ZP -75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.
Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness
Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation A 800 700 600 500 400 300 200 100 0
100 N JCM CDG3 L 100 M9BW N 25 C With auto switch CM2 With auto switch (Built-in magnet) CM3 Made to Order For details, refer to page 366.
C 400 300 200 10 20 30 100 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-3 Heating capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 600 Heating capacity W 500 Radiating water flow rate L/min 400 300 200 1 3 5 100 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.
Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 27 11.
CXS 35.5 45 30 138 27 101 128 165.5 38 70 50 188 52 126 178 215.5 40.5 95 70 238 77 151 228 265.5 43 120 90 288 102 176 278 315.5 D-X Individual -X 505 Series CXWL 10 With End Lock: CXWL10Stroke/25 to 100 R Max.
CXS 35.5 45 30 138 27 101 128 165.5 38 70 50 188 52 126 178 215.5 40.5 95 70 238 77 151 228 265.5 43 120 90 288 102 176 278 315.5 D-X Individual -X 505 Series CXWL 10 With End Lock: CXWL10Stroke/25 to 100 R Max.
200 300400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Weight/MY2C MY2C/m1 MY2C/m2 MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight Nm Load weight Nm Load weight Nm MY2C40 MY2C40 MY2C40 10 10 10 MY2C25 MY2C25 MY2C25 5 5 5 4 4 4 MY2C16 MY2C16 3 3 3 MY2C16 2 2 2 1 1 1 100 200 300 400500 1000 1500 100
) M 82 (92) 93 (103) 98 (108) Energized open Energized closed VXD2272 32A 40A 50A VXD2382 VXD2392 VXD2270 51.5 54.5 59 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 100 105 120 36 42 53 35 40 40 12 14 14 25.5 28 28 41.5 23 25.5 25.5 48 50 50 95 97 97 62 64 64 101 (111) 44.5 VXD2380 VXD2390 106 (116) 44.5 ( ): N.O. 4.1-25 Direct Operated 3 port Solenoid Valve Series VX31
speed mm/s Piston speed mm/s 5 Model Selection Series MY2 Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2HT40 MY2HT40 MY2HT40 40 40 40 30 30 30 MY2HT25 20 20 20 MY2HT25 MY2HT25 MY2HT16 10 10 10 MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000
1/RJ20 70 140 20 RJ2015L RJ2725L RJ1412L 60 120 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] 15 100 50 RJ2725H RJ1412H 80 40 RJ2015H 10 60 30 RJ1410 40 20 5 20 10 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 500 1000 1500 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] 882 Model Selection RJ Series Model Selection Graph The model selection graphs
70 Note) The L dimension of 2 to 6 stations is the same.
100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.
Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance
Load-side encoder initial communication error 1 70.A Load-side encoder initial communication Process error 1 DB 70.B Load-side encoder initial communication Process error 2 DB 70.C Load-side encoder initial communication Process error 3 DB 70.D Load-side encoder initial communication Process error 4 DB 70.E Load-side encoder initial communication Process error 5 DB 70.F Load-side encoder
Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] 100 2 or 3 particles/cc 10 00 10 20 30 40 50 60 70 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details
Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95