3 Port Solenoid Valve/

Thread Rc G NPT Nil None Port size 06 3/4" 10 1" A Yes 8 B 5/16" For internal pilot, the symbol is nil. Refer to Piping for External Pilot Type on page 20 for selection of the check valve. Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-.

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

Manifold Specifications

VV5ZS3 02 06 51F 1 D Thread type VK Series VZS3000 Manifold Standard Nil NPT Rc N T F VZ Plug-in type Stacking type manifold base with D-sub connector NPTF G Option Port size VF Rc 1 8 02 Rc 1 4 01 U side Connector mounting direction VFR Connector mounting position Symbol Applicable stations Embedded type One-touch fitting Applicable tubing O.D.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9

KN Series Nozzles for Blowing

Copper extension nozzle/KNL (mm) Model Nozzle size D Outside diameter L1 Weight (g) KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 43 43 61 61 94 94 84 84 117 117 183 183 O.D.

HRX-OM-M005

-TH2 -TH3 CH1-21 CH2-21 Controller Error FLT Stop -AT1 An error was detected during auto tuning of the electron expansion valve. Contact the product supplier for request of inspection and repair. -AT2 Contact the product supplier for request of inspection and repair. -LMT An error was detected in internal processing of the product.

HRX-OM-W004

3.13.8 Data display . 3-21 3.13.9 Circulating fluid set temperature . 3-21 3.13.10 Operation Start Command. 3-21 3.13.11 Serial remote instruction . 3-22 3.13.12 Data instruction . 3-22 Chapter 4 Communication alarm function . 4-1 4.1 Communication alarm occurs . 4-1 4.2 Communication alarm reset . 4-2 4.3 Setting and checking . 4-2 4.3.1 Setting and checking items. 4-2 4.3.2 Setting and

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 2 Stations

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 5 Stations

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 10 Stations

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 20 Stations

Piping: Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: -

Piping: Base Mounted Common SUP Common EXH, Stations: 5 Stations, A B Port Size: -

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: -

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

9 D20 to 63 80, 100 -X @7 y w 20Data 40 to 100 80, 100 With rod end locking (Base cylinder only) Since the guide unit figure is the same as the standard type, refer to pages 8-21-19 to 8-21-21. Component Parts Zinc chromated For lock type Material Note Material No. Description No.

AIR COMBINATION

AC30*-B AR30-B AFM30-A AL30-A AR30-B AFM30-A AL30-A AR30-B AF40-A AF40-A AW40-B AF40-A AW40-B AC40*-B AR40-B AFM40-A AL40-A AR40-B AFM40-A AL40-A AR40-B AF40-06-A AF40-06-A AW40-06-B AF40-06-A AW40-06-B AC40*-06-B AR40-06-B AFM40-06-A AL40-06-A AR40-06-B AFM40-06-A AL40-06-A AR40-06-B AF50-A AW60-B AF50-A AC50*-B AR50-B AL50-A AR50-B AL50-A AF60-A AF60-A AC55*-B AR50

CL

21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 Note) In installing an air cylinder, if a hole must be made to accommodate the rod portion, make sure to machine a hole that is larger than the boot outer diameter e.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

(Specific Product Precautions 4/Maintenance 5 on page 7) 21 VCC Series Parts Description Model Symbol Description 2 port valve Part no.

KRM

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

AZ1000

slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Code Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Connections (Inletq, Outletw) Bonnet option 01 02 06

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

(For details, refer to pages 20 and 21.)