77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X
Frunzei, Nr.29, Sector 2 Bucharest, Romania Slovakia SMC Priemyselna Automatizacia, s.r.o. (421) 2-444 56 725 Nmestie Matina Benku, 10, 81107 Bratislava Slovenia SMC Industrijska Avtomatika d.o.o. (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje Spain SMC Espaa, S.A. (34) 945-184-100 Zuazobidea 14, 01015 Vitoria Sweden SMC Pneumatics Sweden AB (46) 8-603-12-00 Ekhagsvgen 29-31, SE-14171
5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4) 123.3 L (Lead wire length) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} 39.4 0.9 18 2 1.2 (23.9) EB P EA 39.5 13 36 2 x
1/8 (Rc, NPT, NPTF) 1/8 (Rc, NPT, NPTF) Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width across flats 27 M18 x 1.5 M18 x 1.5 Width across flats 16 Width across flats 16 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 Model A 40 ZPT40HJ25-01-A18 D 118.5 40 ZPT40HJ50-01-A18 42 98 153.5 B 42 C 63 Model A 63 ZPT63HJ25-01-A18 F 121.5 63 ZPT63HJ50-01-A18 65 14.5 156.5
Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4
0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430
M6 6.5 M12x1.25 13 27 16 105 50 32 40 20 G1/4 15.5 M8 8 M16x1.5 16 31.5 16 106 63 32 45 20 G3/8 16.5 M8 8 M16x1.5 16 31.5 16 121 80 40 45 25 G3/8 19 M10 10 M20x1.5 21 38 16 128 100 40 55 30 G1/2 19 M10 10 M20x1.5 21 38 16 138 4 4 4 6.5 26 146 190 46 32.5 15 4 4 4 4 9 30 163 213 52 38 17 4 6 4 5 10.5 37 179 244 65 46.5 24 5 6 4 9 12 37 194 259 75 56.5 24 5 8 4 11.5 14 46 218 300 95 72 30
220 188 200 60 7 77 65 67 20 2C-141-A24 2C-143-A24 2C-144-A24 2C-145-A24 2C-146-A24 2C-41-K24 2C-43-K24 2C-44-K24 2C-45-K24 2C-46-K24 EXPORT COILS 126 135 255 275 435 500 100 110 115 220 240 380 440 85 42 44 78 90 145 172 32 2CE-114-A24 2CE-115-A24 2CE-116-A24 2CE-117-A24 2CE-119-A24 2CE-120-A24 2CE-140-A24 2CE-14-K24 2CE-15-K24 2CE-16-K24 2CE-17-K24 2CE-19-K24 2CE-20-K24 2CE-29-K24 DIODE
32.5 15 4 M12 x 1.25 40 24 35 16 G 1/4 14 M6 x 1 6.5 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128 8 4 11.5 14 46 218 300 95 72 30 5 M20 x 1.5 100 40
32.5 M12 x 1.25 40 6.5 16 105 24 13 35 16 27 G 1/4 14 M6 x 1 4 17 4 4 4 9 30 163 213 52 38 M16 x 1.5 50 8 16 106 32 16 40 20 31.5 G 1/4 15.5 M8 x 1.25 6 24 5 4 5 10.5 37 179 244 65 46.5 M16 x 1.5 63 8 16 121 32 45 16 20 31.5 G 3/8 16.5 M8 x 1.25 6 24 5 4 9 12 37 194 259 75 56.5 M20 x 1.5 80 10 16 128 40 45 21 38 25 G 3/8 19 M10 x 1.5 8 30 5 4 11.5 14 46 218 300 95 72 M20 x 1.5 100 10 16
MHZ 26 MHF 2-M6 x 1 thread depth 10 MHL (Mounting thread) 5H9 depth 5 +0.030 0 MHR 12 0.02 4-M6 x 1 thread depth13 (Mounting thread) MHK 12 0 0.1 Prepared hole dia. 5.1 through (Mounting hole) MHS MHC MHT 46 46 60 97 MHY 0.02 23 MHW MRHQ 34H9 depth 4 +0.062 0 0 0.5 +2.5 0 40 (49) 29 26 40 12 67 (76) Misc.
