Table of Contents

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

MY1

max. m1 max. m3 max. 2.

EXxx-OMS0026CN

No.EX-OMS0026CN TMSI EtherNet/IP // EX600-SEN3/4 EX600-ED# 2 8 9 10 12 12 14 SI 15 15 16 16 17 LED 21 25 25 26 27 27 28 28 29 29 29 31 32 42 42 58 62 63 64 EDS 64 TM 64 Logix Designer Device Level Ring (DLR) 69 TM 69 QuickConnect TM 71 EtherNet/IP Web 77 86 -1No.EX-OMS0026CN 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating

Table of Contents

Description Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 3-5-10. Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

1

M3 x 0.5 M3 7.5 15 34 3.3 10.5 10 6.5 23 3.4 5.5 3.5 9.5 5 7 26 M3 x 0.5 M3 7.5 15 38 3.3 13 12 6.5 30 3.4 7 3.5 11.5 5 7 33 -X M4 x 0.7 M4 8.5 17 53 4.4 14.5 14 8 35.5 4.5 7.5 4.5 18 4.5 6.5 38.5 M4 x 0.7 M3 14.5 29 62 6.5 3 26 14 34 4 4.5 16.5 6 45 7 20M5 x 0.8 M4 14.5 29 70 8 3 31 17 39 4 5.5 20.5 7 51 8 M6 x 1 M5 17 34 76 9.5 3 41 22 50 4.5 6.5 21 7.5 62.5 10

CRB2/CRBU2/CRB1

Q1 M3 5.5 to 8 Y-1 10 15 X-3 7.5 to 14 M3 Y = M3, M4 7.5 to 9 Y-1.5 L2 = L1(3 x P) C2 = C 15 20 X-4 M3, M4 10 to 18 9 to 10 Y-1.5 M3, M4, M5 X = 20 30 12 to 20 X-4.5 M3, M4, M5 11 to 13 Y-2 M3, M4, M5, M6 L1 = Q2 = M 30 40 14 to 22 X-5 14 to 15 Y-4.5 M3, M4, M5, M6 M3, M4, M5, M6, M8 24 Simple Specials Series CRB2 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A10 Symbol

Table of Contents

Dimensions . 8 8 12 16 22 24 25 26 28 30 31 31 31 32 32 33 35 35 36 37 38 45 45 46 48 48 49 50 51 52 52 53 55 55 56 57 58 61 61 62 64 64 65 66 67 70 70 71 73 73 74 75 76 81 81 82 84 84 85 86 87 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series VDW200/300 Compact

MXS

Model Mounted to body B C D E H F M P* I A J Q* MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 7 2.5 6 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 8 3 7 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 12 4 31 10 9.5 M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5

0.5

/min 0.46 m3/min 0.80 m3/min (Max.) 0.66 m3/min 0.46 m3/min 0.80 m3/min (Max.)

CQS

X 25 l M3 X 30 l M3 X 35 l M3 X 40 l M3 X 45 l M3 X 50 l M3 50 55 60 65 70 25 30 35 40 45 50 6.5 6.5 Secure the cylinder by using Secure the cylinder by using the OA screws that are the OA screws that are provided with the cylinder provided with the cylinder tube. tube.

REA/REB

x 0.5 13 7 M3 38 15 7.5 12 33 30 3.5 Order Made Auto Switches 15 6.5 4.5 4.4 8 18 4.5 M4 x 0.7 7.5 14.5 17 8.5 M4 14 53 38.5 35.5 4.5 20 6 6.5 16.5 4 M4 x 0.7 14.5 M3 3 29 26 45 14 62 7 4.5 34 25 7 8 20.5 M5 x 0.8 4 M4 14.5 3 17 70 29 5.5 39 31 51 8 32 7.5 9.5 21 M6 x 1 4.5 M5 76 34 17 50 41 3 62.5 22 10 6.5 40 7.5 9.5 25.5 M6 x 1 7.5 39 19.5 M5 45 3 90 60 74.5 28 10

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

CQS

Example) Bolt M3 x 25l 4 pcs. (Standard stroke) Bolt M3 x 75l 4 pcs.

MXS Series Air Slide Table

Applicable model P(Hexagon socket head screw) Q(Hexagon socket head screw) Mounted to body J M I F B C D E H A MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 6 2.5 7 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 7 3 8 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 10 4 12 31 9.5

Made to Order

x 0.5 9.5 3.4 6.5 3.3 5 7 5.5 10.5 26 23 34 15 7.5 M3 3.5 10 M3 x 0.5 11.5 3.4 6.5 3.3 5 7 7 13 33 30 38 15 7.5 M3 3.5 12 M4 x 0.7 18 4.5 8 4.4 4.5 6.5 7.5 14.5 38.5 35.5 53 17 8.5 M4 4.5 14 M4 x 0.7 16.5 6 4 45 14 62 29 14.5 M3 4.5 26 6.5 7 34 3 M5 x 0.8 20.5 7 4 51 17 70 29 14.5 M4 5.5 31 8 8 39 3 M6 x 1 21 7.5 4.5 62.5 22 76 34 17 M5 6.5 41 9.5 10 50 3 M6 x 1 25.5 7.5 7.5 74.5 28 90 39

ISO Cylinder

Description Size Quantity BBA2 1 Auto switch mounting screw M3 x 0.5 x 6 L 1 BMU1-025 M3 x 0.5 x 8 L 1 BQ-1 M3 x 0.5 x 10 L 1 BQ-2 2 Auto switch mounting nut (Hexagon nut) M3 x 0.5 1 BQ-1 3 Auto switch mounting nut (Convex shape) M3 x 0.5 1 BQ-2 D-A7, A8 D-F7, J7 * A spacer for BQ-2 (black resin) is not included. * When using D-A9l(V)/M9l(V)/M9lW(V)/M9lA(V) auto switches with BQ2-012, use

Smooth Cylinder/Low Speed Cylinder

CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 30L x 35L x 40L x 45L Mounting bolt part no. CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L Mounting method: Mounting bolt for through-hole mounting style of CQSYB is available as an option.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

DMade to Order Specifications (For details, refer to page 8-31-1.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(Example) For M3: L1 = 6 mm Applicable shaft type: W CRB2 CRBU2 Q1 = M L1 + (3 x P) (mm) CRB1 Y Q2 Size (mm) Y = L1 = 15 X Q1 M3 Size 1.5 to 9 MSU 15 20 M3, M4 1.5 to 18 M3 1.5 to 10 L2 + (3 x P) L2 = 20 30 M3, M4, M5 1.5 to 20 M3, M4 X = 2 to 13 CRJ 30 40 Q2 = M M3, M4, M5 2 to 22 M3, M4, M5 4.5 to 15 CRA1 Symbol: A3 The long shaft can be further shortened by machining male threads into