MB1

Port Cushion valve Bore size (mm) Double clevis type/(D) Z ZZ CDH10 32 40 50, 63 80, 100 160 164 190 238 170.5 175 205 261 Double clevis type U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5

REA/REB

-X 20Stop Data 10-2-11 11 Series REA Dimensions REA25/32/40 Effective thread depth J L 0 0.1 B NN G 4-MM H G 2-port size X D I NB NB T N K W N S + Stroke F NA F R ZZ + Stroke (mm) B D F G H I K L MM x J N NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16

REA/REB

T Amount of stroke adjustment (Max. 2 mm) Adjusting bolt Hexagon nut Plate Adjusting Bolt Position (at the time of shipment), Hexagon Nut Tightening Torque Tightening torque (Nm) T (mm) Model REAL10 1 1.67 REAL15 1 REAL20 3.14 1 REAL25 10.8 1 REAL32 1 23.5 REAL40 1 10-2-42 42 Sine Rodless Cylinder Slider Type: Ball Bushing Bearing Series REAL Construction: 10, 15 o !6 @9 !4 @4 #2 y r !

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

15.5 13 42 12 17 17 22 17 22 21 47.5 21 21 33 47.5 21 33 47.5 43.5 17 15 20 47.5 43.5 37 16 23 24.5 19 24.5 63.5 27 19 63.5 27 63.5 27 39 17 22.5 63.5 27 39 43 59.5 23 59.5 20 26 25.5 22 25.5 67 30 22 67 30 42 67 30 42 67 30 26 20 23.5 63 46 63 25 32 25 28.5 25 28.5 36 88.5 36 48 88.5 88.5 36 48 26.5 88.5 36 52 84.5 32 23 84.5 32 32.5 30 30 30 30 36.5 102.5 36.5 36.5 48.5 102.5 36.5 48.5

SMC

-/22-MXS25L-10 13-/22-MXS25L-20 13-/22-MXS25L-30 13-/22-MXS25L-40 13-/22-MXS25L-50 13-/22-MXS25L-75 13-/22-MXS25L-100 13-/22-MXS25L-125 13-/22-MXS25L-150 151 MXS Air slide table 1322Specific Product Precautions Made to Order -X52 Use of fluoro rubber for dust cover and dust plug Be sure to read before handling. 13-MXS Refer to standard products How to Order -X52 Precautions Material used

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

ZX

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

51 61 111 N 4 4 4 4 6 6 6 NA 2 2 2 2 2 4 4 KA 125.5 179.5 13-/22-MXS12-10 13-/22-MXS12-20 13-/22-MXS12-30 13-/22-MXS12-40 13-/22-MXS12-50 13-/22-MXS12-75 13-/22-MXS12-100 786 MXS 1322Air Slide Table Dimensions: MXS12 1322Axial piping (12) MXS12-P 1322Maximum 6.5 Operating port 2 x M5 x 0.8 42 18.7 20 9.5 12 Other dimensions are the same as those of basic type. 787 MXS 1322Air Slide Table

SQ1000/2000

42 P. 49 C6 L6 Terminal number D-sub connector SOL.

Electric Actuator Miniature Rod Type Miniature Slide table Type

This matches the controller. (2) Check Parallel I /O configuration matches (NPN or PNP). (1) LEPS6J-50 NPN (2) 13 - 3.3 Construction Parts list 5 9 1 6 10 8 11 16 4 15 14 2 3 13 7 12 No.

SMC Electronic Switch Series Variations

DIN rail center 70 (94.4) 100 70 (94.4) 100 90 10 SUP 40 (4.5) 30 Adjusting knob Electrical entry Applicable O.D. 6.5 to 8.5 12 Electrical entry Applicable O.D. 6.5 to 8.5 Bracket Gauge 35 42 8-4.5 Gauge 34 42 4-4.5 42 9-M3 OUT1 OUT2 OUT3 Bracket OUT5 OUT4 EXH port EXH port Station 1 n 69.3(MAX74.4) 69.3(MAX.74.4) 60 OUT 60 19.5 2.1 OUT OUT OUT OUT OUT OUT GND OUT6 19.5 2.1 VCC Detection

JXCx-OMU0026

Power supply connector . 42 6.1 Connector specifications . 42 (1) Motor drive power connector : M PWR . 42 (2) Control power supply connector: CI . 42 6.2 Wiring . 43 (1) Wiring of the power supply connector. 43 (2) Wiring of the stop switch . 43 (3) Wiring of the lock release . 44 6.3 Wiring of shutdown circuit . 45 (1) Stop (Stop switch) . 45 (2) Stop (Stop relay contact) . 45 (3) Motor

Square Tube Type Air Cylinder Series MB1

Port Cushion valve Bore size (mm) Double clevis type/(D) Z ZZ CDH10 32 40 50, 63 80, 100 160 164 190 238 170.5 175 205 261 Double clevis type U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5

51

NA P ZZ Z RR S TE TF TH TT TV TW TX TY TZ CA2 20 25 32 40 50 63 112 120 129 141 176 186 91 99 105 113 144 149 Up to 200 CD-G02 CD-G25 CD-G03 CD-G04 CD-G05 CD-G06 24 29 35.5 44 55 69 M5 x 0.8 M5 x 0.8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 11 13 15 18 20 22 57 60 62 62 84 84 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 25 30 35 40 50 60 3.2 3.2 4.5 4.5 6 8 (35.8) (39.8) (49.4) (58.4) (72.4) (90.4) 42 42 48 56

Series SV

13 12.5 12.5 12 12 L4 13 Series SV EX500 Decentralized Serial Wiring How to Order SI Unit Refer to page 3 for valve specifications.

44

Width across flat Effective area (mm2) Weight (g) L M d Model 2 x Applicable tubing H1 H2 I.D. 2.5 3 4 6 7.5 8 9 10 13 H1 H2 H2 4 4 6 8 10 10 12 12 16 KFG2H0425-00 KFG2H0403-00 KFG2H0604-00 KFG2H0806-00 KFG2H1075-00 KFG2H1008-00 KFG2H1209-00 KFG2H1210-00 KFG2H1613-00 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 7 11 25 43 42 44 42 71 1.6 2.6 6 17 30 35 45 57 101 8 8 21.8 5 d 10 14 10 14 24.8 28.6 5.8 6.6

mb1

Without Air Cushion Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 170.5 160 164 190 238 175 205 Double Clevis Style 261 U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 Up to 500 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5 10 10 14

2/3 Port Valve

Refer to p.4.1-12, 4.1-13 for specifications and model.