V

4 09 5/16 11 3/8 Tube T01 1/8NPT T02 1/4NPT 06 6mm Tube 08 8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L

ZP3

(Trivalent chromated) M6 x 0.75 M12 x 1 Steel (Zinc chromated) M10 x 1 5 Fitting 6 Cassette Vacuum inlet direction Lateral Y Type/ZP3-Y ZP3-Y-B-B ZP3-Y-B-(02/04/06) w e Vacuum inlet Vacuum inlet q Component Parts ZP3-Y-B-(U2/U4/U6) No.

F/ISE

Panel mount E Lead wire length 3m L Panel mount + Front protection cover Analog output Suitable model: ZSE50F/ISE50--22/62(L)-(M) F Series ISE50 Series ZSE50F Analog output value (V) Analog output value (V) 5 5 1 1 Unit specification 1.0MPa 0 100kPa 100kPa Note 1) With unit switching function Nil M Note 2) Fixed SI unit Pressure Pressure Note 1) Under the New Measurement Law, which has been

Speed Controller with Uni One-touch Fitting AS Series

1 4 1 4" 18.5 39.4 34.4 32.0 26.6 5 16" 3 8" 19 1 4" 1 4 45.9 40.9 38.1 33.1 23.0 19 20.3 5 16" 3 8" 1 4" 5 16" 19.4 45.0 40.0 37.6 32.6 19 3 8 23.0 3 8" 3 8" 1 2 18.6 24 22.4 54.6 47.1 44.5 37.0 1 2" Note 1) Reference dimensions Note 2) Reference dimensions of Uni thread after installation.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Panel mount E Lead wire length 3m L Panel mount + Front protection cover Analog output Suitable model: ZSE50F/ISE50--22/62(L)-(M) F Series ISE50 Series ZSE50F Analog output value (V) Analog output value (V) 5 5 1 1 Unit specification 1.0MPa 0 100kPa 100kPa Note 1) Nil M With unit switching function Note 2) Fixed SI unit Pressure Pressure Note 1) Under the New Measurement Law, which has been

KP/KPQ/KPG

M KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 4 5 5 6 8 9 13 14 15 18 4 18 20.7 3.5 10.4 3.5 10 D1 6 19.5 22.8 9 12.8 9 L2 A D2 14 8 21.5 26.3 15 15.2 22 12 H Connection threads 10 24 29.4 25 18.5 35 17

Series KP/KPQ/KPG

mm Connection threads R Weight g L2 M D2 L1 Applicable tubing M 4 5 5 6 8 9 13 14 15 18 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 3.5 10.4 3.5 20.7 18 10 D1 6 9 12.8 9 22.8 19.5 D2 L2 A 14 8 12 22

Series KP/KPQ/KPG

mm Connection threads R Weight g L2 M D2 L1 Applicable tubing M 4 5 5 6 8 9 13 14 15 18 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 3.5 10.4 3.5 20.7 18 10 D1 6 9 12.8 9 22.8 19.5 D2 L2 A 14 8 12 22

Compact Electric Actuator Series LG1

5 hole 5 5 5 5 120 130 5 5 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 7 8 9 10 Pin No. 11 12 13 14 15 16 17 19 20 Signal name Digital output power supply Failure Positioning completion Z phase pulse Symbol V+ ALM PF OP SG NP NG PP PG Signal name Shield Driver model MR-C10A MR-C10A1 Symbol SD SG CR LSN LSP V5 SON OPC V24 Interface power supply common Clear Reverse

VVX31/32/33

<* 1 LVA Orifice size 1 2 3 4 5 6 77 6 6 0 6 LVH Rated voltage 1 2 3 4 7 8 ,, 9= 5,'., ?

Compact Cylinder with Lock Series CLQ

(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.

Ejector Valve Unit Series ZYY/ZYX 1

Lead wire length Nil 0.6 m Example) ZSE1-00-15CN-X129 ZS-20-5A-50 1 pc. 1 pc. 30 3 m 50 5 m 13-8-8 9 Ejector Valve Unit Series ZYY/ZYX How to Set the Pressure How to Use the Connector Hysteresis Hysteresis is the difference between the pressure at which the output signal turns ON and the pressure at which it turns OFF. It turns ON at the set pressure. 1.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH. H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

Stainless Steel Heat

1 and 5 for "How to Order" of options.

VXF

530 10 to 60 VXF2150 VXFA2150 170 0.03 1.0 2.0 20 3 4 VXFA 2150 5 to 40 350 0.7 DC DC VXF 2160 5 to 60 580 VC 1.0 AC AC 10 to 60 VXF2160 VXFA2160 1.0 0.03 330 2.0 1 27 VXFA 2160 5 to 40 400 0.7 DC DC VDW Solenoid type VXF 2280 5 to 60 1.0 1500 AC AC VXF2280 VXFA2280 VQ 10 to 60 1.0 0.03 810 2.0 40 1 2 1 VXFA 2280 5 to 40 0.7 1300 DC DC VX2 Note 1) Dew point shall be 10C or less.

VXP21/22/23

40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Selection of air quality by purpose For these cases, degree of quality is 15 4 +3 5 specified as 1, 4, and 2 respectively. 40 5 +7 25 Refer to Guide (1). Refer to Guide (2). Refer to Guide (3). Refer to below piping system chart. Refer to Guide (4) page 14-14-4.

IDUS/IDFS

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

150 to 1000 150 to 700 150 to 700 10 8 8 8 26.5 22 20 20 12.5 11 10 10 24 22 22 18 46.5 37.5 33.5 22 17 17 13 21 19.5 19.5 15.5 55.5 49.5 45.5 40 7 6.8 6.8 6.8 30 28 28 25 227 199 186 186 55 40 40 40 75 55 55 55 51 42.5 34.5 14 12 10 M10 x 1.25 M14 x 1.5 7 56.2 Bore size Y X NN 264 232 219 215 P 181 159 146 146 S 10 8 8 8 Z ZZ Stroke range 1/8 1/8 1/8 1/4 23 20 20 20 27 25 25 21 40 32 25

VXR21/22/23

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)