LEC-OM071xx

command Processing Time Normally 50 ms Can be used Subcommand (10 s max.)

High Vacuum Angle Valve, XL Series

P.12 to P.15 3 ( Size ) 16, 25, 40 XLFV (With solenoid valve) High speed operation O-ring Seal 2 x 105 to 10-5 10-10 10-10 High volume operation 2 ( Size ) 50, 63, 80 XLG Double acting P.16 to P.19 XLGV (With solenoid valve) XLD Standard Reduces particulates Single acting (N.C.)

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-7-7 8 Cylinder with Lock Double Acting, Single Rod Series CNA 40, 50, 63, 80, 100 How to

LEC-OM069xx

Pn506 0 to 50 10 ms 0 Immediately 2 Lock Reference Output Speed Level 4.3.4 Pn507 0 to 10 1 min-1 100 Immediately Setup 2 Waiting Time for Lock Signal When Motor Running Pn508 10 to 100 10 ms 50 Immediately Setup 2 Instantaneous Power Cut Hold time Pn509 20 to 1000 1 ms 20 Immediately Setup 4.3.6 10-16 10 List of Parameters (contd) Parameter Name Setting Units Factory When Classification

Modular F.R.L. Unit

29.5 28.5 30.5 35 35 U J 33 P 2.5 13 10 12 12 F 43 57 57 75 80 G 30 41 41 50 50 H 24 35 35 40 40 L 5.5 7 7 9 9 M 3.2 4 4 4 4.6 N B 132 184 187 222 224 E 41.5 55 55 72.5 77.5 AC20C AC25C AC30C AC40C 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 2 Note 1) 50 71 71 88 88 45 50 50 75 75 126 167 167 220 235 114 143 146 183 185 26.5 28 31 36 36 0 3.5 3.5 3 AC40C-06 Note 1) For AC20 only, the position

CG5-S

1.15 24 7 11 4 22 40 38.4 29 4 70.5 56 40 C type 10 for shaft IY-G04SUS 50, 63 40 CG-E050SUS 10 14 9.6 41.6 36.2 1.55 1.15 40 12 15 5 25 50 59.6 35 6 106.5 84 50 C type 10 for shaft IY-G05SUS 80, 100 50, 63 CG-E080SUS 14 22 13.4 50.6 44.2 2.05 1.15 60 14 23 6 40 80 87.2 57 9 144.5 120 80 C type 14 for shaft IY-G08SUS 80 18 17 64 56.2 2.55 1.35 C type 18 for shaft IY-G10SUS 100 22 21 72 64.2

1.1

0 10 20 30 40 Circulating fluid temperature (C) HRG010-A HRG010-W 12 12 60 [Hz] 60 [Hz] 10 Cooling capacity (kW) Cooling capacity (kW) 10 50 [Hz] 50 [Hz] 8 8 6 6 4 4 2 2 0 0 0 10 20 30 40 40 0 10 20 30 Circulating fluid temperature (C) Circulating fluid temperature (C) HRG015-A HRG015-W 18 16 60 [Hz] 16 60 [Hz] 50 [Hz] 14 Cooling capacity (kW) Cooling capacity (kW) 14 50 [Hz] 12 12 10 10

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

JXCx-OMT0023

] CMX CDV = 0 10 S = 0 10 1/n Pb = 10 10-3 10 1/2 10 = 20 1 Hence, set 20 to CMX and 1 to CDV.

RSQ

MI W S 100 200 50 CEP1 130 50 100 50 40 40 CE1 40 Weight of transferred object m (kg) Weight of transferred object m (kg) 32 30 40 50 CE2 20 30 32 20 ML2B 20 16 10 C J G5-S 10 12 5 4 CV 3 4 5 3 MVGQ 2 2 CC 1 1 RB 1 5 10 20 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) J Lateral Load and Operating Pressure DThe larger the lateral load, the higher the operating pressure required

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Hz 50 60 50 Closed center 60 0.46 4/2 5/3 (A/B EA/EB) 50 60 { } Exhaust center 50 60 Note) For AC Pressure center With light/surge voltage suppressor Push-turn locking slotted type P. 283 DIN terminal 10-SYJ5000 0.83 4/2 5/3 (A/B EA/EB) Push-turn locking lever type { } (10-SYJ5000, 7000 only) P. 311 10-SYJ7000 M8 connector 2.9 4/2 5/3 (A/B EA/EB) { } P. 342 Note) All AC voltage

Metal Seal/Rubber Seal Series VQ Body Ported

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Air Cylinder

+ 35(n 2) 2 (n = 2, 4, 6)3 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting D-H7/H7W D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6)3 60 + 22.5 (n 2) (n = 2, 3, 4, 5) CM3 CG1 D-C7 D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6)3 50 + 20 (n 2) (n = 2, 3, 4, 5) CG3 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6)3 50 + 27.5 (n 2) (n = 2, 3, 4, 5) JMB D-M9V 5 5 10 + 10 (n

CNA

100 100 100 MGF 50 50 50 40 40 40 200 200 80 80 80 63 63 63 100 100 CY1 50 50 50 Load weight m(kg) Load weight m(kg) 50 40 30 50 40 30 40 40 40 MY1 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Max. speed V(mm/s) Max. speed V(mm/s) 3.3-7 Cylinder with Lock/Double Acting Single Rod Series CNA 45, 50, 63, 80, 100 How to Order CNA L N 50 100 JN D Standard

Compact Cylinder with Lock Series CLQ

Bore size (mm) 32, 40 50, 63 80 100 B D E F M T1 T2 Part no. CNG YA-03 YA-05 YA-08 YA-10 18 6.8 16 6 42 6.5 10 YA 03 20 9 20 8 50 6.5 12 MNB Applicable air cylinder bore 26 11 25 10 62 8.5 16 31 14 30 12 76 10.5 18 CNA 03 05 08 10 32, 40 50, 63 80 100 Bore size (mm) 32, 40 50, 63 80 100 Mounting bracket U V W Mass (g) Part no.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 l3 l1 Single clevis with ball joint

REA/REB

Usable range 30 40 50 50 40 30 20 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 80 REA63 REA50 50 40 30 REA40 REA32 Load weight W (kg) 20 REA25 10 1 100 200 300 Maximum speed U mm/s 4 Series REA Model Selection 3 Max

MNB

M8 x 1.25 5 197 55.5 3/8 58 80 10.5 10 38 11.5 321 M22 x 1.5 61 33 14 157 26 M10 x 1.5 5 245 61.5 3/8 72 100 10 38 10.5 17 341 M26 x 1.5 37.5 15 68 177 26 M10 x 1.5 5 265 69.5 1/2 72 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125