Table of Contents -12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42
CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly
4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Note) 5 stroke (CU16-5D): 14.5 mm Bore size (mm) R T DS 33 36 30 36 40 42 Z 46 52 46 55 63 69 S 33 36 40 46 50 52 Z 46 52 56 65 73 79 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 -X Individual -X Technical data 487 Series CU Proper Auto Switch Mounting Position
12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.
(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S T CD LH LT LX LW X1 Y1 SS Z e f Q 32 M10 x 1.25 58 62 38 16 32 15 11 37 31 3/8 39 141 11 11 40 8 40 30 32 13 203 205 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 12 32 15 11 36 30 3/8 42 141 11 11 43 8 46 33 32 13 203 205 52 12 15 25 to 1400 50 M10 x 1.25 76 85 52 15 40 19 11 43 35 1/2 46 155
LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12
6.5 36 48 25 K 12 12 6.5 41.5 0.5 6.5 46 Z ZZ (NN-1) x H G H 26 10.5 26 A B 10.5 5.1 5.1 9.5 11 9.5 11 29 1.5 6 B A NN-M6 x 1 thread depth 12 HA GA 5H9 depth 5 +0.030 0 Section AA Section BB 5H9 depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50
12 stations Note) SS5Y3 has 4 to 12 stations.
8 10 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 12 46 28 12 16.7 16 M12 x 1.25 7 5 12 10 10.5 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 12 46 28 12 16.7 16 M12 x 1.25 7 5 16 12 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 17 50 38 16 19.7 22 8 6 M16 x 1.5 16 16 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 17 50 38 16 19.7 22 8 6 M16 x 1.5 22 20 17 M8 x 1.25 8 G 1
N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.
10 (12) M5 x 0.8 18 15.5 40 13 14 8 12 2 5.5 6 28 35 5 26 M4 x 0.7 5 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 44 17 16.5 10 14 2 5.5 7 32 40 6 31 M5 x 0.8 5.5 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 53 17 20 12 18 2 6.6 7 38 40 6 38 M5 x 0.8 5.5 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 61 19 26 16 25 2 6.6 8 46
8 10 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 46 12 28 12 16 M12 x 1.25 16.7 7 5 12 10 10.5 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 46 12 28 12 16 M12 x 1.25 16.7 7 5 16 12 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 50 17 38 16 22 19.7 8 6 M16 x 1.5 16 16 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 50 17 38 16 22 19.7 8 6 M16 x 1.5 22 20 17 8 M8 x 1.25 G 1
: 45 oC 12 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity
6 6 6 8 10 10 77 77 79 87 102 102 24.2 114 12 12 12 12 13 13 13 13 13 16 20 20 0.25 stroke (13) (22.5) 10(12) 26.7 119 (13) (25) 10(12) 30.2 121 (13) (25) 10(12) 34.6 139 13 40.6 162 13 47.1 162 The minimum stroke with rod boot is 20 mm.
46 74 (90.4) 63 CD-G06 11 286.5 228 64 45 85 72 110 80 IY-G08 Z + Stroke ZZ + Stroke 12 312.5 236 72 60 100 93 130 100 IY-G10 Note) For pivot bracket, refer to page 6-5-12.
8h9 8h9 10h9 12h9 14h9 B 54 62 74 92 112 CA 9.5 10.5 11.5 13 14 AD 24 26 31 37 46 CB 19 19 26.5 28 31 AA 63 66 80 91 108 AC 3 3 3 4 5 K 9 9 10 11 12 Model MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D 0 0.036 0 0.036 0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 VA 4H9 4H9 5H9 6H9 6H9 Q 11 12 14 17 20 YB 8 8 10 12 12 SC 7 7 8 8 8 WB 2 2 2 2.5 3 SB 8 8 9.5 11 11
M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.
12 KQ2U12-99A 18.5 63 27.8 18.5 46 17 11.4 8 4.2 18.5 57.4 45.4 9 18.3 16 16 KQ2U16-99A 23.8 75.9 35 23.8 55.3 20.6 14 8 4.2 23.8 113 60 13 33.5 tubing O.D.