25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

5 Port Solenoid Valve

COM. () COM. 23 24 (+) 26 21 Note) 22 Positive COM Negative 19 20 19 20 COM 17 18 17 18 15 16 15 16 13 14 13 14 Note) Mounting valve has no polarity.

MXS Series Air Slide Table

15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA 2 2 2 2 2 4 4 M 71 71 71 83 103 149 203 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 Note) Refer to "Dimensions" of MXS 12 on P. 58 for one with shock absorber as symmetric.

3 Port Air Operated Valve

Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.

Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

3 Port Solenoid Valve Series SYJ300/500/700

, R port) 15 (Bracket) 11 10 P R 22.1 6.7 1.2 (PE port) 7 9.2 L plug connector (L): SYJ32-L-M3 M plug connector (M): SYJ32-M-M3 M8 connector (W0): SYJ32-W0-M3 58.5 [60.7] (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) (2) 48.7 [50.9] 57.6 (2) 50.2 43.7 13.5 13.5 13.5 15 15 15 22.1 22.1 22.1 Refer to the page 68 for dimensions with

CG1

to 49st 50st or more 10st or more 15 to 49st 50st or more 10st or more 15 to 59st 60st or more 10st or more 15 to 59st 60st or more 10st or more 10st or more 15 to 64st 20 to 64st 65st or more 65st or more 10st or more 10st or more 15 to 64st 20 to 64st 65st or more 65st or more D-B5, B6, G5, K5 10st or more 15 to 74st 75st or more 10st or more 15 to 74st D-G5W, K59W, G5BA 75st or more D-G59F

2/3 Port Valve

Teflon is a registered trademark of DuPont. 4.2-42

HRX-OM-T002

(including M10 bolts 4pcs.)8 Weight(dry condition) kg Approx.124 Compliance standard CE Marking EMC directive 2014/30/EU Machinery directive 2006/42/EC 1 Use 15% ethylene glycol aqueous solution if operating in a place where the circulating fluid temp. or ambient temperature is lower than 10 oC.

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

Compact Cylinder with Air Cushion

Foot bracket material: Carbon steel Rod end nut L1 Front flange type Front flange type/ RQF, RDQF mm Bore size (mm) Stroke range (mm) A L L1 15 to 50 20 46.5 14.5 28.5 FV FW 15 to 50 25 51.5 15 32.5 mm FX 8 Bore size (mm) B FV FW FX FZ L FZ B + Stroke A + Stroke 2-6.6 20 39 48 32 40.5 60 25 42 52 36.5 44.5 64 Rod end male threads (All dimensions but A, L and L1 are identical to those of the

Manifold Specifications

(mm) Stations L1 L2 L3 L4 11 310.5 300 287 12 12 335.5 325 306 15 13 348 337.5 325 11.5 14 373 362.5 344 14.5 15 385.5 375 363 11.5 16 410.5 400 382 14.5 17 423 412.5 401 11 18 448 437.5 420 14 19 473 462.5 439 17 20 485.5 475 458 14 3-3-84

RQ

Data Flange material: Carbon steel Rod end nut L1 Head Side Flange Style Head side flange style: RQG/RDQG Bore size (mm) Stroke range (mm) A 20 15 to 50 44.5 FV FW 25 15 to 50 49.5 B + Stroke A + Stroke 2-6.6 L Bore size (mm) 8 FX B L FV FW FX FZ FZ 20 4.5 40.5 60 32 39 48 Rod end male thread 25 5 44.5 64 36.5 42 52 } (All dimensions but A is identical to those of the basic style.)

energy saving effect

temperature 32C 25 25 Ambient temperature 43C Cooling capacity [kW] Cooling capacity [kW] 24 20 20 Facility water temperature 40C 15 15 Ambient temperature 45C 10 10 5 5 5 10 15 20 25 30 35 0 5 10 15 20 25 30 35 0 Circulating fluid temperature [C] Circulating fluid temperature [C] 170 Thermo-chiller Inverter Type HRSH Series If the product is used at altitude of 1000 m or higher, refer

HRX-OM-X037

Please refer to the Fig. 9-15, Fig. 9-16 for the Cooling capacity*1 W details.

CLQ

range Without auto switch With auto switch Bore size (mm) B 78.2 85.7 19.5 22.5 68.2 75.7 A LS A B 34.5 38.5 LS X 5.8 5.8 X 4 3.2 29.5 32.5 44.5 48.5 5 to 50 5 to 50 20 25 4-6.6 LZ LX LS + Stroke A + Stroke Bore size (mm) G LH L L1 LX LY LZ X S 14.5 15 27 31 28.5 32.5 24 26 48 52 42 46 62 66 9.2 10.7 45.2 49.2 20 25 L1 Rod end nut Front flange type: CLQF/CDLQF FV S Front flange type (mm)

Compact Cylinder with Lock Series CLQ

range Without auto switch With auto switch Bore size (mm) B 78.2 85.7 19.5 22.5 68.2 75.7 A LS A B 34.5 38.5 LS X 5.8 5.8 X 4 3.2 29.5 32.5 44.5 48.5 5 to 50 5 to 50 20 25 4-6.6 LZ LX LS + Stroke A + Stroke Bore size (mm) G LH L L1 LX LY LZ X S 14.5 15 27 31 28.5 32.5 24 26 48 52 42 46 62 66 9.2 10.7 45.2 49.2 20 25 L1 Rod end nut Front flange type: CLQF/CDLQF FV S Front flange type (mm)

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

0.4

Manifold VP4 1 Plug-in unit How to Order Vacuum Pressure Switches VQ 1/2 VQ 1/2 ZSE1 Wiring specifications CL 00 15 VQ 4/5 Switch spec.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

KG 72309-0114-70-15, etc.