Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/

Modular Type Air Filters Series AF

40 20 30 27 22 5.4 8.4 40 2.3 28 115 1/4, 3/8 53 129 14 26.5 30 50 26.5 41 40 23 6.5 8 53 2.3 30 170 AF 70 165 18 35 38 75 35 50 54 26 8.5 10.5 70 2.3 35 204 1/4, 3/8, 1/2 75 169 20 35 38 75 35 50 54 25 8.5 10.5 70 2.3 34 208 3/4 AR 90 245 24 45 20 45 70 66 35 11 13 90 3.2 47 284 3/4, 1 95 258 24 47.5 20 47.5 70 66 35 11 13 90 3.2 47 297 1 AL Semi-standard specifications AW With barb

Air Cylinder

16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 32 50 18 28 56 25 40 3 71 13 89 M10 x 1.5 10 22 35 M22 x 1.5 86 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 41 60 22 32 64 30 50 3 71 16 110 M12 x 1.75 10 26 43 M26 x 1.5 106 (mm) (mm) With Air Cushion With Rod Boot (mm) Bore size Rc, NPT port WA WB Wq WH GA GB P 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20

NCG/CG1

16 50 59 72 45 20 16.5 11 38 32 Up to 1200 35 27 32 2 14 14 58 M10 x 1.5 depth 16 63 68 89 53.5 25 19 13 50 37 Up to 1400 40 32 40 3 20 20 71 M10 x 1.5 depth 22 80 79 110 64.5 30 20 16 60 37 Up to 1500 40 41 50 3 20 20 71 M12 x 1.75 depth 22 100 Bore size (mm) K KA MM MO NA P RF S TA TC TDH9 TE TF TG WL ZZ +0.08 0 8 20 M8 x 1.25 15 1/8 11 11 M5 x 0.8 15 118 5.5 4 24 81 0.5 5 6 10 +0.08 0

42

port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

KQ2

KQ2Y06-M5 14.7 M5 x 0.8 M6 x 1.0 7 11.6 17.1 28.7 13.5 17.1 4.5 4.5 KQ2Y06-M6 15.7 7 8 1 8 KQ2Y06-01S 39 22.1 12 10 6 12.8 17 10 20 1 4 KQ2Y06-02S 26.5 41 17 14 10.6 13.4 20 D 3 8 KQ2Y06-03S 27.9 42.5 34 1 8 1 4 KQ2Y08-01S KQ2Y08-02S 43.5 45.5 23.6 28 12 14 22 8 14 17.7 15.2 18.5 25.6 12 23 3 8 KQ2Y08-03S 17 29.4 47 36 Connection thread 1 8 KQ2Y10-01S 26.1 49.5 31 1 4 3 8 KQ2Y10-02S

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

Electric Actuator

10 12 6 50/20 5 16 50/20 Actuation type Ball screw Ball screw + Belt [1:1]/Ball screw Sliding bushing (Piston rod) 41 to 101F (5 to 40C) 90 or less (No condensation) 100 W/l40 AC servo motor (100/200 VAC) Ball screw + Belt [1.25:1] Sliding bushing (Piston rod) 41 to 101F (5 to 40C) 90 or less (No condensation) 200 W/l60 AC servo motor (100/200 VAC) Guide type Operating temp. range Operating

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

Modular F.R.L. Unit

27 25 28 89 114 26.5 40 83 2 Note 1) 65 29.5 3.2 2.5 50 5.5 5.5 12 33 24 41.5 30 132 143 28 50 110 28.5 64 13 4 71 7 7 14 55 35 41 0 184 146 31 50 110 30.5 10 66 4 71 7 7 14 35 55 41 187 3.5 183 36 75 145 35 74 12 4 88 9 18 9 40 50 72.5 222 3.5 185 36 75 155 74 35 4.6 12 88 9 9 18 40 77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4

Free Mount Cylinder

size (mm) Q QA P R T S Z S Z 15st 81 92 101 110 118 129 5 st 38 41 45 41 45 47 10 st 43 46 50 46 50 52 15 st 48 56 60 56 60 62 5 st 61 67 76 75 83 94 10 st 71 77 86 85 93 104 15 st 81 92 101 100 108 119 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 61 67 76 85 93 104 10 st 71 77 86 95 103 114 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5

Valve Single Unit

20 00N 20 stations NPT SS5X3-20-05 (5 stations) NPTF 00T Stations3 2 1 Connector assembly for L and M types Refer to page 1-6-8.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 X 0.8 20 stations 20 P Port Note) If more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port. M5 X 0.8 SY 41 Type Applicable solenoid valve SYJ314-l SYJ314M-l SYJ324-l SYJ324M-l How to Order SS3YJ3-41-05 --M3 SYJ 41 Type S41 Type Coil is located on same side as the A port.

Air Cylinder Series MB

20 14 15.5 19 75 15 1/4 104.5 58.5 5 32 18 63 Up to 600 45 17.5 35 27 11 75 134.5 56.5 14 20 20 14 16.5 23 90 12 1/4 119.5 68 9 37 22 80 Up to 800 45 22 40 32 13 95 169 72 22 30 25 20 19 33 102 18 1/4 150 81 11.5 26 37 100 Up to 800 55 25 40 41 16 114 189 89 22 30 30 20 19 37.5 116 20 1/4 170 96 17 Bore size (mm) T S U V L GF K MM Q RR H VA W Z ZZ J P GE N 34 32 154 13 6.5 18.3 6 23 M10

Compressed Air Cleaning Filter Series

36 41 1/4, 3/8 172 18 145 90 20 90 10 222 80 28 8 7 7 14 7 12 50 80 95 34 5 2.3 32 37 42 41 3/8, 1/2 204 20 166 106 20 106 10 246 90 31 10 9 9 18 9 15 55 88 111 50 9 3.2 37 37 43 41 1/2, 3/4 225 24 200 122 20 122 15 278 100 33 10 9 9 18 9 15 65 102 126 60 10 3.2 39 37 51 41 3/4, 1 259 41 Micro Mist Separator with Pre-filter Series AMH Dimensions AMH650 Auto drain D: With auto drain (N.O.

Best Pneumatics Vol. 14

25 0 26 13.5 89 4.5 2.8 40 114 26.5 40 83 5.5 12 33 24 41.5 30 29.5 2 (1) 2.5 65 132 5.5 3.2 50 143 28 50 110 14 7 35 41 55 28.5 64 13 184 7 4 71 0 146 31 50 110 7 14 35 55 41 66 30.5 7 4 71 10 3.5 187 183 36 75 145 9 18 72.5 40 50 35 74 12 222 9 4 88 3.5 185 36 75 155 9 18 40 77.5 50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11

F

~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC Material Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Courtesy of Steven Engineering, Inc. !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRBU2 T Single round shaft Double shaft (Long shaft without key and with our chamfers) J CRB1 K Double round shaft MSU CRJ CRA1 Dimensions (mm) J (Double shaft/Long shaft without key & with four chamfers) CRQ2 T (Single round shaft) K (Double round shaft) Shaft type MSQ MRQ DConfiguration 20M 20 22 25 30 UU 118 139 167 202 D (g6) 15 17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60