Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Multistage Ejector Series ZL112.212

(kPa) 80 80 ZH 70 70 60 60 ZU 50 50 40 40 30 30 ZL 20 20 10 10 ZY 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 ZF Suction flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) 130 Tank capacity: 1l Supply pressure: 0.4 MPa Tank capacity: 1l Supply pressure: 0.4 MPa ZP Time to Reach Vacuum Time to Reach Vacuum 100 90 100 90 Vacuum pressure reached 89kPa Vacuum

ARM10/11

SMC SMC 28.5 AV 6 51.5 80 51.5 AU 13 OUT IN 13 3 28 OUT IN 13 AF OUT IN 3 3 5. Option 4. Accessory 6. Unit representation 2.

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

70pvpump

Air consumption (l/min (ANR)) 140 120 SUP = 0.5 MPa 100 SUP = 0.3 MPa 80 SUP = 0.2 MPa 60 40 20 1 0 2 3 4 5 6 7 Cycle (Hz) PA513 Air Consumption 400 Air consumption (l/min (ANR)) SUP = 0.5 MPa 350 300 Calculating Air Consumption (PA3000) 250 SUP = 0.3 MPa 200 Find the air consumption for operation with a 4 Hz switching cycle and pilot air pressure of 0.3 MPa from the air consumption graph

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Switch (When equipped with switch) 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 L1 L2 L3 L4 248 260.5 260.5 273 285.5 298 310.5 223 235.5 173 185.5 198 210.5 210.5 148 160.5 237.5 250 250 262.5 275 287.5 300 212.5 225 187.5 200 200 137.5 150 162.5 175 213.7 223.7 233.7 243.7 253.7 263.7 273.7 163.7 173.7 183.7 193.7 203.7 133.7 143.7 153.7 123.7 17.5 12.5 14 15 16

MLGP

1/4 M5 x 0.8 CLS Holding force (Maximum static load) (N) 157 245 402 629 982 1559 2513 3927 W Standard Stroke CLQ Bore size (mm) Standard stroke (mm) MLGP 20, 25 32 to 80 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation

58

(Different surfaces, Same surface), With 1 pc. 80 10 85 90 D-M9V D-M9WV 80 + 30(n 4) 2 90 + 30(n 4) 2 85 + 30(n 4) 2 10 + 30(n 2) 2 With n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 120 20 115 D-M9AL 120 + 40(n 4) 2 (n = 2, 4, 6, 8) 20 + 40(n 2) 2 115 + 40(n 4) 2 With n pcs.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Bore size 20 25 32 40 50 63 80 100 Auto switch 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Nil Without auto switch (Built-in magnet) Port thread type 20, 25 M thread Rc NPT G Refer to table below for selection of applicable auto switch.

Vacuum Regulator

140 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV20-C10 (One-touch fitting 10) IRV20 53.0 0 10 53.5 SET side pressure (kPa) 20 54.0 Set pressure (kPa) 30 54.5 40 55.0 50 55.5 60 56.0 70 Set point 56.5 80 90 57.0 100 95 90 85 80 75 70 65 60 0 50 100 150 200 250 Flow rate (l/min (ANR)) VAC side pressure (kPa) 2 Vacuum Regulator Series IRV10/20 Construction

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

100 Standard Stroke Table Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1

Multistage Ejector (N)ZL Series

Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate [l/min(ANR)] Suction Flow rate [l/min (ANR)] Time to reach vacuum Time to reach vacuum Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa 100 90 100

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke will be exceeded.

CNG

40 214 238 35 17 62 236 260 50 241 (250) 269 (278) 35 17 70 261 (270) 289 (298) Note) ( ): Denotes the dimensions for long stroke.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

g 1 m: Approx. 120 g 2 m: Approx. 200 g 3 m: Approx. 280 g 5 m: Approx. 440 g 10 m: Approx. 840 g 0.5 m: Approx. 80 g 1 m: Approx. 120 g 2 m: Approx. 205 g 3 m: Approx. 285 g 5 m: Approx. 450 g 10 m: Approx. 865 g Weight *1 Can also be connected to an M12 5-pin socket A-coded connector 223-1 A Communication Cable/Connector M12 Example of Connection PLC EX260 EX123/124/126 EX500 EX600 EX245