Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Body Ported Common SUP Common EXH, Stations: 5 Stations, A B Port Size: -, P R Port Thread: -

Piping: Body Ported/Common SUP Common EXH, Stations: 5 Stations, A, B Port: -, P R Port Thread: -

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Description Material AXT632-3 (M3 x 32) VFR3000-26-4 VFR31 VFR3000-26-4 VFR32 AXT632-3 (M3 x 32) VFR3000-26-4 VFR33/34/35 11 NBR Hexagon socket head screw Gasket 12 13 AXT632-3 (M3 x 32) Refer to How to Order Pilot Valve Assembly on page 1252. Refer to How to Order Sub-plate Assembly on page 1253.

Valve Single Unit

-C6 One-touch fitting (Inch size) Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)

VFS

1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

Hydraulic

Cylinder bore size (mm) Standard strokes (mm) Long stroke (mm) Auto switch model Model Bore size (mm) D-A3, D-A4 D-G3, D-K3 D-B5, D-B6 D-G5, D-K5 D-A5, D-A6 D-F5, D-J5 1800 (1401 or more with tie-rod reinforcing ring) Note 1) 32 25 to 800 32 40 50 63 80 100 32 40 50 63 80 100 32 40 50 63 80 100 1800 (1401 or more with tie-rod reinforcing ring) Note 1) BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 BAF

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

CRJ

Allowable Kinetic Energy and Rotation Time Adjustment Range Rotation time adjustment range for stable operation (s/90) Allowable kinetic energy (mJ) Size/Type CRJB05 0.25 Basic type 05 CRJU05 1.0 With external stopper 0.1 to 0.5 CRJB 1 0.40 Basic type 1 CRJU 1 2.0 With external stopper Weights Weight (g) Note) Type/Size Model CRJB05-90 32 CRJB05-100 05 CRJB05-180 39 CRJB05-190 Basic type

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

8 12.7 12.7 7 9.6 17.5 9.3 10.8 28.7 28.6 25.8 25 22.2 17.5 28.7 AS131F-M5-04 AS131F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 20.3 9.3 20.3 28.6 25.8 25 22.2 7 4 9.6 9.3 10.8 9.3 AS131F-U10/32-04 AS131F-U10/32-03 5/32" 10-32UNF 10-32UNF AS131F-M5-06 AS131F-M5-05 3/16" M5 x 0.8 M5 x 0.8 13.5 11.4 21.3 23.3 34.5 16.5 20.6 21.4 31.8 11.6 6 AS131F-U10/32-06 AS131F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 9.6

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 AS131FG-M5-04 AS131FG-U10/32-03 28.6 M5 0.8 25.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32 UNF 22.2 25 9.6 9.3 10.8 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4 1

VFR

Material Description AXT632-3(M3 x 32) VFR3000-26-4 VFR31 VFR3000-26-4 VFR32 AXT632-3(M3 x 32) VFR3000-26-4 VFR33/34/35 NBR Hexagon socket head screw Gasket !1 AXT632-3(M3 x 32) Refer to How to Order Pilot Valve Assembly on page 3-5-30. Refer to How to Order Sub-plate Assembly on page 3-5-31. Steel !2 !

HRX-OM-W002

Cooling capacity[W] Cooling capacity[W] 2000 2000 2500 Cooling capacity[W] Cooling capacity[W] Cooling capacity[W] 2500 Cooling capacity[W] [W] 25 25 25 25 [W] 25 25 1500 1500 1500 1500 25 25 2000 25 1500 1500 2000 1500 1500 32 32 32 32 32 32 32 32 32 1500 40 40 40 40 1000 1500 1000 1000 40 1000 40 40 1000 1000 40 1000 1000 40 1000 1000 500 500 500 500 500 500 500 500 500 500 0 0 0 0 0 0

JXCx-OMT0062

This indicates 0 to 2,147,483,647 data as a 32 digit binary number or -2,147,483,647 to -1 data as a complement to 2.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Type 40 Applicable solenoid valve 10-SYJ514M-(-Q) 10-SYJ524M-(-Q) How to Order 10 SS3YJ5 40 05 M5 Clean series Applicable blanking plate assembly Refer to page 621.

HRX-OM-X084

D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 scree Contact output signal 2 alarm AL.01 AL.01AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01 MT.01MT.05 D.OUT2 MANT

HRX-OM-X071

D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01 MT.01 to MT.05

Vacuum Module Series ZX

How to Order W 1 05 ZX1 PV, V port size Nozzle diameter Nil 05 07 10 0.5 mm 0.7 mm 1.0 mm M5 x 0.8 M6 x 1 (Option) Y Ejector exhaust method 1 2 Silencer Individual exhaust Rc 1 8 Dimensions: ZX1-W 1 2 48.2 JIS Symbol Port exhaust 47 EXH port (EXH.)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CJP Calculation: (Example) CG1KWLN32-100 (Foot style, 32, 100 st) Basic weight0.49 (Foot, 32) Cylinder stroke100 st Additional weight0.13/50 st 0.49 + 0.13 x 100/50 = 0.75 kg Bore size (mm) Auto switch model 20 25 32 40 50 63 CJ2 D-C7/C8 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -063 D-H7 D-B5/B6 CM2 BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 D-G5/K5 Mounting screws set made of stainless

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

Allowable Kinetic Energy and Rotation Time Adjustment Range Rotation time adjustment range for stable operation (s/90) Allowable kinetic energy (mJ) Size/Type CRJB05 0.25 Basic type 05 CRJU05 1.0 With external stopper 0.1 to 0.5 CRJB 1 0.40 Basic type 1 CRJU 1 2.0 With external stopper Weights Weight (g) Note) Type/Size Model CRJB05-90 32 CRJB05-100 05 CRJB05-180 39 CRJB05-190 Basic type

CG1

40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 D-C7 D-C7 55 55 80 80 105 24.5 (27) 45.5 45.5 70.5 70.5 95.5 24.5 (27) 20.5 30 CA1 D-C8 D-C8 55 55 80 80 105 130 130 27 (29.5) 45.5 45.5 70.5 70.5 95.5 27 (29.5) 20.5 30 120.5 120.5 D-C73C D-C73C 56 56 81 81 106 131 131 30.5 (33) 46.5 46.5 71.5 71.5 96.5