Electric Actuator/Slider Type

Note 14) For the manufacture of intermediate strokes, please contact SMC.

Fieldbus system EtherNet/IP TM compatible SI Unit

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 4 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc.

Refrigerated Air Dryer

x 0.93 x 1 x 0.88) = 0.51 m3/min 3 Selecting a model According to the corrected air flow capacity of 0.43 m3/min, IDF4E will be selected which air flow capacity is 0.52 m3/min at 50 Hz.

Magnetically Coupled Rodless Cylinder

6.5 16.5 6.5 4 45 14 62 29 14.5 M3 7 4.5 M4 x 0.7 34 26 3 6 20.5 8 4 51 17 70 29 14.5 M4 8 5.5 M5 x 0.8 39 31 3 7 21 9.5 4.5 62.5 22 76 34 17 M5 10 6.5 M6 x 1 50 41 3 7.5 25.5 9.5 7.5 74.5 28 90 39 19.5 M5 10 6.5 M6 x 1 60 45 3 7.5 Note 1) FE, FF and HB provide a clearance of 1mm between the body and the floating joint, but do not consider dead weight deflection of the cylinder

HRX-OM-Q026

The displayed circulating fluid temperature is the fluid temperature discharged from the thermo-chiller (31 oC).

Compact Type

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

Compact Type Dual-Rod Cylinder Series CXSJ

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through

CXS

x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 MX 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 MTS 20.5 5.5 MY Stroke 42 + Stroke CY 5.5 4.5 13.4 32 + Stroke MG 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3l (Hexagon socket head set screw) M8 x 1.25 x 7.5l (Bolt holder) CX 0.5 D-X 25 0.2 25 0.2 5.3 5.3 16 32 31 20Data 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same

CXS

head set screw) M8 x 1.25 x 7.5l (Bolt holder) CX 0.5 D-X 25 0.2 25 0.2 5.3 5.3 16 32 31 20Data 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6l (Hexagon socket head cap screw) M3 x 0.5 x 12.5l (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 8-28-23 23 Series CXSJ Dimensions

LEC-OM07605CN

B1 B1 VAR U B DC24V VAR U B DC24V B2 B2 B1B2(VAR) (2) (3) (a) R[]:() L[H]:() Vb[V]: DC24V U Vs[V] N () 14.1.2 14 2 14.

New

Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Fluid density [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow-rate characteristics are shown in Graph (2).

MXF

For details, refer to page 8-30-31. 8-6-14

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

LEC-OM02904

LE--LE-CSM-AWG14 14 .

IZx-OMR0035

Accessories Emitter cartridge Power supply cable Filter Fan type Nil None Model U with Filter Symbol Max. air flow Automatic cleaning unit, Louver 21 1.8 m3/min Nil None 31 4.4 m3/min S with Automatic cleaning unit Input/Output specifications W with Louver Nil NPN Input/output Y with Automatic cleaning unit and Louver P PNP Input/output Bracket Nil None Power supply cable, AC adapter Nil

Applicable Auto Switch Model

Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

, B , C ) 27 2.5 2 3-R1.5 2-4.5 through 12.5 37 8 6.5 10.3 6.5 31 4.2 2 31.5 2 36h9 0 0.062 27 16 9 5 4.5 Angle adjustment bolt 2-4.5 through 3-R1.5 2-M3 x 0.5 1 5 Adjustment: Max. 7.5 0.5 B port A port +0.025 0 3-3H9 long groove depth 2.5 4g6 0.004 0.012 ( A , B , C ) 9h9 0 0.036 29 4-M4 x 0.7 depth 8 2-M3 x 0.5 depth 4 0 0.062 36h9 Top ported: MSUA1-SE A port B port 9.5 2-M3 x 0.5 8.5 11

240

4.8 5 19 5 17 15 38 39 18 5.5 19 5 18 5.5 16 9 5.5 10 10.5 8.5 4 NS 31 + Stroke 39.5 + Stroke 10 5 + Stroke 4 x M3 x 0.5 Depth 4.8 10 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

VQ4000

B A 24.6 A B 38 48 14 12 5 3 1 B A 30 45 14 3 5 1 12 2-5.6 Mounting hole Manual override 2-5.6 Mounting hole 45 30 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1 R2 P R2 R1 14.5 P 19.5 19.5 (21) (21) Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 5-Rc 1/4, 3/8 1(P),

C76

LX N1 N2 NB NDh8 S SW WH XB ZZ 116 Bore 26 0 0.033 32 40 20 24 42.3 52.3 12 14 37.5 46.5 G1 /8 G1 /4 22 27 36 40 10 12 47 58.5 21 26 30 38 29 38 17 22 34.5 42.5 80 105 17 19 16 16 28 31 M10 x 1.5 9, 14 depth of counter bore 10 32 0 0.039 M12 x 1.75 11, 17.5 depth of counter bore 12.5 145 Rubber cushion: C76RBY Without magnet, Built-in magnet Bore Stroke B S + Stroke ZZ + Stroke (mm) AM 20