4 4 6 10 14 4 4 6 10 14 6.1 17 40 66 104 MHZJ2-6D MHZJ2-10D MHZJ2-16D MHZJ2-20D MHZJ2-25D MHZJ2-6S MHZJ2-10S MHZJ2-16S MHZJ2-20S MHZJ2-25S MHZJ2-6C MHZJ2-10C MHZJ2-16C MHZJ2-20C MHZJ2-25C Double acting MHY MHW Single acting type, Normally open Normally closed Normally open MRHQ Misc.
New Old Model Reduction (mm) Old New AC1000 AC10 4 Improved visibility for lubricant drip with graduation for lubricant control AC2000 AC20 14 AC2500 AC25 14 AC3000 AC30 14 Graduation AC4000 AC40 18 AC4000-06 AC40-06 18 AC5000 AC50 18 AC5500 AC55 18 5 4 6 7 3 SMC 8 2 Spacer with bracket AC6000 AC60 18 9 1 Embedded pressure gauge is a standard feature.
1 10 10 10.1 20.1 5.1 1.1 0.2 20.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 5.1 1.3 0.3 0.1 5.1 2.6 1.3 0.3 0.1 80 80 1.3 2.6 0.7 0.2 0.1 2.6 1.3 0.7 0.2 0.1 For transfer load of 3kg Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 10 20.1 10.1 5.1 1.1 0.2 Speed (mm/s) 40 5.1 2.6 1.3 0.3 0.1 80 2.6 1.3 0.7 0.2 0.1 Refer to page 303 for acceleration time. 221 14
Frunzei, Nr.29, Sector 2 Bucharest, Romania Slovakia SMC Priemyselna Automatizacia, s.r.o. (421) 2-444 56 725 Nmestie Matina Benku, 10, 81107 Bratislava Slovenia SMC Industrijska Avtomatika d.o.o. (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje Spain SMC Espaa, S.A. (34) 945-184-100 Zuazobidea 14, 01015 Vitoria Sweden SMC Pneumatics Sweden AB (46) 8-603-12-00 Ekhagsvgen 29-31, SE-14171
Frunzei, Nr.29, Sector 2 Bucharest, Romania Slovakia SMC Priemyselna Automatizacia, s.r.o. (421) 2-444 56 725 Nmestie Matina Benku, 10, 81107 Bratislava Slovenia SMC Industrijska Avtomatika d.o.o. (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje Spain SMC Espaa, S.A. (34) 945-184-100 Zuazobidea 14, 01015 Vitoria Sweden SMC Pneumatics Sweden AB (46) 8-603-12-00 Ekhagsvgen 29-31, SE-14171
Frunzei, Nr.29, Sector 2 Bucharest, Romania Slovakia SMC Priemyselna Automatizacia, s.r.o. (421) 2-444 56 725 Nmestie Matina Benku, 10, 81107 Bratislava Slovenia SMC Industrijska Avtomatika d.o.o. (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje Spain SMC Espaa, S.A. (34) 945-184-100 Zuazobidea 14, 01015 Vitoria Sweden SMC Pneumatics Sweden AB (46) 8-603-12-00 Ekhagsvgen 29-31, SE-14171
82 Rc 1/8 125mm or more 88 350 to 500 175 80 37 13 46 57 31 12 21 14 100 Rc 1/8 150mm or more 90 350 to 600 201 82 37 52 16 38 65 12 21 14 114 Rc 1/8 200mm or more 101 350 to 800 238 92 44 62 20 47 84 12 25 15 138 Rc 1/4 250mm or more 116 350 to 1000 285 104 55 25 75 94 58 14 26 16 164 19 Guide Cylinder Series MGG Front mounting flange type/MGGF 63 to 100 Bracket (See table below.)
6 900 11-LEFS40l-850l 1206 1255 856 1028 14 6 900 11-LEFS40l-900l 1256 1305 906 1078 14 6 900 11-LEFS40l-950l 1306 1355 956 1128 16 7 1050 11-LEFS40l-1000l 1356 1405 1006 1178 16 7 1050 LC3F2 521 AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS25, 32, 40 Refer to page 46 for model selection and page 510 for particle generation characteristics
Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1428 VK3000 Series Specific Product Precautions Be sure to read this before handling the products.