VR4151/4152

10.4 2-6.5 2-6.5 42 8 54 66 Back side mounting Bottom mounting 3 Series VR51 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

and PF2A751-04 CAT.ES100-95A Series PFMB Series PFMB 2-Color Display Digital Flow Switch Flow adjustment valve is integrated. 500 L/1000 L type 200 L type Flow adjustment valve Reduces piping installation work and space requirements.

For Water Digital Flow Switch Series PFW

For Water Digital Flow Switch Series PFW How to order PFW7 20 03 27 Integrated display type Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Unit specification Thread type Nil M With unit switching function Fixed SI unit Note) Rc NPT G Nil N F Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l 3m lead wire with connector Without lead wire

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Refer to front matters 42 and 43 for Safety Instructions, and pages 507 to 509 for High Purity Chemical Air Operated Valve/Compact Type Precautions.

60

VHS2510 VHS3510 VHS4510 VHS5510 Double action 1/8 1/4 3/8 1/2 3/4 Body 1 Features 2 Conforming to OSHA Standard Pressure Relief 3 Port Valve with Locking Holes (Single Action) SeriesVHS20/30/40/50 RoHS How to Order 04 A BS VHS 40 Single action Pressure relief 3 port valve Made to Order Symbol Description Body size X1 Body: Red Note) Symbol Note) Refer to Photo of X1 in Feature 2 Thread type

Air Cylinder

Rod Trunnion (U) with Pivot Bracket TS Bracket mounting range B TH TT 4 x TF Z TW TY TX TV +0.10 0 TE Male Thread Female Thread (mm) (mm) Bore size B TE TF TH TS TT TV TW TX TY Z 20 38 10 5.5 25 28 3.2 35.8 42 16 28 46 25 45.5 10 5.5 30 33 3.2 39.8 42 20 28 51 32 54 10 6.6 35 40 4.5 49.4 48 22 28 51 40 63.5 10 6.6 40 49 4.5 58.4 56 30 30 62 50 79 20 9 50 60 6 72.4 64 36 36 71 63 96 20 11

Digital Flow Switch (Integrated display type) ( compatible)

Nominal thread size Tightening torque Rc(NPT)3/8 15 to 20 Nm Rc(NPT)1/2 20 to 25 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm Rc(NPT)1 1/4 40 to 42 Nm Rc(NPT)1 1/2 48 to 50 Nm If the tightening torque is exceeded, the product can be broken. If the correct tightening torque is not applied, the fittings may become loose. Avoid any sealing tape getting inside the piping.

HRX-OM-X010

HRZ***-WS/W1S/W2S-F: 110 deg C HRZ008-L/L1-F:110 deg C 04 CPRSR Overheat FLT Stop Check that facility water is being supplied to this system. An insufficient amount of the circulating fluid is observed in the tank. 05 Reservoir Low Level FLT Stop Replenish the circulating fluid.

PFxx-OMA1007

(page 141) -142No.PF-OMA1007-B Air Management Hub Base type EXA1-20/30/40-PN/EN/EC-# Model A B C D E F EXA1-20 236.2 35 42 19.1 65.1 30.5 EXA1-30 236.2 43 53 13.6 65.1 30.5 EXA1-40 240.4 51 64.4 4.6 71 35.5 -143No.PF-OMA1007-B EXA1-60-PN/EN/EC-# -144No.PF-OMA1007-B Remote type EXA1-20/30/40-SA-# Model A B C D E F G EXA1-20 236.2 35 42 19.1 65.1 30.5 74.7 EXA1-30 236.2 43 53 13.6 65.1 30.5

Filter Regulator

Disassembly Drawing] (P41-42). Note 3) "Z" in Part No. (9) indicates semi-standard specifications. The pressure unit: psi. The temperature unit: oF. Note 4) Refer to section [4.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Rotary Clamp Cylinders

When mounting models D-M9(V), M9W(V), M9A(V), and A9(V) with between 32 and 50 on sides other than the port side, please order a switch mounting bracket separately as per the instructions on page 17, and refer to cases CDQP2B32 to 100 in Information (04-E514) Cylinder with Compact Auto Switch.

7.4

Dual 3-port valve S07 A B C6 0.58 0.39 0.16 0.67 0.37 0.18 25 or less 49 2-position Single S0712 0.51 0.40 0.15 0.64 0.33 0.15 22 or less 34 Double S0722 0.51 0.40 0.15 0.64 0.33 0.15 10 or less 42 Manifold 3-pos. Bar Base 3-position closed center S0732 0.54 0.37 0.10 0.46 0.38 0.08 45 or less 42 Page 745 4-pos.

Speed Controller: Standard Type Large Flow In-line Type AS Series

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

Digital Flow Switch Series PFA For Air Series PFW For Water

specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Rc NPT G Nil N F 3m lead wire with connector Without lead wire Nil N Output specification Port size Size Applicable model Flow rate (l/min) Nil Output specification Applicable model Symbol 10 50 100 200 500 PFA710, 750 PFA711, 721, 751 PFA711, 721, 751 NPN open collector 2 outputs 27 1/8 1/4 3/8 1/2 01 02 03 04

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Low Friction Cylinders Series MQ

24.5 55 175 20 8 Rod side flange type: MQMLF 6 20 REA 2.3 33 42 27.5 REB 2 x 5.5 66 + Stroke 93.5 + Stroke REC 10, 16, 20, 25 CY CX FY MQ FT RHC FX FZ H 2 x FC S + Stroke ZZ + Stroke RZQ (mm) DBore size (mm) FC FT FX FY FZ H S ZZ -X 10 5.5 2.3 33 20 42 28 65 101 16 5.5 2.3 42 24 54 30 74 114 Individual -X 20 7 4 60 34 75 40.5 97.5 151 25 7 4 60 40 75 44.5 102.5 160 1185 Series MQM Refer

MB

42 53 53 73 73 90 9 9 10.5 10.5 12.5 12.5 13 MB-B03 MB-B05 MB-B08 MB-B12 Rotating Angle Mounting plate Model without air cushion is designed to include rubber bumpers.

Compact Cylinder with Lock Series CLQ

Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL Auto switch model D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-A73C D-A80C D-P4DWL Bore size (mm) Hs Hs Hs Hs Hs Hs Hs 20 25 32 40 50 63 80 100 D31.5 32.5 38.5 35 38 34 -X 35 36 42 38.5 41.5 37.5 44 41 42 48 44.5 47.5 43.5 50 Individual -X 47.5 48.5 54.5 51 54 50 56.5 57.5 58.5 64.5 61 64 60