver

Regenerative power [W] Built-in regenerative Driver LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] resistor LECSB-S5 30 LECSB-S7 10 30 100 LECSB-S8 10 30 100 Note 1. Always install a cooling fan. 2.

7ND9071en

Input: Ui 30 V. Output: Ui 30 V.

AC Servo Motor Driver (CC-Link Type ）

Regenerative power [W] Driver Built-in regenerative LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] resistor LECSC-S5 30 LECSC-S7 10 30 100 LECSC-S8 10 30 100 Note 1. Always install a cooling fan. 2. Values in parentheses assume the installation of a cooling fan. (2) Parameter setting Set parameter No.PA02 according to the option to be used.

CNA

Same side), 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 10 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 (Different sides, Same side), 1 20 95 100 105 110 D-Y7BAL (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 110 + 45 105 + 45 n = 4, 8, 12, 16 100 + 45 n = 4, 8, 12, 16 95 + 45

CNA

Same side), 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 10 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 (Different sides, Same side), 1 20 95 100 105 110 D-Y7BAL (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 110 + 45 105 + 45 n = 4, 8, 12, 16 100 + 45 n = 4, 8, 12, 16 95 + 45

CNA

50 63 80 100 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 X 1.25 6 14 to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 X 1.25 7 18 to 600 MGG 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 X 1.25 7 18 to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 X 1.75 11 22 to 750 MGC 40 37 116 41 160 1/4 1/4 92 30 52 14

Brake mechanism added

(n 4) 2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 15 + 40 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 60 65 70 D-M9V D-M9WV (n 2) 2 10 55 55 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4,

CV/MVGQ

75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77

Electric Rotary Table

Load A Displacement LER50 LER10 LER50 (Basic type) LER10 (Basic type) 200 Displacement (m) Displacement (m) 400 150 350 120 10 20 30 40 LERH50 (High precision type) 50 LERH10 (High precision type) 0 20 40 60 80 100 120 0 5 10 15 20 25 30 Load (N) Load (N) LER30 300 LER30 (Basic type) 250 Displacement (m) 200 50 130 150 LERH30 (High precision type) 0 10 20 30 40 50 60 70 Load (N) Deflection

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

Compact Manifold Regulator Series ARM5

Description Material (Initial setting) Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 10 l/min (ANR) ARM1000 ARM2000 134819-30#1 13615 13614 16.5 x 13.5 x 1.5 JIS B 2401P7 Valve Valve spring Valve guide O-ring O-ring 13626-30#1 13625 13624 23 x 20 x 1.5 JIS B 2401P8 Brass, HNBR Stainless steel Polyacetal NBR NBR 7 8 9 10 11 Initial set point Outlet pressure (MPa) Setting 1.

LEC-OM069xx

For details, refer to 8 MECHATROLINK-II Commands. 10-30 10 List of Parameters (contd) Parameter Name Setting Units Factory When Classification Reference Size No.

CLA

MM I """.0 40 -500 20-500 27 30 60 96 Yo V . 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 30 71 M14X1.5 M18X1.5 M1SX1 .5 M22X l .5 I 50 600 20-600 32 35 70 108 Yo V, 52 20 40 10 95 ' 7 27 59 13 12 M8X1.25 7 30 80 , 63 -600 20-800 32 35 86 11 5 Yo y. 64 20 40 10 102 17 26 67 18 15 Ml0Xl .25 7 40 99 ,. 80 -750 20 750 37 40 102 129 Yo Yo 78 25 52 14 11 3 21 30 72 23 17 M12X1.75 11 48 11 7 , 100

•

Wh'rl 1pc 4) 85 + 30{n 2 4l 10+30(2 2) 75+~24 80+30(11 2 With n pes , . f-f-("::--=-=2.c..; 4 ::-.6 8 '-c---4.,, 8 e.'-,-~.-,-,-'~')c-t-_-"_ _ c..;.-= 8. 12. ' 6 .. )_+_"",":.:=:.: 4 ,,-.",8." "L __--+_-" "'.-= .. ,L)_+--, (" =-,12 '6 (" =4 ',,,2'-.. , ,,,6 ::" ) _~ Wlth2pcs (DiHe!'

CYP_EN

10-AS2301F-01-04-X214 Resin-body Universal type 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 One-touch (Restrictor) fitting 10-AS2301F-01-06-X214 mounted type 10-AS1001F-04-X214 10-AS2001F-04-X214 In-line type (Restrictor) 10-AS1001F-06-X214 10-AS2001F-06-X214 10-ASD230F-M5-04 10-ASD330F-01-06 Dual type (Speed controller) 10-ASD230F-M5-06 10-ASD330F-01-08 Note 1) See SMC Pneumatic Clean Series

7

Cv = 2.4 VXE 40 30 Port size 1/4 10 Cv = 1.9 VXP 20 VXR VXH 10 0.02 0.03 0.032 0.04 0.05 0.055 0.06 0.07 0.08 0.09 0.1 0.16 0.2 0.3 0.4 0.5 VXF Pressure differential P = (P1 P2) [MPa] VX3 VXA 163 VXD Series Specific Product Precautions 1 Be sure to read this before handling the products.

A_HEC-OM-J017

39 0D 01 32 02 32 32 35 30 32 03 32 3F 0D Answer 25.02 deg.C 33 Reading external sensor 2 01 32 05 33 36 3A 0D 01 32 02 33 33 30 30 32 03 32 3C 0D Answer 30.02 deg.C 34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Answer -1.52 deg.C Reading offset 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D 2 36 Offset setting (without writing EEPROM

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

ZL3-OM00801

16 No.ZL3-OM00801-A 7.2 1 (/) ZL3/ZL6 ZL3-JSY3140-5LZ -a 1 3) 2) DC24V 1) 300mm 300mm * *0.150.18Nm 2) D: E: 1 1 1 1 3) 1 1 2 X12 ZL3/ZL6 SY100-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa