HRX-OM-W060

Indication Item Setting, selection and display 1 ASCII code (1) Protocol Communication format Binary data 1 EIA RS-485 (2) Type Standard EIA RS-232C 9600 bps (3) Baud Rate Communication speed 1 19200 bps (4) Slave Address Slave address 1 to 32 Select from 1 to 32 1 1 1 Disabled (5) DIO Run/Stop 2 Run/stop by contact input Enabled Displays the communication status (6) Communication Status

HRX-OM-Y098

HRL Series 5.4 Description of the Screen 5-63 HRX-OM-Y098 Chapter 5 Display and Setting of Various Functions Table 5.4-32 List of maintenance reminders 1 Maintenance No.

DOC1001322

DI water (pure water): Electrical conductivity 1 S/cm or more (electrical resistivity 1Mcm or less) 3 (1) Ambient temperature: 32 oC, (2) Circulating fluid: Clean water, (3) Circulating fluid temperature: 20 oC, (4) Circulating fluid flow rate: Rated flow rate, (5) Power supply: 400 VAC 4 (1) Ambient temperature: 32 oC, (2) Circulating fluid: Clean water, (3) Circulating fluid flow rate:

Slider Type Ball Screw Drive/11-LEFS Series

(50/60 Hz), 200 to 230 VAC (50/60 Hz) Reference page Page 607 522 Electric Actuator/Slider Type Ball Screw Drive 11-LEFS Series AC Servo Motor Clean Room Specication Specifications 11-LEFS25, 32, 40 AC Servo Motor Model 11-LEFS25S2 6 11-LEFS32S3 7 11-LEFS40S4 8 Stroke [mm] Note 1) 50 to 600 50 to 800 150 to 1000 Work load [kg] Note 2) Horizontal 20 20 40 45 50 60 Vertical 8 15 10 20 15 30

Thermo-chiller

No transformers required Applicable to 200 to 230 VAC, 380 to 415 VAC, or 460 to 480 VAC Power supply Transformers are not required even when used overseas. Step-down transformer Existing model 380 VAC 200 VAC Easy cleaning of the tank Step-down transformer not required HRLE 380 to 415 VAC 460 to 480 VAC There is a separate opening with a cap behind the water inlet.

Digital Flow Switch (Manifold type)

(No condensation) Withstand voltage 7 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Mounting hole 13-5-1 2 Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH How to Order Note Refer to Table (1) and (2) for the combination available for SUP , VAC and EXH port connection.

ZQ

Non-locking push type / Lock type (tool type) Manual override 12, 24 VDC Rated coil voltage DC 1 W 1 W 0.5 W 0.6 VA (6 mA) 100 VAC 0.5 VA (5 mA) Power consumption 0.65 VA (5.9 mA) 110 VAC 0.55 VA (5 mA) (current value) 1.2 VA (6 mA) 200 VAC 1.0 VA (5 mA) 1.3 VA (5.9 mA) 220 VAC 1.1 VA (5 mA) L plug connector Grommet Grommet L plug connector With light/surge voltage suppressor L plug connector

Manifold Specifications

, DC or less: 50 mA 100 VAC, DC: 20 mA Plug-in type VVZS2000-14A Non plug-in type IS1000-00-X204 Non plug-in type Pressure switch VS4 Max. operating current Caution Operating voltage Air release valve (Single only) Operating pressure range 100 VAC, DC or less When using an air filter with auto-drain or manual override drain, mount the filter vertically.

Digital Flow Switch (Remote type sensor unit)

28 49 35 28 16.8 2.7 depth 12 PF3W511 3/4, 1 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0010-J PF3W521 Basic type Symbol Piping port size A AA B DD E F G H J K L N P Model 11/4, 11/2 104 74

Digital Flow Switch (Integrated display type)

(No condensation) Withstand voltage 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

Title not found

(inch) 1 8 1 2 3 8 5 32 3 16 5 16 1 4 One-touch Inch-size tubing/UNF, NPT thread connection Possible to use in vacuum to 100kPa UNF 10-32 Nylon 1 16 One-touch Mini Series KJ Soft nylon 1 8 Polyurethane Unions Applicable area U.S.A. etc.

Modular/F.R.L. Units Series AC

, DC: 50 mA 48 VAC, DC: 40 mA 100 VAC, DC: 20 mA 15 95 77 36 Maximum operating current 17 99 79 44 22 92.5 68.5 53 Note) For detailed specifications on the IS1000 series, please refer to series IS1000 in Best Pneumatics No.6.

Wireless System

E 16 outputs D-sub connector (25 pins) F 16 outputs Spring type terminal block (32 pins) * For specifications, refer to the Fieldbus system EX600 series in the Web Catalog.

Thermo-chiller

Existing model Step-down transformer Flow switch 380 VAC 200 VAC Refer to page 5. HRS100/150 Step-down transformer Unnecessary Can be installed outdoors. 380 to 415 VAC Transformer unnecessary Power can be supplied from the terminal block of the thermochiller to external switches etc.

HRS100/150

Current model Step-down transformer Flow switch Refer to the Best Pneumatics No. 8 for details. 380 VAC 200 VAC IPX4: No harmful influence by water splash is acceptable from every direction.

155

and 115 VAC, and between 220 VAC and 230 VAC.

53

Transformer unnecessary Power supply Applicable to 200 to 230 VAC, or 380 to 415 VAC Transformers are unnecessary even when used overseas.

(50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC0.9Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) 11 to 642.5 M4000.2 or more1 station occupied (Remote I/O 32 points/32 points)/(Remote register 4 words/4 words

(50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC1.5Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) 11 to 645 M1600.2 or more1 station occupied (Remote I/O 32 points/32 points)/(Remote register 4 words/4 words)