VZS

VAC, 100 VDC or less.

EX120/121/122

mA or less SAS7: 100 mA or less Internal current consumption (Unit) 100 mA or less SAS9: 65 mA or less SAS5: 65 mA or less SAS7: 8 points SAS9: 4 points SAS3: 8 points SAS5: 4 points Number of inputs 32 points (Based on input block connection) Supply voltage 24 VDC Note 5) SAS3: 240 mA or less Supply current 1.0A or less SAS5: 120 mA or less PNP output (COM.)

IDX-OM-Y002

200 4x20 700 (100) 800 355 4x20 Auto drain is included in the package.

KJ

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

Thermo-chiller

70 Waterproof specication IPX4 Accessories Alarm code list stickers 2 pcs.

LEY-OM007

[ ] [%] [ ] 40 100 50 70 12 70 20 1.3 85 15 0.8 100 25 40 [%] [%] [ ] [%] [ ] 95 100 100 25 [%] [%] 40 [ ] [ ] 65 100 100 [%] LEY 32* 25 40 [%] [%] [ ] [%] [ ] 65 100 85 50 15 100 -43- 7.3 LEY / [Nm] L[mm] [mm] LEY 16 M50.8 3.0 10 14 LEY 25 M81.25 12.5 13 17 LEY 32 M81.25 12.5 13 22 / [Nm] L[mm] [mm] LEY 16 M81.25 12.5 12 14 LEY 25 M141.5 65.0 20.5

Brake mechanism added

75 100 80 100 90 100 2 D-A3C D-G39C D-K39C 20 + 35 (n 2) (n = 2, 3, 4, ) 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Different surfaces) 2 n 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Same surface) 1 10 75 80 90 (Different surfaces) (Same surface) 20 55 75 80 90 75 + 35

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation A 800 700 600 500 400 300 200 100 0

51

100 N JCM CDG3 L 100 M9BW N 25 C With auto switch CM2 With auto switch (Built-in magnet) CM3 Made to Order For details, refer to page 366.

HEC_001W-E

C 400 300 200 10 20 30 100 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-3 Heating capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 600 Heating capacity W 500 Radiating water flow rate L/min 400 300 200 1 3 5 100 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 27 11.

Slide Unit Series CX2/CXWM/CXWL

CXS 35.5 45 30 138 27 101 128 165.5 38 70 50 188 52 126 178 215.5 40.5 95 70 238 77 151 228 265.5 43 120 90 288 102 176 278 315.5 D-X Individual -X 505 Series CXWL 10 With End Lock: CXWL10Stroke/25 to 100 R Max.

Slide Unit Series CX2/CXWM/CXWL

CXS 35.5 45 30 138 27 101 128 165.5 38 70 50 188 52 126 178 215.5 40.5 95 70 238 77 151 228 265.5 43 120 90 288 102 176 278 315.5 D-X Individual -X 505 Series CXWL 10 With End Lock: CXWL10Stroke/25 to 100 R Max.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 300400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Weight/MY2C MY2C/m1 MY2C/m2 MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight Nm Load weight Nm Load weight Nm MY2C40 MY2C40 MY2C40 10 10 10 MY2C25 MY2C25 MY2C25 5 5 5 4 4 4 MY2C16 MY2C16 3 3 3 MY2C16 2 2 2 1 1 1 100 200 300 400500 1000 1500 100

2/3 Port Valve

) M 82 (92) 93 (103) 98 (108) Energized open Energized closed VXD2272 32A 40A 50A VXD2382 VXD2392 VXD2270 51.5 54.5 59 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 100 105 120 36 42 53 35 40 40 12 14 14 25.5 28 28 41.5 23 25.5 25.5 48 50 50 95 97 97 62 64 64 101 (111) 44.5 VXD2380 VXD2390 106 (116) 44.5 ( ): N.O. 4.1-25 Direct Operated 3 port Solenoid Valve Series VX31

MY2

speed mm/s Piston speed mm/s 5 Model Selection Series MY2 Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2HT40 MY2HT40 MY2HT40 40 40 40 30 30 30 MY2HT25 20 20 20 MY2HT25 MY2HT25 MY2HT16 10 10 10 MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000

10

1/RJ20 70 140 20 RJ2015L RJ2725L RJ1412L 60 120 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] 15 100 50 RJ2725H RJ1412H 80 40 RJ2015H 10 60 30 RJ1410 40 20 5 20 10 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 500 1000 1500 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] 882 Model Selection RJ Series Model Selection Graph The model selection graphs

5 Port Solenoid Valve Series VQZ1000/2000/3000

70 Note) The L dimension of 2 to 6 stations is the same.