4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

Vacuum Ejector Series ZM

40 40 60 30 30 Suction flow rate 40 20 20 20 10 10 0 0 0 0 45 40 35 25 15 30 20 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate l/min (ANR) 992 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021 Model Sensor type Switch Set pressure

REC

8 10 32 32 52 192 202 150 to 700 20 1 8 34.5 M26 X 1.5 25 146 9 10 40 40 60 196 206 150 to 700 20 1 8 42.5 M26 X 1.5 32 159 9 10 40 40 60 209 219 150 to 1000 22 1 4 51 M32 X 2 40 181 10 11 53 53 77 236.5 247 200 to 1000 26.5 4.9-13 Series REC Construction !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

pilot port) (Lead wire length) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 75.4 [82.4] 34.5 17.5 15.5 96.5 44.5 29.5 29.5 3/8, 1/2 [1(P), 5(EA), 3(EB) port] L plug connector (L): 10-SY9 40(R)-LM plug connector (M): DIN terminal (D, Y): 10-SY9 40(R)-WO3 4 5 M8 connector (WO): 3 4 5 3 4 5 3 4 5 D Y 10-SY9 40(R)10-SY9 40(R)

Ｖ cylinder

Wear ring number Wear ring number 40 C1A040-07-305B 50 C1A050-07-306B 63 C1A063-07-307B 80 C1A080-07-308B 100 C1A100-07-309B C a u t i o n The seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year. 3-3-2. Storage of seals C a u t i o n Store seals in sealed packaging such as polyethylene bag and place it in a box.

Air cylinder

Grease pack part number: GR-S-010(10g) , GR-S-020 (20g) B Wear ring number 40 C1A040-07-305B 50 C1A050-07-306B 63 C1A063-07-307B 80 C1A080-07-308B 100 C1A100-07-309B C a u t i o n The seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year. 3-3-2.

AC Servo Motor Driver (CC-Link Type ）

Home position return position data Parameter No.PC07 Set the current position at home position return completion. 5 40 5.

AC Servo Motor Driver (CC-Link Type ）

Regenerative power [W] Driver Built-in regenerative LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] resistor LECSC2-T5 30 LECSC2-T7 10 30 100 LECSC2-T8 10 30 100 LECSC2-T9 20 30 100 (2) Parameter setting Set parameter No.PA02 according to the option to be used.

High Power Cylinder:

Material 20 25 32 40 Piston seal NLP-20A NLP-19A NLP-32A NLP-40A NBR !

HRX-OM-M005

5 to 40 Circulating fluid flow setting range*4 L/min 10 to 40 10 to 40 Circulating fluid discharge pressure display range MPa 0 to 1.5 0 to 1.5 -30 to 40C: Galden HT135*5 FluorinertTM FC-3283*5 20 to 90C: Galden HT200*5 FluorinertTM FC-40*5 Circulating fluid (No intrusion of foreign body) Refrigerant R404A (HFC) R404A (HFC) Quantity of refrigerant kg 2.9 0.72 (At 20L/min) 0.72 (At 20L/min

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Nil, G 1 to 40 DC Note) With no condensation How to Order (Single Unit) 5 01 GY1 VX 2 0 21 Normally Closed (N.C.)

LEC-OM02904

(1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 .

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Maximum vacuum pressure 84 kPa (630 mmHg) The suction volume has been increased by 40% through the adoption of a twostage nozzle construction.

ZX

Red Diode Coil Black Light/Surge voltage suppressor Coil 13-2-40 40 Vacuum Module: Vacuum Pump System Series ZX ZX Table (1) Valve Unit/Combination of Supply Valve and Release Valve (Refer to page 13-2-42 for details specifications.) ZR Components Solenoid valve Supply valve Release valve Air operated External release N.C. (VJA314) ZX1A None None Air operated N.C. (ZX1A) N.O.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Compact manifold regulator ARM5 Series

(located on both the right and left side) Before disassembly, be sure to check that no inlet or outlet pressure is applied and exhaust the internal pressure thoroughly before starting the job. 707 Regulator Single Unit Type ARM5S Series How to Order A 07 S ARM5 Single unit type 1.

Nozzle Type Ionizer

ON OFF Output Maintenance signal Requirement for maintenance detected ON OFF Input External switch signal 1, 2 16 IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01m 06 07 High flow rate nozzle IZN10E-02m 06 07 18.31 (100) 2.5 16 5 92.5 46 3.5 L 6 18.5 6 11 8 L 12.4 5 6 M3 x 0.5 thread depth 4 (Ground terminal) 40 27.7 L-L Applicable tubing O.D. d A 86.4 [mm] Model

Valve Single Unit

A: Orange B: Green (Mounting hole) M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 5-Rc 3/8, 1/4 (Piping port) 3 4 5 02 03 3 4 5 L plug connector (L): SX7 40(R)-LM plug connector (M): SX7 40(R)-M02 03 Manual override (Press and turn for the locking type.)

Air cylinder

Consumable parts 3-3-1 Replacement parts 20 25 32 40 Seal kit number CG1N20Z-PS CG1N25Z-PS CG1N32Z-PS CG1N40Z-PS Grease pack (Accessory) GR-S-010(10g) Rod seal Piston seal Contents of the Tube gasket seal kit Grease pack (10g) 1pc. of each 20 25 32 40 Wear ring CM-020-07-301B CM-025-07-302B CM-032-07-304B C1A040-07-305B Grease pack part number: GR-S-010(10g) GR-S-020 (20g) C a u t i o n