KG

(100) 44.5 112 16 22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R thread installation.

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

CQS

Thus, it can be used in a Class 100 clean room.

2/3 Port Valve

terminal X 92 94 97 DIN connector V 59 60 63 C R 47 (54) 54 (64) 61 (71) T 40 (47) 46 (56) 54 (64) Y 74 (81) 81 (91) 88 (98) U 47 48 51 W 84 (91) 90 (100) 98 (108) Q 23 25.5 28 VVX21l VVX22l VVX23l The figures in parentheses are a closed style at energizing ( ): Individual pressure 20.5 (17.5) 26.5 (22.5) 26.5 (22.5) 56 (67) 64 (81) 72 (87) 38 49 49 11 13 13 25 30 30 32 40 40 36 46 46 12

Compact

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .

LX Series Compact Electric Actuators

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls . $lid8 $crul{ Tyfr LXFHSSfI EE r4iil & *l t30omm) Thread I Deep [ ] shows lhe location at which origin poinl switch operales.

Silencer Series AN

1 m Without silencer With silencer Port size Port size 130 120 110 100 90 80 70 Note 1) About the display of products material PBT : Polybutylene terephthalate PVF : Polyvinyl formal Note 2) Recommended flow rate is the flow at 0.5 MPa in the inlet pressure. 60 AN202-02 AN302-03 AN402-04 5-10-7 Silencers Precautions Be sure to read before handling.

IR1000/2000/3000

60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min (ANR)) 14-

Mini Rotary Actuator

Mass* CRJB05-90 32 CRJB05-100 05 CRJB05-180 39 CRJB05-190 Basic type CRJB 1-90 54 CRJB 1-100 1 CRJB 1-180 67 CRJB 1-190 CRJU05-90 47 05 CRJU05-180 53 With external stopper CRJU1-90 70 1 CRJU1-180 81 *Mass of auto switch is not included. Effective torque Table 4.

ZP

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

17

50,63 22 (10) 22 (10) 40 40 40 50,63 40 40 40 32 32 32 32 32 32 11 (5) 10 20 30 50 40 51 100 101 300 200 11 (5) 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 110 (50) 110 (50) 100 100 100 80 80 80 Load mass m lbs (kg) Load mass m lbs (kg) 100 100 80 80 100 22 (10) 22 (10) 80 11 (5) 10 100 20 29 30 5051 300 200 11 (5) 10 100 20 29

Digital Flow Switch (Integrated display type)

1.0 to 40.0 L/min 1.0 to 42.0 L/min 0 to 42 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2 to 100 L/min 2 to 105 L/min 0 to 105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20% 2 to 90 L/min 2 to 95 L/min 0 to 95 L/min 4.60 V 18.4 mA 70% 30% 2 to 80 L/min 2 to 84 L/min 0 to 84 L/min 4.20 V 16.8 mA 60% 40% Other specifications are the same as the standard product.

Clean Regulator/Fluororesin Type

Symbol 1 Rotating the Mounting Hole 90 X401 This is a product with a 90 rotated vale guide mounting hole. ARJ X401 Standard model no. AR425 to 935 Rotating the mounting hole 90 ARX Dimensions AMR Other dimensions are the same as the standard type.

Multistage Ejector Series ZL112/212 1

: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Multistage Ejector Series ZL112.212

Supply pressure: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 ZH 70 70 60 60 ZU 50 50 40 40 30 30 ZL 20 20 10 10 ZY 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 ZF Suction flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) 130 Tank capacity: 1l Supply pressure: 0.4 MPa Tank capacity: 1l Supply pressure:

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lead 20: LEKFS40EA Lead 30: LEKFS40EH 20 10 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 5 Model Selection LEKFS Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) For Battery-less Absolute (Step Motor 24 VDC), Motor Parallel Type * The following graphs show the values when the moving force is 100%.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

JXCx-OMU0026

0.0 0.0 0.5 Axis 2 CIR-L 40.00 100 0.0 0.0 0.5 2 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-R 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-R 0.00 100 0.0 0.0 0.5 3 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-3 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-3 -40.00 100 0.0 0.0 0.5 4 Axis 3 -20.00 100 0.0 0.0 0.5 Axis 4 -20.00 100 0.0 0.0 0.5

AC Servo Motor Driver

(Example) Limited to 100[ms] since During acceleration: 100[ms] 20 20 100[ms] 200[ms]. 200[ms] as set since During deceleration: 200[ms] 20 5000 400[ms] 200[ms].