SMC Pneumatic Clean Series

3 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M8 x 1.25 depth 16 Up to 300 Up to 300 Up to 300 35 40 40 32 37 37 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 Note) < >: Denotes the dimensions for G port.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) D FC GC 6 8 11 15 A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 2.6 3.3 5.1 6.8 8.6 9 12.5 16.5 20 24.5 28 37 54 71 80 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

Escapements Series MIW/MIS

Body through hole Max tightening torque (Nm) Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 Bolt M2.5 x 0.45 0.5 M3 x 0.5 0.88 M5 x 0.8 4.3 M6 x 1 7.3 M8 x 1.25 17.5 Max tightening torque (Nm) Bolt Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 M3 x 0.5 0.88 Caution M3 x 0.5 0.88 1.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 D FC GC 6 8 11 15 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 9 12.5 16.5 20 24.5 2.6 3.3 5.1 6.8 8.6 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

VZ100/300/500

x 0.5 depth 4.5 (Bracket mounting screw) VZ VS Stations n L1 L2 20 341 328 17 293 280 18 309 296 19 325 312 16 277 264 13 229 216 14 245 232 15 261 248 12 213 200 9 165 152 10 181 168 11 197 184 8 149 136 5 101 88 6 117 104 7 133 120 4 85 72 2 53 40 3 69 56 VFN L3 16 32 48 64 80 96 112 128 144 160 176 192 208 224 240 256 272 288 304 L4 8 24 40 56 72 88 104 120 136 152 168 184 200 216 232

Rodless Cylinder for Vacuum Series CYV ø15, ø32

P (Port size) Operation P (Port size) Model CYV15 CYV32 Caution 5/16-24 UNF 7/16-20 UNF 1. The maximum operating pressure for the vacuum rodless cylinder is 0.3 MPa.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

P (Port size) Operation P (Port size) Model CYV15 CYV32 Caution 5/16-24 UNF 7/16-20 UNF 1. The maximum operating pressure for the vacuum rodless cylinder is 0.3 MPa.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

9 P3313128 P3313228 MHR3-10 MHR3-15 Description Cover Main parts MA D533 MHR3/MDHR3 Series Nominal Size 10 Without auto switch: MHR3-10R 3 x M3 x 0.5 thread depth 6 P.C.D.24 (Mounting thread) 120 120 25 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 44 29 9h9 0 0.036 33.5 1 5 4 16 (36.5) 12 2 2 3e8 0.014 0.028 Open: 11 Closed: 8 8 0 0.05 4 3 x M3 x 0.5 thread depth 6 (Thread

5 Port Solenoid Valve SY Series

For type W, DC voltage is only 5 16" One-touch fitting for N9 5 5 16" One-touch fitting for N9 One-touch fitting for One-touch fitting for One-touch fitting for available.

MLGP

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

MLGP

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

Sine Rodless Cylinder Series REBR Direct Mount Type

REBH25 Load weight W (kg) 25 REBH15 10 REBHT25 9 40 REBHT32 5 4 3 W 2 W 1 0.5 70 100 300 500600 Maximum speed U (mm/s) Moment M1, M3 M2 (Static moment/Dynamic moment ) Allowable moment 100 100 85 96 REBHT32 REBHT32 64 56 50 40 30 50 40 30 (Nm) REBHT25 REBH25 REBHT25 REBH25 Model REBH15 REBH25 REBHT25 REBHT32 M2 16 26 85 96 M3 10 28 56 64 M1 10 28 56 64 28 26 20 20 16 REBH15 REBH15

Intrinsically Safe Valve

" One-touch fitting (EA) 5 1 (P) 3 (EB) 5/16" One-touch fitting 53-SY7000 4-position dual 3 port valves (N.C.

Series SY100 3 Port Solenoid Valve Rubber Seal

VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ... Applicable blank plate assembly SY100-77-1A P R 20 stations VP 20 R port M5 X 0.8 P port M5 X 0.8 VG VP Note 1) SY113 (A) and SY123 (A) cannot be mounted on the same manifold.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

screw) 31 0.5 45 45 3 3 5.3 5.3 250.2 250.2 32 16 2 x M3 x 0.5 through 6.5 counterbore depth 5 (Same on the opposite side) 3.4 through 3 3 45 5.5 45 M2.5 x 0.45 x 6 L (Hexagon socket head cap screw) M3 x 0.5 x 12.5 L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2 x M3 x 0.5 through Steel ball Plug 2 x M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no.

MLGP

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

Refrigerated Thermo-chiller

Fluid Material 4 to 16 Air, Water Nylon 4 to 16 Air, Water Polyurethane 4 to 12 FEP (Fluoropolymer) Air, Water, Inert gas 4 to 12 Air, Water, Inert gas Modified PTFE (Soft fluoropolymer) Deionized water, Chemicals, etc.

MLGP

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

CATALOG VC10

50 50 40 150 125 75 45 50 30 25 1/32 3/64 1/16 1/16 3/32 1/16 3/32 1/32 3/64 1/16 3/32 3/32 1/8 1/8 .020 .048 .075 .075 .156 .075 .156 .022 .055 .075 .156 .156 .230 .230 ** MODEL E55 3 Way Directional Control E55GG8XCCM E55HH8XCCM E55JJ8XCCM E55KJ8XCCM E55KK8XCCM E55NJ8XCCM E55NK8XCCM 300 200 100 75 75 65 45 200 100 50 25 40 20 20 1/32* 3/64* 1/16* 3/32* 3/32* 1/8* 1/8* 1/32 3/64 1/16 1/16

TABLE OF CONTENTS

50 50 40 150 125 75 45 50 30 25 1/32 3/64 1/16 1/16 3/32 1/16 3/32 1/32 3/64 1/16 3/32 3/32 1/8 1/8 .020 .048 .075 .075 .156 .075 .156 .022 .055 .075 .156 .156 .230 .230 ** MODEL E55 3 Way Directional Control E55GG8XCCM E55HH8XCCM E55JJ8XCCM E55KJ8XCCM E55KK8XCCM E55NJ8XCCM E55NK8XCCM 300 200 100 75 75 65 45 200 100 50 25 40 20 20 1/32* 3/64* 1/16* 3/32* 3/32* 1/8* 1/8* 1/32 3/64 1/16 1/16