Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 3 Stations, A B Port Size: 00N (NPT)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: 00N (NPT)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: 00N (NPT)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 14 Stations, A B Port Size: 00F (G)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: 00F (G)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: 00N (NPT)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 00F (G)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 00N (NPT)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: 00N (NPT)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: 00N (NPT)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: 00F (G)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 12 Stations, A B Port Size: 00N (NPT)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 16 Stations, A B Port Size: 00N (NPT)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: 00F (G)

VXA21/22

42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104

HEC-OM-S008

31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38

High Power Cylinder Series RHC

51 6 7 16 14.5 10 32 18 8 200 to 700 20 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 200 to 700 25 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 200 to 1000 32 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 200 to 1000 40 NN ND NF NE NC K NB JD NA JC WH N ZZ P 1/4 I MM S H Bore size (mm) M22 x 1.5 15.0 13 33.5 5.5 5 30 30.5 26 43 22 252 26 44 M8 x 1.25 192 20 1/4 M24 x 1.5 19.6

High Power Cylinder:

Reed Solid state D-A33, D-A34, D-A4 D-G39, D-K39 BD1-02M BD1-02 BD1-04M Precautions Be sure to read before handling.

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 ARJ 0.204 0.5 0.2 AR425 to 935 Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 ARX 0.3 0.200 AMR 0.1 0.2 0.198 ARM 0.05 0.1 0.196 ARP 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C