Air Pilot Operated

Klt (when tactory assembted) XX = No. of Stailons DIMENSIONS A B BBD E G H K M N 3.58 (91) 4.61 ( 1 1 4 2.56 (65) 3.58 r) 1.22 (31) 1.50 (38) 0.26 (5.5) 3.29 (83.5) 3.23 (82) 1,42 (36) 2.05 (52) 't.10 (28) 0.59 05) 'Dlmension if DC Sotenold is Used Mlllimeters In Parentheses MANIFOLD DIMENSIONS I-!

Air Pilot Operated Series NVSA

Klt (when tactory assembted) XX = No. of Stailons DIMENSIONS A B BBD E G H K M N 3.58 (91) 4.61 ( 1 1 4 2.56 (65) 3.58 r) 1.22 (31) 1.50 (38) 0.26 (5.5) 3.29 (83.5) 3.23 (82) 1,42 (36) 2.05 (52) 't.10 (28) 0.59 05) 'Dlmension if DC Sotenold is Used Mlllimeters In Parentheses MANIFOLD DIMENSIONS I-!

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Refer to front matters 42 and 43 for Safety Instructions, and pages 507 to 509 for High Purity Chemical Air Operated Valve/Compact Type Precautions.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

140 130 204 20 16 100 170 250 100 35 123 193 273 1/5 stroke 125 R2.5 42 170 162 234 20 16 100 170 252 100 35 123 193 275 160 R2.5 52 212 200 284 24 20 108 187.5 280 120 38 131 210.5 303 98 Series CHA Dimensions Front trunnion type: CHAU Z 2-Rc P Cushion adjustment screw 4-J Air release GB GB TT V T Width across flats G MM R (max.)

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

How to Order AMJ Metric size Applicable tubing size Metric size (Release button: Light gray) AMV Symbol Bore size Applicable model AEP B ZFC 0 02 05 Metric size ZFC05 ZFC10 ZFC20 02 23 04 06 08 2 3.2 4 6 8 HEP Made to Order B Inch size ZFC 1 05 01 Related X17 Metal case Equipment Refer to page 1115 for details.

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

Cylinder with Lock

2 Component Parts Component Parts Note No. 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 No.

Air Cylinder

34 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 41 41 41.5 41 44 41 41 41 41 41 49 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 49.5 49 50 49 52.5 49 49.5 49 49.5 49 56 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 58.5 56 61 56 56.5 55.5 57.5 55.5 65 56 66 58.5 68 102.5 112.5 61.5 57.5 61 57.5 104 121 112 121 20 Auto Switch Mounting Series CA2 Minimum

•

El F B Ie (mm) (mm) (mm) 3 o o J I v K KA M N P W MM 5 :7 M1 6 x 1.5 17 34 30.5 M36 x l .S 3/4 C. 78.5 1 42 18 15 20 34.5 106 0160 Up to 1200 53 177 144 38 56 o 15 27 27 15 M14 x 1.5 15 M30 x 1.5 30.5 112 98 Up to 1000 47 143 115 32 17 0 125 50 7t ' 43 ':5.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

0.4

fitting assembly C6: 6 one-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 23 P = 22 L1 L2 L3 ( 9.5) ( 9.5) 80 39.5 (For C6, C8) (For C6, C8) (For C6, C8) ( 9.5) DIN rail clamp screw 2 x M4 mounting hole 4.5 2 x M6 mounting hole IN IN IN IN 5.5 (5) 69.5 (40) 6.5 58 10.5 80 37.5 Residual pressure release manual override (For C6, C8) 22 20.5 7 Stations 1 2 3 n D side U side (33) (59.5) 58

3 Port Air Operated Valve Series SYJA300 1

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

CG5-S

H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8 Clevis pin ( ) GB MM CA CB D NA A CX + 0.2 + 0.1

VQ7-6/7-8

) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 25 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Prewired Connector Type 2 position single : VQ7-8-FG-S-SC single (Reverse

VQ7-6/7-8

) 5 3 1 23(30) 38(53) 32(42) 1 23(30) 2-3/8, 1/2, 3/4 30(42) 30(42) X(PE) port 1/8 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R !

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

VZM400

3 Stainless steel y POM u POM 5-6-42 5 Port Mechanical Valve Series VZM500 Series VZM500 Basic VZM550-01-00 Accessory mounting hole (Pilot exhaust port) SA JIS Symbol VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2-3.2 mounting hole 2.0 mm O.T. 3.0 mm T.T.

MGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGC MGF CY1 MY1 3.20-13 Series MGC Auto Switch Proper Mounting Position (Stroke End) D-C7, C8 D-H7 D-B5, B6 D-G5, K5 D-B7, B8 D-G7, K7 Auto Switch Mounting Position Auto Switch Mounting Height (mm) (mm) D-G5, K5 D-G5lW D-K59W D-B5, B6 D-B59W D-G5BAL D-G59F D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-H7C D-G5NTL D-C7, C8 D-H7 D-H7lW D-H7lF D-H7BAL Auto switch D-B7