15

30 3.5 35.5 57.8 46.5 M2.5 x 10 M4 x 35 8 NY M3 x 0.5 8 45 30 3.5 35.5 57.8 46.5 M2.5 x 10 M4 x 35 8 NM2 3.4 31 22* 2.5* 33.1 6.5 22.6 57.8 46.5 M2.5 x 10 M4 x 18 6 Motorless Motorless LAT NZ M5 x 0.8 9 70 50 5 46 69.8 61.4 M3 x 12 M5 x 40 14 NY M4 x 0.7 8 70 50 5 46 69.8 61.4 M4 x 12 M5 x 40 11 NX M5 x 0.8 9 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 47.5

ISO Cylinder

x 0.8 8 12 7 5 28 13.4 M4 x 0.7 19 6 15 12 10 46 7 6 16 64 76 86 10 12 M12 x 1.25 4 4 M5 x 0.8 8 12 7 (5.5) 5 (5.5) 28 14.2 M4 x 0.7 19 6 15 12 10 46 (53) 7 6 10.5 16 64 (71) 76 (83) 86 (93) 12 16 M16 x 1.5 6 6 M5 x 0.8 12 17 8 (5.5) 6 (5.5) 38 14.2 5 M6 x 1 24 8 18.3 16 14 50 (54) 10 9 9.5 22 75 (79) 91 (95) 105 (109) 16 16 M16 x 1.5 6 6 M5 x 0.8 12 17 8 (5.5) 6 (5.5) 38 14.2 5 M6 x

Table of Contents

VB 4 4 5 6 6 SA 4.2 4.2 5.1 6.6 6.6 UB 10 10 12 16 16 O 4.5 4.5 5 5.5 6 R 44 52 63 78 98 TB 8 8 10 10 12 WA YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Model MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0

MXQ

x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.

Thermo-chiller/Rack Mount Type

2 [ ] lamp Lights up when AL.01 Low level in tank abnormal or AL.02 Low level in tank alarm is generated !3 Digital display (11-segment, 1 digit) X is displayed when maintenance notification is generated. !4 [RMT] lamp Lights up during remote operation by communication function !5 [KEYLOCK] lamp Lights up when key lock setting is active !

MGP

, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 15 10 19 53 37 10.5 M5 x 0.8 M5 x 0.8 Rc 1/8 12.5 10.5 25 53.5 37.5 11.5 M6 x 1.0 M6 x 1.0 Rc 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30st or less Over 30st to 100st Over 300st 30st or less Over 30st to 100st 23 24 28 34 Over 100st to 200st 200

C85

x 0.8 M12 x 1.25 86 7 9.5 11.5 15 19 46 28 10 12 16 16.7 7 5 12 4.2 6 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 86 7 9.5 4 11.5 15 19 46 28 10.5 12 16 16.7 7 5 12 4.2 6 12 12 M6 x 1 M5 x 0.8 M16 x 1.5 105 10 10.5 6 12.5 18.3 24 5 50 38 14 17 22 19.7 8 6 16 6.2 8 16 16 M6 x 1 M5 x 0.8 M16 x 1.5 111 10 10.5 6 12.5 18.3 24 5 56 38 14 17 22 19.7 8 6 16 6.2 8 16 20 M8 x 1.25 G 1/8 M22 x 1.5 126 13

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121 146 171 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 ZZ 132 132 132 142 160 193 250 278 306 13-/22-MXQ20L10 13-/22

PFxx-OMJ0005CN

--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B

VXZ

Normally open VXZ 2232 02 1 G N.O.

MGP

X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5 25 53.5 37.5 11.5 M6 X 1.0 M6

MY1

Refer to page 46.

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 2 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 32 (4 Port/Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 32 (4 Port/Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 2 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -