Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Ui = 28 V li = 225 mA (resistively limited) Pi = 1 W Ci = 0 nF Li = 0 mH 52-SY5000 52-SY7000 52-SY9000 Series 10 to 45C (No freezing) Temperature class T6 Ambient and fluid temperature 10 to 50C (No freezing) Temperature class T4, T5 40C less (at rated) Coil temperature rise 24 VDC (system rated voltage) at 1.1 W Barrier input voltage (non hazardous area) 12 VDC at 0.52 W Coil rated voltage

Multistage Ejector Series ZL112/212 1

pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Body Style: M (Body Ported Stacking Manifold Type), Coil Voltage: 5 (24VDC), Flow Rate: C (Power Consumption: 0.5W, Operating Press: 0.3MPa, Cv: 0.016), Electrical Entry: C (Plug Lead w/Light/Surge Suppressor), Port Size: 32 (Body Ported, Barb Fitting ø3.18/ø2), Made to Order: X50 (Universal Type)

Body Style: M (Body Ported Stacking Manifold Type), Coil Voltage: 5 (24VDC), Flow Rate: D (Power Consumption: 0.5W, Operating Press: 0.5MPa, Cv: 0.011), Electrical Entry: C (Plug Lead w/Light/Surge Suppressor), Port Size: 32 (Body Ported, Barb Fitting ø3.18/ø2), Made to Order: X50 (Universal Type)

Body Style: M (Body Ported Stacking Manifold Type), Coil Voltage: 5 (24VDC), Flow Rate: D (Power Consumption: 0.5W, Operating Press: 0.5MPa, Cv: 0.011), Electrical Entry: C (Plug Lead w/Light/Surge Suppressor), Port Size: 32 (Body Ported, Barb Fitting ø3.18/ø2), Made to Order: X62 (Normally Open Type)

Body Style: M (Body Ported Stacking Manifold Type), Coil Voltage: 5 (24VDC), Flow Rate: C (Power Consumption: 0.5W, Operating Press: 0.3MPa, Cv: 0.016), Electrical Entry: CO (Plug Lead w/Light/Surge Suppressor without connector), Port Size: 32 (Body Ported, Barb Fitting ø3.18/ø2), Made to Order: X50 (Universal Type)

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 24VDC, Flow Rate: Power Consumption: 0.5W, Operating Press: 0.3MPa, Cv: 0.016, Electrical Entry: Plug Lead w/Light/Surge Suppressor, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: Universal Type, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 24VDC, Flow Rate: Power Consumption: 0.5W, Operating Press: 0.5MPa, Cv: 0.011, Electrical Entry: Plug Lead w/Light/Surge Suppressor, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: Universal Type, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 24VDC, Flow Rate: Power Consumption: 0.5W, Operating Press: 0.5MPa, Cv: 0.011, Electrical Entry: Plug Lead w/Light/Surge Suppressor, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: Normally Open Type, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 24VDC, Flow Rate: Power Consumption: 0.5W, Operating Press: 0.3MPa, Cv: 0.016, Electrical Entry: Plug Lead w/Light/Surge Suppressor without connector, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: Universal Type, Lead Wire Length: -

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

N.O. 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Note) N.O. valve operates properly only when appropriate pressure is applied to the pilot.

ZSE30A(F)/ISE30A

OUT2 White OUT2 12 to 24 VDC 12 to 24 VDC FUNC FUNC U Blue DC () Blue DC () -E PNP (1 output) + Analog voltage output -F PNP (1 output) + Analog current output Brown DC (+) Brown DC (+) Black OUT1 Black OUT1 + + White OUT2 White OUT2 12 to 24 VDC 12 to 24 VDC Load Load FUNC FUNC U Blue DC () Blue DC () The FUNC terminal is connected when using the copy function.

VP3145/3165/3185

light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge voltage suppressor 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Made to Order Specifications (For details, refer to page 4-10-8.)

q"s

voltage 24 VDC type: 0.12 A or less Power supply voltage 1 2 to 1 5 VDC type: 0.1 8 A or less Input signal Current tvDe Nda2r 4 to 20 mA. 0 to 20 mA (Sink tvoe) Voltage type 0 to 5 VDC. 0 to l0 VDC Presel inDut 4 ooints Current type 250 o or less Voltage type AoDrox. 6.5 kQ Presel inpul ADotox.2.7 ket Straight type Right angle type Inpul impedance H Analog output 1 lo 5 VDC (Load impedance

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Display + 12 to 24 VDC 2% F.S.1 digit (25C 3C) Display accuracy Black OUT Light up when output is turned ON. (Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 1098 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 1 10 21 10 21 Be sure to read this before handling.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Display + 12 to 24 VDC 2% F.S.1 digit (25C 3C) Display accuracy Black OUT Light up when output is turned ON. (Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 1098 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 1 10 21 10 21 Be sure to read this before handling.

VXF

350 0.7 DC DC VXF 2160 5 to 60 580 VC 1.0 AC AC 10 to 60 VXF2160 VXFA2160 1.0 0.03 330 2.0 1 27 VXFA 2160 5 to 40 400 0.7 DC DC VDW Solenoid type VXF 2280 5 to 60 1.0 1500 AC AC VXF2280 VXFA2280 VQ 10 to 60 1.0 0.03 810 2.0 40 1 2 1 VXFA 2280 5 to 40 0.7 1300 DC DC VX2 Note 1) Dew point shall be 10C or less.

AC Servo Motor Driver (MECHATROLINK-III type)

Relay Circuit Example Open-collector Circuit Example DRIVER DRIVER 24 VDC +24 VIN 3.3 k +24 VIN 3.3 k 24 VDC /DEC, etc. /DEC, etc. Note: The 24 VDC external power supply capacity must be 50 mA minimum. The DRIVERs input circuit uses bidirectional photocoupler. Select either the sink circuit or the source circuit according to the specifications required for each machine.

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) RoHS How to Order LEFS 25 R B 200 S 1 6N 1 Motor mounting position Size Motor type 16 25 32 40 R Right side parallel L Left side parallel Symbol Type Applicable size Compatible controllers/ driver LEFS16 LEFS25 LEFS32 LEFS40 LECP6 LECP1 LECPA Nil Step motor (Servo