Low Friction Cylinders Series MQ

I NA D J A F N2 N1 MM S + Stroke F H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc 1/8 13 NPT 1/8 25 G 1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc 1/8 13

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP16 Z 3 With metal stopper 2-M5 x 0.8 depth 8 V K 6.5 5 M G Max. 4 Max. 4 11 25 2-M4 x 0.7 depth 6 Stroke: S MXP16-20 Width across flats 3 Width across flats 8 Piping port A 17 2-M5 x 0.8 (Plug: M-5P) 11 H 26.7 M6 x 1 10.5 5.5 35 34 8.5 A 30 4-M6 x 1 4-M5 x 0.8 depth 7 Prepared hole dia. 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting reference planes

Wedge Cam Operation Provides

M5 X 0.8 (Finger opening port) 22.5 2.3 2.4-13 Series MHK2 Dimensions MHK2-20l /Standard model 18.6 20 2-M5 X 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 26 +1.2 0 5 16 0.02 13 . 5 42 30 60 58 32 0 -0.2 29 Closed

SFOD-OMT0010

(a) Direct Mounting with four M5 screws Mounting screw (M5) 4pcs. (prepared by customer) (b) DIN rail mounting The figure on the right shows how to mount the DIN rail mounting brackets. Secure the DIN rail mounting bracket using the mounting screws (M5 x 8) 2 places on one side (4 places on both Mounting screw M5X8 sides).

Serial Transmission System Series EX250 Series EX500

Ports 2, 4 size (metric) Ports 2, 4 Symbol C3 C4 C6 M5 CM Ports 1, 3, 5 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting M5 threads Mixed size/with port plug Top ported elbow 3.2 One-touch fitting Top ported elbow 4 One-touch fitting Top ported elbow 6 One-touch fitting M5 threads Bottom ported elbow 3.2 One-touch fitting Bottom ported elbow 4 One-touch fitting Bottom ported

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

VFS

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

MQQ

x 0.8 13 to 17 9 45 + Stroke 7.5 50 + Stroke M4 x 0.7 M3 x 0.5 8 to 11 7 65 + Stroke Lateral load resisting type MQQL (built-in ball bushing) 70 + Stroke 5.5 80 + Stroke 8 M6 x 1 M5 x 0.8 13 to 17 85 + Stroke 6.5 105 + Stroke 7 : Stroke 4 Series MQQ Dimensions Standard type (through hole and double end tapped)/MQQTB 10, 16, 20 H effective thread depth C 2-M5 x 0.8 2 x 4-OA effective depth

Air Slide Table Series MXP

Stroke: S MXQ 2 x M4 x 0.7, depth 6 2 x M5 x 0.8, depth 8 MXP16-20 MXF A Width across flats 8 Width across flats 3 H Piping port 4 x M5 x 0.8, depth 7 17 11 26.7 (Plug: M-5P) 2 x M5 x 0.8 M6 x 1 10.5 MXW 5 MXJ 5.5 MXP 35 34 MXY 8.5 MTS 4 x M6 x 1 4H9 0 +0.030 , depth 4 4H9 0 +0.030 , depth 4 A Pilot hole diameter 5.1 19 6.5 320.05 0.50.05 30 D B 2 x M5 x 0.8 Piping port W 47 46 13 4H9 0 +

Rotary Table

Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 -36- Kinetic energy Table 13 shows the allowable kinetic energy of the rotary table. The end angle speed is obtained by: Table 13.

MQQ

x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc

MQQ

ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page 10-5-24. 10-5-

Vacuum Module Series ZX

Rc 1/8 Port exhaust Silencer exhaust 11.5 27 20 PD 8 13 (33.2) Bracket B ZX1-OBB V 2 x 3.6 (Mounting hole) P (Standard accessory) Release pressure SUP port (PD) M5 (or M6) Plug Note) Air pressure SUP port (P) M5 (or M6) (55.4) 17 17.5 50 PD V P 18 8 6 10 2 x 3 (Mounting hole) Vacuum port (V) M5 (or M6) 1 3 5.4 Note 1) Remove the plug at external release.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Width across flats 3 Width across flats 8 A 17 2-M5 x 0.8 (Plug: M-5P) 11 H 26.7 M6 x 1 10.5 5.5 35 34 8.5 A 30 4-M6 x 1 4-M5 x 0.8, depth 7 Bottom hole diameter 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting base side B D 16.5 14.5 Across AA MXP16-30 Without magnet and switch rail 2-M3 x 0.5, depth 3.5 For rail mounting 8 2-M2 x 0.4, depth 3 For magnet mounting

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

x 0.8 (Finger closing port) Adjustment needle for finger speed Auto switch mounting groove (2 positions) 13.6 13 13 8 0 0.05 4 4 7 Note) For single acting, one port is used as a breather port. 7 18 M5 x 0.8 (Finger opening port) 2.3 MHZ MHKL2-16: Long stroke type MHF MHL 14 24 MHR 2 x M4 x 0.7 thread depth 5 (Mounting thread) 22 MHK 3H9 depth 3 + 0.025 0 17H9 depth 1.5 + 0.043 0 2 x M4

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

With seal Note) In case that connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard. Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.

HRX-OM-W032

Table 3-3 Power supply cable and earth leakage breaker (Recommended) Earth leakage breaker *1 Terminal Cable Model Power supply block Recommended Sensitivity specifications Rated voltage screw crimp terminal of leakage *2 current diameter current (A) (mA) 380-415 VAC 4 x 5.5 mm2 50/60Hz 3 phase, (4 x AWG10) HRS200-A-46-S M5 R5.5-5 30 30 *Including 460-480 VAC 60Hz ground 3 phase *1.

VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class