20

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 Nozzle size Nil 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

T/TIA

Calle 18 69-05 Apart.

ZQ-OM01301

ZQ-OM01301-A 1.How to Order Vacuum Ejector System (without energy saving function) Model of a single unit ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4)(5) (6) (7) (8)(9)(10)(11)(12) (7) Vacuum pressure switch unit specifications NilNote 3) With unit selection function (1) Nozzle nominal size M Fixed SI unit (kPa) 05 0.5 P Note 3) With unit selection function 07 0.7 (Initial value psi) 10

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)

Polyurethane Flat Tubing Series TFU

Calle 18 69-05 Apart.

KDM

Calle 18 69-05 Apart.

20

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 Nozzle size 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

Flame Resistant (Equivalent to UL-94 Standard V-0) FR Double Layer Tubing Series TRB

Calle 18 69-05 Apart.

SJ3A6

For D-sub connector: Page 15, 16 For flat ribbon cable: Page 20, 21 For EX180 serial wiring: Page 38, 39 For EX510 serial wiring: Page 46, 47 Applicable connector: D-sub {JIS-X-5101, MIL-C-24308} equivalent No. 1 terminal In case of 60Sl In case of 60FD 72 Individual Wiring Non-plug-in Vacuum Release Valve with Restrictor Series SJ3A6 How to Order P Individual wiring manifold 60 U SS3J3 05

Fieldbus system EtherNet/IP compatible SI Unit

Refer to "IP address setting switch" (page 21) for details. Program etc. is defective. Check if the ladder program of master, etc. is correct. Check if the green PWR(V) LED of the SI unit is ON. If the LED is off, or the red LED is ON, supply 24 VDC +10/-5% to the power supply for output. Power supply for output is out of range.

A

Calle 18 69-05 Apart. Aereo 081045 Santa Fe de Bogot, Colombia TEL: 1-424-9240 FAX: 1-424-9260 14-21-20

PC Wiring System

Specifications Specifications Standard specifications Symbol 02 05 For connection of PCW unit compatible with KEYENCE CORP.

CE2

NT-04 NT-05 NT-08 NT-10 M14 x 1.5 8 22 25.4 21 CX 11 27 31.2 26 M18 x 1.5 13 32 37.0 31 M22 x 1.5 CY 16 41 47.3 39 M26 x 1.5 MQQ M Allowable Kinetic Energy RHC Operate the stroke reading cylinder with brake within the proper allowable kinetic energy. It must not be operated out of the allowable range, which is shown in the graph on the right.

CE2

NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 M14 x 1.5 CX 26 31.2 27 11 M18 x 1.5 31 37.0 32 13 M22 x 1.5 CY 39 47.3 41 16 M26 x 1.5 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Allowable Kinetic Energy RHC Operate the stroke reading cylinder with brake within the

HRX-OM-I051

Check for fluid leak from circulating fluid piping in your system. 20 Internal Pump Time Out WRN Continued 21 Controller Error FLT Stop An error was detected in the control system. Contact the system supplier for request of inspection and repair.

Applicable Auto Switch Model

BA-06 BA-08 BA-10 BMA2 -063 BMA2 -050 CDG1, MGG BA -01 BA -02 BA -32 CDLG1 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 BA -04 BMA2 -050 BA -05 BA -06 BA -08 BA -10 MGC RHC, MLGC, REC BA01 BA32 BA02 BMA2 -050 RSDG Mounting screw set (Stainless steel specification) Use the following mounting screw set (Set screw included.) according to the required operating conditions.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

28 22.5 M5 x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52 38.5 25 M5 x 0.8 6 499 Series LVD With flow rate adjustment (Max.

HRX-OM-K003

An insufficient amount of the circulating fluid is observed in the tank. 05 Reservoir Low Level FLT Stop Replenish the circulating fluid. An insufficient amount of the circulating fluid is observed in the tank. 06 Reservoir Low Level WRN Continued Replenish the circulating fluid.

Serial Network

022-548-50-87 Hong Kong Phone: 2744-0121 Fax: 2785-1314 Belgium Phone: 03-355-1464 Fax: 03-355-1466 Quebec Phone: (418) 654-1997 Fax: (418) 654-1998 Milwaukee Phone: (262)827-0080 Fax: (262) 827-0092 Austin Phone: (512) 926-2646 Fax: (512) 926-7055 Portugal Phone: 21-471-18-80 Fax: 21-471-18-90 India Phone: 0118-568730 Fax: 0118-568933/568734 Czech Republic Phone: 05-414-24611 Fax: 05-412

Air Pilot Operated

DIMENSIONS a o 5.30 (137) 4.80 (1e) 2.13 (s) 2.36 (60J 3.27 (33) 3.23 182) r.06 (21! 0.35 (9) 5.51 t140) 2.52 t&) /62\ 3.31 ,ll 3.58 (91) 1.06 tzn 0.t9 (10) 7.28 (186) (1661 2,83 (721 2.99 (76) 386 (s) 4.29 009) (31) 112) 63d3drd.r.i r3s.15,(.)rrr.i r.'