Option Body Option/End Boss Type Single acting MHZ Type of piping port MHCA2-6 M3 x 0.5 M3 x 0.5 With 4 one-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Double acting Single acting Basic type Side ported MHF Nil E K H M MHL Axial ported MHR Made to Order Refer to pages 683 to 713 for details.
CNS CLS CLQ MLGP RLQ MLU ML1C D-X 20Data 9-11-29
Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 12. Note 2) A model with PD port (M3) is available as an potion. Refer to page 12.
Air consumption (per unit) 0.058 m3/min (ANR) 0.085 m3/min (ANR) J (= Unit of conversion of A) Air consumption (for total operation) 6,525 m3/year 95,625 m3/year K = J x 60 x I Power consumption 2 0.19 kW 0.27 kW L (Theoretical value obtained from A and B) Power consumption cost per year 5,344 yen/year 75,938 yen/year M = C x I x L 1 Adsorption time is the time in a cycle when the ejector
/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 167 Series KK Flow Characteristics Air (0 to 1 MPa) Water (0 to 0.4 MPa) KK2 KK2 0.007 0.50 Series KK2 (KK2S-M5M + KK2P-M5M) Series KK2 (KK2S-M5M + KK2P-M5M) 0.45 0.006 0.40 0.005 0.35 Flow rate m3/min (ANR) Flow rate m3/min Flow rate m3/min 0.30 0.004 0.25 0.003 0.20
Station 9 SOL.B 22 SOL.A 10 Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 VV5Q21 Positive COM spec. Negative COM spec. The total number of stations is tabulated starting from station one on the D-side. Note) When using the negative common specifications, use valves for negative common. (Refer to page 56.)
Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.
It is calculated using the following formula: 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow rate characteristics are shown in Graph (2).
Note) Order is accepted in 10 units. 3 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 7 12 18 2-3.4 Mounting hole 5 150 (lead wire AWG#26) 22 6 20.5 19 3 2 1 9.5 6.5 5.5 4.5 12.3 10 10 25 M3 0.5 3 (EXH) port M3 0.5 1 (SUP) port M3 0.5 2 (OUT) port S070B-C-M3 Plug lead type 0.1 W with power saving circuit 150 (lead
3 x 3H9 long groove depth 2.5 +0.025 0 ( A , B , C ) 5g6 0.004 0.012 12h9 0 0.043 4 x M4 x 0.7 depth 8 34 0 0.062 42h9 Top ported: MSUA3-SE 36 10 A port B port 2 x M3 x 0.5 11 156 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.
x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 T 14.5 17.5 19 20.5 21.5 24 26 30 32 TC 10.5 14 17 20 22.5 28 33 42 48 Model CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 3.5 4.5 6 7 6.5 8.5 11 15 16 P (Piping port) Model Nil M3 x 0.5 M5 x 0.8 M5 x 0.8
Note 5) Refer to cautions on page 9 if IZN10E-11-(Female threads for piping) is used.
Body through-hole Applicable bolts Model MHK2 -12 MHKL2-12 MHK2L-16 MHKL2-16 MHK2L-20 MHKL2-20 MHK2L-25 MHKL2-25 0.59 M3 x 0.5 Max. screw-in depth l mm Applicable bolts Applicable bolts Model Model M4 x 0.7 1.4 MHK2 -12 MHK2 -12 MHKL2-12 MHK2L-16 MHKL2-16 MHK2L-20 MHKL2-20 MHK2L-25 MHKL2-25 M3 x 0.5 M3 x 0.5 4 0.59 MHK2L-16 MHKL2-12 4 5 0.88 0.74 M5 x 0.8 2.8 M3 x 0.5 0.88 M4 x 0.7 M4 x 0.7
107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 36 112 126 CD hole
at outlet Note 5) Max 1mg/m3 (ANR)(0.8ppm) -12- Doc. no.
Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.
Model Gripping force per finger Gripping force Note 1) Open/ Close stroke (Both sides) mm Bore size mm 10 16 20 25 Note 2) Weight g Model External Internal 60 125 250 455 4 6 10 14 17 40 66 104 9.8 30 42 65 11-MHZ2-10D 11-MHZ2-16D 11-MHZ2-20D 11-MHZ2-25D In-line electrical entry Lead wire type Explanatory drawing L Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at