EX600-SEC_eng

Control and input 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output Settings Diagnostic size set for the input Mode Content Caution 3 4 24 VDC, 1.5 W or less, DC General per output Output rating 0 OFF OFF Input data only (Default setting) 0 byte Intermediate reinforcing brace (EX600-ZMB1) When handling, assembling or replacing the units: Avoid touching any sharp metal parts of the

EX600-SPN_eng

Control and input 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output The following instructions must be followed during maintenance: Turn off the power supply Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance Otherwise an injury can result. 24 VDC, 1.0 W or less, DC General per output Output rating -10 to 50 oC (Max

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

(Symbol 1) IN (Symbol 2) OUT Bracket can not be attached to the model without a sub-plate. 5 6 24 VDC 12 VDC Sub-plate material/Port size 14R N.O. 2 Nil Without sub-plate PFA PFA M6 1/4-28 UNF (Symbol 3) IN (Symbol 2) OUT 2 2U Wetted part material 16R N.C.

I

Power Power Voltage DC24V+10%, DC12~15V Voltage (24VDC or 12 VDC) is Input Signal Current Type Note1) 4~20mA, 0~20mA DC necessary. Voltage Type 0~5VDC, 0~10VDC 250or less Input Impedance Current Type Note 2) Either Analog Output or Switch Approx 6.5 Voltage Type Output can be selected.

2/3 Port Solenoid Valve for Chemicals

(Symbol 1) IN (Symbol 2) OUT Bracket can not be attached to the model without a sub-plate. 5 6 24 VDC 12 VDC Sub-plate material/Port size 14R N.O. 2 Nil Without sub-plate PFA PFA M6 1/4-28 UNF (Symbol 3) IN (Symbol 2) OUT 2 2U Wetted part material 16R N.C.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated

PF3WBCSR.eng

Otherwise it can cause failure or malfunction of the system. 1 L+ Brown 18 to 30 VDC 2 N.C.

HRX-OM-O021

For details, refer to the [5.19 Communication function]. *2 When using with optional accessories, depending on the accessory, the allowable current of 24 VDC devices will be reduced. Refer to the operation manual of the optional accessories for details.

Rotary Table

Bolt size for mounting on axial direction Bolt Size Mounting on the top Mounting at bottom Bolt Tap depth When using body tap When using body through hole 1 M30.5 3.5 M40.7 M3 2 3 M50.8 M4 7 M40.7 4.5 Table 6.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

Actuation: 4 (3 Position Exhaust Center), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: T (w/Power Saving Circuit, 24, 12 VDC Only), Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: D (Push-turn Locking Slotted Type), Port Size: M3 (Body Ported), Bracket

They are offered in 24 VDC paired with a DIN connector.

They are offered in 24 VDC paired with a DIN connector.

They are offered in 24 VDC paired with a DIN connector.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Note 4) When ordering the body only, select the symbol from to respectively. 2020 PVQ Specifications VEF VEP Rated pressure range Display/Set pressure range Withstand pressure Display/Minimum setting unit Applicable fluid Power supply voltage Current consumption Switch output 0 to 1 MPa 0.1 to 1 MPa 1.5 MPa 0.01 MPa (Air, Non-corrosive gas, Non-flammable gas) 12 to 24 VDC 10%, Ripple (p-p

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

ISE35 N 25 M L A ARJ AR425 to 935 Digital Pressure Switch Construction Symbol Description ARX Lock pin AMR M3 x 0.5 x 7 (Aluminum materials screw) N Wiring bottom entry ARM Digital pressure switch (Body only) Electrical entry ARP ARP IR-A R Adapter Wiring top entry O-ring Example) Regulator IR Wiring bottom entry O-ring IRV + Wiring top entry Digital pressure switch (Body only) 25 65 NPN

EX250-SAS3_5_7_9_eng

M3 hexagon screw Tightening torque: 0.6 Nm Tie-rod Tightening torque: 0.6 Nm If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation. Otherwise malfunction can result, causing an accident.

HRX-OM-M090

For details, refer to the [5.19 Communication function]. *2 When using with optional accessories, depending on the accessory, the allowable current of 24 VDC devices will be reduced. Refer to the operation manual of the optional accessories for details.

HRX-OM-R016

For details, refer to the [5.19 Communication function]. *2 When using with optional accessories, depending on the accessory, the allowable current of 24 VDC devices will be reduced. Refer to the operation manual of the optional accessories for details.

HRX-OM-R005

For details, refer to the [5.19 Communication function]. *2 When using with optional accessories, depending on the accessory, the allowable current of 24 VDC devices will be reduced. Refer to the operation manual of the optional accessories for details.