MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

Modular Type Regulator Series AR

59 68 68 87 87 V 6 6 7 7 7 E 65 64 66 74 74 84 84 L 44 44 46 54 56 65.8 65.8 F 29.5 28.5 30.5 35 35 44.5 44.5 M 5.4 5.4 6.5 8.5 8.5 11 11 G 2 Note) N 15.4 15.4 8 10.5 10.5 13 13 P 55 55 53 70 70 90 90 Q 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 25 26 31 35.5 37 T 28.5 32.5 38.5 42.5 42.5 AR20K AR25K AR30K AR40K AR40K-06 AR50K AR60K 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 0 3.5 3.5

Digital Flow Switches Series PF2A

0.8 8 OUT1 80 mA 65 180 45 104 79 65 Rc11/2, NPT11/2, G11/2 Rc2, NPT2, G2 46 M6 x 1 9 Load Black 0 V or 75 220 55 114 89 75 56 M6 x 1 9 50 msec 50 msec PF2A7H-(-M) 68 69 Analog output 1 to 5 VDC 4 to 20 mADC 20 5 Analog output [V] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate

Clean Regulator/Fluororesin Type

Integrated fittings 80 Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 OUT IN 100 6 HEX.35 (178) With nut 80 Pilot port Rc, NPT 1/8 12 R 132 100 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 100 SRF50 19 Model A1 A2 B1 B2 OUT IN SRF50S-1S19 SRF50S-1S1925 SRF50S-1S25 SRF50S-1S2519 SRF50S-2S19 42.3 91 58 91 58 91 55 98 55 98 55 98 A1 A2 58 91 6 B1 B2 56 95 56

CJ2

1 !

Title not found

M 1 8 X 1 . 5 [418X1.5 M22X1.5 1,I26X1.5 7 t 2 O 27 n 20 45 153 a 22 85 tiz 1 1 7 162 209 43 1 . 2 59 170 t. 16 30 46 1 0 50 168 0 22 95 74 127 58 1 8 1 232 52 '|.2 66 189 3l 48.5 60 142 0 rE ;ij;5 28 1 0 90 144 58 1 9 1 244 52 1 . 2 66 199 37 55 1 5 23 70 204 0 34 140 1 0 192 71 ?

Air Cylinder CLA Series Fine Lock Model

M14X1.5 M 1 8 X 1 . 5 [418X1.5 M22X1.5 1,I26X1.5 7 t 2 O 27 n 20 45 153 a 22 85 tiz 1 1 7 162 209 43 1 . 2 59 170 t. 16 30 46 1 0 50 168 0 22 95 74 127 58 1 8 1 232 52 '|.2 66 189 3l 48.5 60 142 0 rE ;ij;5 28 1 0 90 144 58 1 9 1 244 52 1 . 2 66 199 37 55 1 5 23 70 204 0 34 140 1 0 192 71 ?

Mechanically Jointed Rodless Cylinder Series MY2

Refer to front matters 54 and 55 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Operating Environment Warning 1.

ZSE F/ISE

) Variations R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 Port size Leak rate 1 x 10 5 Pa. m 3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27 4 High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50 How to Order ISE50

1

6 1/8 1/4 3/8 Internal External Female thread (Rc, NPT) XSA1 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Face seal fitting Compression fitting Female thread (Rc, NPT) 1 Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal fitting Compression fitting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female

Applicable Auto Switch Model

Part No. of auto switch mounting bracket (including nut, screw and spacer) Bore size (mm) 12 BQ-1 Cylinder series 40 BQ-2 80 BQ-2 100 BQ-2 125 BQ-2 140 BQ-2 160 BQ-2 BQ-1 20 16 BQ-1 25 BQ-1 50 BQ-2 32 BQ-2 63 BQ-2 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BMU1-025 BMU1-025 BMU1-025 BMU1-025 BMU1-025 BQ-1 BQ-1 BQ-2 BQ-2 BQ-2 BQ-2 BQ-1 Mounting screw set (Stainless steel specification) Use the following

KS/KX

68 76 94 88 14 4 10.4 10.4 8 17 1 4 15.2 18 18.5 6 26.1 18.0 3 8 Connection thread 1 4 52 18.5 23.5 21 10 3 8 1 2 3 8 1 2 22 7 36.3 29.5 53 54 55 24 20.9 26 22 12 8 46.1 46.1 105 Applicable tubing Reference dimensions after R thread installation.

Low Friction Cylinders Series MQ

1 !

Compact Cylinder with Lock Series CLQ

Unlocking port: Air supplied 1.

17

D 40 55 74 H 3.2 4.5 4.5 J 35 40 47 MM 5.5 6.5 6.5 A 63 76 92 B 78 94 112 C 39 47 56 F 100 124 144 Ea 1 1 1 Eb 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 55 60 72 22 22 32 M6 x 1 M6 x 1 M8 x 1.25 5.5 5.5 6.5 12 12 16 9.5 9.5 11 Mounting direction (2) B1 28 40 44 Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Applicable cylinder MY1B25 MY1B32 MY1B40 A2 B2 C2 D2 F2 K2 Q2 Part

REC

M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 146 20 8 21 215 25 M26 x 1.5 Up to 700 1/8 146 20 8 25 219 32 M26 x 1.5 Up to 1000 1/8 159 20 8 25 232 40 M32 x 2 Up to 1000 1/4 181 23 10

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 No. No.

MXW Series Long Stroke Slide Table

270 120 195 60 MXW25-175 490 6 63 34 142 275 155 225 60 MXW25-200 540 6 88 59 165 305 175 245 55 55 MXW25-225 1 590 7 113 84 187 335 200 275 60 67 MXW25-250 1 640 7 138 109 210 360 225 300 65 80 MXW25-275 1 690 7 163 134 232 395 245 320 60 60 52 MXW25-300 2 740 8 188 159 153 MXW Series Long Stroke Slide Table Auto Switch / Suitable Mounting Position at Stroke End Detection Reed

CKZ2N

1 12.5 8.5 M8 x 1.25 1 12.5 22 R7 R28 22 1 20 22 8.5 R7 22 20 NAAMS code K NAAMS code K Part no.