Electric Actuator / Slider Type 《 AC Servo Motor 》

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz, when the actuator was tested in both an axial direction and a perpendicular direction to the lead screw. (The test was performed with the actuator in the initial state.) Note 5) Only when the motor option, "with lock", is selected.

Air Cylinder NCA1 Series

75 114 145 213 281 347 than is the case with more flexible smaller rods; therefore, the use of oversized 3200 16 41 67 103 130 194 261 329 4000 13 38 63 94 119 175 240 310 rods should not be considered a remedy against excessive side loads. 5000 9 34 60 87 110 163 225 289 6000 5 30 56 82 102 152 208 274 8000 4 26 50 76 93 137 188 245 10 3 21 45 70 89 125 172 222 12000 17 41 65 84 118 155

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

SZ3000

(Station 1) Light/surge voltage suppressor Side A: Orange Side B: Green (7.5) 43.5 Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150

LG1H

Manufacturer M4 x 0.7 M3 x 0.5 Thread size 32.5 21.5 Effective thread length (mm) 8 6 Quantity 2 4 P.C.D. 46 45 Motor mounting area When mounting a coupling on the motor, mount it within the dimensional range shown on the left. A A B Section BB P.C.D.

MX-OMP0051

3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A) 5.5 5 MXQ25(A) 10 8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5

AIR CYLINDER

Remarks 1 * Tie-rod Stainless steel 8 2 * Tie-rod nut Stainless steel 8 3 Trunnion Cast iron 1 Metallic painting 29 - Fig. -11 Auto switch mounting bracket (For 125, 140: 25A-BA6-125 /for 160: 25A-BA6-160) Table -20 Parts list (The above auto switch mounting bracket is used only for auto switch type. Item with * mark is standard. ) No. Item Material Qty.

Series VQ Metal Seal/Rubber Seal Body Ported

135.5 VQZ VQD Dimensions/Top entry connector [PU] (mm) n L 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 VZS 250 260.5 237.5 248 225 235.5 212.5 223 200 210.5 187.5 198 187.5 198 175 185.5 162.5 173 150 160.5 137.5 148 125 135.5 125 135.5 112.5 123 100 110.5 L3 L4 87.5 98 VFS How to Order Valve How to Order Manifold Ass'y VS Specify valve and option nos. below the manifold base No. 0 Y 4 1 1 5

MGP

60204-1: Safety of machinery -Electrical equipment of machines (Part1:General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 MGP series 113) 3) 1 1 () 4 2 T (d=) 2 T 2 2 RSQ 400mm (mm) 3 1mm MGPM MGPL (mm) MGPS (mm) (mm) 10% 25% 140% (/MGPM50) MGPS MPGM 50 30 25 80 45

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

VZ1000-11-45 DIN rail SY7000 Manifold Base Expansion Stations can be added at any position. Figure 1. Valve mounting Loosen the two DIN rail holding screws a which secure the manifold base on the U side and the D side. To remove the end block assembly from the DIN rail, slide it to the end of the rail after loosening the DIN rail holding screws.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Only 1.5 m cables usable with open collector. (12) L 20 19 Round terminal 0.5-5 Green (22) (25) (40) (10) Weight 2 1 (45) Product no.

Table of Contents

Cylinder port is located at U side of body. 3(R) EXH port L n Dimensions Formula L1 = 11n + 15.5, L2 = 11n + 28 n: Station (Maximum 16 stations) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 37.5 50 75 85.5 L1 L2 (L3) (L4) 26.5 39 62.5 73 48.5 61 87.5 98 59.5 72 100 110.5 70.5 83 112.5 123 81.5 94 125 135.5 92.5 105 125 135.5 103.5 116 137.5 148 114.5 127 150 160.5 125.5 138 162.5 173 136.5 149

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

position is detected by provision of an auto switch sensor Can be mounted 3 ways Side mounting Front mounting Front piping Side piping Bottom mounting Bottom mounting Application Example Assembly lines, inspection lines etc. with turning operations Front mounting Side mounting Series Variations Bearing type Bore size (mm) Standard stroke (mm) Model Slide bearing MGTM 63 80 25, 50, 75, 100, 125

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

125 162.5 137.5 150 175 60.5 73 85.5 98 110.5 123 135.5 135.5 173 148 160.5 185.5 n L L1 L2 L3 14 16 17 18 21 22 24 13 15 19 20 23 163 174 196 207 218 251 262 284 185 229 240 273 187.5 187.5 212.5 225 237.5 262.5 275 300 200 250 250 287.5 198 198 223 235.5 248 273 285.5 310.5 210.5 260.5 260.5 298 How to Order Double check block 2 position 3 position/exhaust center R1 P R2 R1

MGZ Series

) (with no freezing) Ambient and fluid temperature With auto switch 10 to 60C (14 to 140F) (with no freezing) Non-lube Lubrication 50 to 700mm/s (2 to 27.5in/s) Piston speed +1.4 0 +1.0 0 Stroke length tolerance to 250 , 251 to 1000 mm Rubber bumper Cushion JIS class 2 Thread tolerance 1/4 1/4 1/4 Port size Standard strokes Bore size (mm) Standard strokes (mm) Long strokes (mm) 75, 100, 125

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

Response time (1) 10 ms or less (AC), 45 ms or less (DC) 1,500 c.p.m. (AC), 180 c.p.m. (DC) Non-locking Max. operating frequency (2) VK Manual override Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Electro-Pneumatic Valve NVEP/NVEF Series

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?