V

U40 40 43 7 18 13.7 18.5 6.5 ZP16B B16 16 18 4 13 15.7 20 9.9 21 8.5 ZP50U U50 50 53 7 18 14.7 19.5 7.5 ZP20B B20 20 22 4 15 19 23.5 121.4 25 10.5 ZP25B B25 25 27 4 15 19.5 24 15.6 28 10.5 ZP32B B32 32 34 4 15 24.5 29 18.9 37 14 ZP40B B40 40 43 7 18 29.2 34 24.4 48 16 D I M E N S I O N S ZP VA C U U M PA D S ZP50B B50 50 53 7 18 33.2 38 32.4 57 19 H O W T O O R D E R ZP V A C U U M P A D

MU

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.

Electric Actuator with Integrated Guide

BIT 2 5 Program designation BIT 3 Pro-no. bit2 5 18 STP-NO BIT 1 Pro-no. bit3 18 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 20 Stp-no. bit3 7 The terminal that designates the step to be executed.

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

VP300/500/700

3 8 1 2 VV3P3 VV3P5 VV3P7 Base type 42 41 Individual exhaust Common exhaust VV3P3-41-051-02 Symbol Supply port is common.

Piping: 41 (Base Mounted), Stations: 17 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 2 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 3 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 4 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 5 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 7 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 8 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 9 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 10 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 11 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 12 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 13 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 14 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41 (Base Mounted), Stations: 15 Stations, A, B Port: 01T (NPTF1/8)