Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

Shock Absorbers and Rate Controls

Porl llurnber Illodel (Rell t( IH 5A 5t lolt Sire vvr. (02,1 S;l Va-l2 4f2940056 (tRl0EM74 34 .50 2.25 1.63 5.0 sJ2th-12 M4E30r0056 {tR)otMl r ,41 .or 3.50 2.15 3h 20.0 5t[42x1.5 42940056 (rR)0E l.5 .34 .50 2.25 l-63 146 5.0 5tllt6dx2 M43010056 (tRl0tM2.0li{ .41 . n l 3.50 2.7 5 Yg 20.0 Sfll85x2 M{33300560 3.0fi .53 4.00 w 24.0 Sfiltl | 5x2 M437?

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, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00-P Typ 20 NVV5Z3-2O-@1-OOr Stations a otl?

VXZ

33 41 44 52 60 68 73 1 2 3 4 1 17-3-66 7 Series VXZ22/23 Pilot Operated 2 Port Solenoid Valve For Zero Pressure Differential Operation The VX series will be revised shortly.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C8 C4 C6 C8 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 148 198 248 135.5 125 105 15 160.5 150 137 185.5 175 153 16 210.5 200 185 235.5 225 201 17 260.5 250 233 137.5 121 187.5 169 237.5 217 13.5 11.5 14.5 12.5 15.5 13.5 Stations SS5Y5-45GUBC4 C6 C8 Stations L1 L2 L3 L4 2 148 3 4 5 6 7 8 9 10 173 198 248 185.5 175 155 15 210.5 200 187 235.5 225 203 16 260.5 250 235 285.5 275 251 17 137.5

VCL

11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class H 17-2-35 8 Series VCL How to Order Manifold How to Order Manifold Assembly VV2C L 2 02 01 Enter the mounting valve and option part numbers under the manifold base

HRX-OM-X037

(Recommended tightening torque178 to 185Nm) Gasket (1) CH1 particle filter Fig. 3-17 CH1 side Installation of particle filter HRL Series 3.3 Installation 3-33 HRX-OM-X037 Chapter 3 Transport and Setting Up 3. Attach the CH1 filter bracket.

HRX-OM-W060

Alarms that allow continuous pump operation are shown in Table 5.4-17 Alarms that allow continuous pump operation (1/2) and Table 5.4-18 Alarms that allow continuous pump operation (2/2).

Compact Guide Cylinder

17 37 37 The value of W in the table means the amount of auto switch protrusion from the body end surface.

IDX-OM-W020

17 11-4 IDFB Series 11 2 IDX-OM-W020 11 T IDFB15E PE 1 2 3 : 0.25inch (6.5mm) : 0.002inch 2 (1.25mm 2) 0.003inch 2 (2mm 2) : 0.0008inch 2 (0.5 mm 2)o 0.003inch 2 17 17 11-5 IDFB4E 11E-11-T R V 11-5 IDFB Series 11 3 IDX-OM-W020 11 T IDFB15E-11-T R V CM FM15 OLR C1 ILS PRS PTC PTC r TB12 MC RY TDR GFCI EDV 11-5 IDFB Series 11 4 IDX-OM-W020 12 V 12 V V 12

70astamb1

MB1 Made to Order Specifications (For details, refer to page 6-17-1.)

mb1

MB1 Made to Order Specifications (For details, refer to page 6-17-1.)

VCB

11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

Vacuum Unit

) () () () () () () 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Release valve Supply valve Supply valve 1 1 2 2 stations Release valve 2 stations Release valve 14 Supply valve 2 Supply valve 3 4 3 stations 15 Release valve 3 stations Release valve 3 5 6 Supply valve Supply valve 16 4 stations Release valve 4 stations Release valve 4 7 8 Supply valve 17 Supply valve 5 5

CRQ2

68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 CRB2 90 180 90 180 90 180 90 180 90 180 12 63 3 10 CRBU2 69 (32) 9 52 3 15 A CRB1 56 (25) 9 41 4 B 20 MSU 43 (20) 7 32 3 30 CRJ 36 (17) Operating range at proper mounting position (Lm/2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

1

Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height [mm] Auto switch model Auto switch model D-M9m(V) D-M9mW(V) D-M9mA(V) D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV Bore size Bore size A B 20 4 8.5 25 4.5 9 32 4.5 9.5 40 7 12 Hs1 Hs2 Hs1, Hs2 Hs1 Hs2 20 16.5 17 17 23 17 25 19 19.5 19.5 25.5 19.5 32 22.5 23 23 29 23 40 26.5 27 27 32.5 27 * Adjust the auto switch after confirming

HRX-OM-Y098

Following items can be set onContinuous pump operation setting screen: Pump operation sustainable temperature Pump operation sustainable time (1) (2) Setting for continuous pump operation Table 5.4-17 Settings for continuous pump operation No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Tapped on body side Compact: Height 17 x Width 20 Free piping Stopping accuracy is stable, because the guide block and the collision part of a shock absorber are one-piece construction. Compact shape is realized by the cylinder built into the linear guide block. Material of body and table is martensitic stainless steel. Piping possible in two directions: vertical or lateral.

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Operating temperature range 41 to 122F (5 to 50C) Operating humidity range [%RH] 90 or less (No condensation) Weight [g] 350 (Except cable) Note) CE-compliance The EMC compliance of the teaching box was tested with the LECP6 series step motor controller (servo/24 VDC) and an applicable actuator.