C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

Table of Contents - Tubing

roll Symbol 20 100 Tube O.D.

SZ3000

137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 173 162.5 149.5 12 185.5 175 160 13 123 112.5 97 13 135.5 125 107.5 14 External Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 135.5 125 107.5 14 148 137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 173 162.5 149.5 12 185.5 175 160 13 198 187.5 170.5 14 210.5 200 181 15 223

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

High Power Cylinder Series RHC

HS 8.5 8.5 SMC SMC 16 16 A 36.7 Auto switch A 38.2 B Auto switch Proper auto switch mounting position Auto switch mounting height (mm) (mm) D-B5 D-B6 D-H7 D-H7C D-G5NTL D-H7 W D-H7 F D-H7BAL D-C7 D-C8 D-C73C D-C80C D-B5/B6 D-B59W D-G5NTL Bore size (mm) D-C73C D-C80C D-B59W D-C7,D-C8 D-H7 D-H7C D-H7 W D-H7 F D-H7BAL Bore size (mm) A B A B A B A B A B A HS HS HS B 27 27.5 24.5 20 20 15 17.5

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP-AD10-20 With magnet and mounting screws MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 is the same as MXP10-20.

Modular F.R.L. Unit

X430 03 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 20 25 30 40 50 60 Body size Body size X430 X440 Low temperature High temperature Thread type Thread type Nil Rc Nil Rc N NPT N NPT F G F G Port size Port size Body size Symbol Port size Body size Symbol Port size 25 30 40 50 60 20 25 30 40 50 60 02 1/4 01 1/8 03 3/8 02 1/4 04 1/2 03 3/8 06

MRQ

(mm) (mm) Stroke 15 20 30 40 50 75 10 25 5 100 20 30 20 15 15 17.5 25 Y 12.5 15 17.5 20 Q 20 20 30 20 68 70.5 68 68 68 70.5 80.5 83 75.5 E 70.5 MRQFS40SMRQ40, #3 (Flange only) 1.5-15 Series MRQ Made to Order Specifications -X1 to X5 Consult SMC for the detailed specifications, dimensions and delivery.

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

LEH_C

16 NPN NPN (FKM) K K 20 10 20 10 AP PNP PNP S S (m) 25 14 25 14 8 8 8 8 A A 1.5 1 1.5 1 10 10 ( B B 3 3 3 3 15 15 F F C C 5 5 5 20 20 5 ( () R R S S 15 - / P.42 7.3 (NPNPNP) J 2.2.3 16 - 1 2 3 4 + 5 + 6 7 8 CR FKM 9 Si 10 11 Si 12 13 ( DC24V) LEHZJ10 LEHZJ16 LEHZJ20 LEHZJ25 CR MHZJ2-J10 MHZJ2-J16 MHZJ2-J20 MHZJ2-J25 FKM MHZJ2-J10F MHZJ2-J16F MHZJ2-J20F MHZJ2

Thermo-con/Rack Mount Type

A C B Applicable model Dimensions [mm] A B C HECR002-A5-E 14 230 35 HECR004-A5-E 45 HECR006-A5-E HECR008-A5-E 44 HECR010-A2-E HECR008-W5-E 46 HECR012-W2-E 310 13 400 15 Option symbol F With Flow Switch F HECR Applicable model HECR002-A5-F HECR004-A5-F HECR006-A5-F HECR008-A5-F HECR010-A2-F HECR008-W5-F HECR012-W2-F With flow switch This is an ON/OFF switch detecting low levels of the circulating

SMC Pneumatic Clean Series

WH E-0.05 E-0.05 I 0 0 KA AL G port 8-J F K C-0.1 A NA F H S + Stroke ZZ + Stroke (mm) A AL Bore size Standard stroke range B1 C D E F GA GB H H1 I J K KA MM NA P RA S WA WB WH 20 20 20 W ZZ 40 30 27 Up to 300 50 35 32 Up to 300 63 35 32 Up to 300 19 27 27 6 7 7 44 55 69 139 162 162 26 32 38 14 18 18 1/8 1/4 1/4 16 20 20 8 9 9 25 30 32 87 102 102 2 2 2 25 30 30 22<19> 26<24> 26<24> 15 17

Rubber seal 5 Port Solenoid Valve Series SYJ5000

3.5 11 5 B A B A 10.6 19 10 M5 x 0.8 (A, B port) Manual override 2-2.6 (For monifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2-2.6 (For mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5

3 Way,3 Port Solenoid Valve NVZ Series

;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

NVZseies

;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

MGP

the allowable kinetic energy given in Table 1. 3.17-6 Compact Guide Cylinder Series MGP Operating Conditions F(N) Allowable lateral load (Ordinary load) Bore size (mm) Stroke (mm) Model 250 10 20 300 25 30 350 40 50 400 75 100 125 150 175 200 11 24 19 17 14 13 26 22 19 17 15 13 12 MGPM F 8 37 27 22 35 30 23 18 15 12 11 10 MGPL 16 38 31 27 23 21 37 32 27 24 22 20 MGPM 16 12 54 40 32 54 47

CS1

2001 to 2400 200 365 330 270 140 M30 X 1.5 326 212 23 20 33 76 60 65 55 80 70 96 30 15 49 With auto switch/125 to 200 only (mm) (mm) W/o rod boot W/ rod boot W/ rod boot W/o rod boot Stroke range (mm) Style Bore (mm) Style Bore (mm) S LS RY Y S X H ZZ1 h f e ZZ ZZ1 ZZ l 125 140 160 180 200 250 300 125 140 160 180 200 to 1400 110 98 164 296 188 98 45 133 75 40 20 273 296 273 0.2 Stroke Lube

Compact Hydraulic Cylinder Series CH
KGB

and Mounting Heights for Stroke End Detection 20 & 25 Proper auto switch mounting positions (mm) B D-F9 D-F9V D-F9W D-F9WV D-A9 D-A9V D-A9 D-F9 D-F9W D-F9BAL Bore size (mm) SMC D-A90 B 11 12 A 16 17 B 15 16 A 15 16 B 14 15 A 12 13 SMC D-A90 20 25 A Approx.

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity

Compact Cylinder with Air Cushion

B + Stroke L K 2 x 4-M6 x 1.0 effective depth 10 A + Stroke M W Rod end male threads H1 Rod end nut C1 X L1 Rod end male threads mm Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Standard type mm A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5