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Status (6): TEMP READY signal output continues since the temperature is now back within the Out Time range of 200 sec even though it was temporarily outside the Low range. Status (7): TEMP READY signal turns OFF when 200 sec has passed after the temperature rises above the High range.

200 mm/s mm/s USB cable A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2CN Communication cable PC PC is prepared by customer) Refer to 8CN2TB/PC Power supply connector for usage.

5 Pilot valve assembly How to Order Pilot Valve Assembly SCZ2 G 1 1 Rated voltage Series VZ200 1 100 VAC, 50/60 Hz Pilot pressure exhaust Manual override Electrical entry 2 200 VAC, 50/60 Hz 1 Spacer side exhaust (Type 20) 3 110 VAC, 50/60 Hz Nil Push type (Safety style) G H L LN L plug connector With lead wire 600 mm lead wire 300 mm lead wire 4 220 VAC, 50/60 Hz Grommet B Locking type

It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.

16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N)

200 Lower limit 100 100 Lower limit 0 0 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] RS2H63-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.2 = 0.1 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] 63 Operating range Upper limit

(MR Configurator2 TM) 4 7 4 4.4 4.2 4.5.2 JOG 4.5 JOG TM) (MR Confignrator2 4.5 (EM1) TM (MR Confignrator2 JOG 4 8 4 TM) 4.5.1 (MR Configurator2 (SW2-1)SSCNET (1) (A) JOG JOG ON/OFF (MR Confignrator2 TM)JOG [r/min] 200 0 [ms] 1000 050 ON OFF (b) ON/OFF (MR Confignrator2 TM) [pulse] 262144 09 [r/min] 200 0 [ms] 1000 050 (CCW)(CW) (CCW) (CCW)(CCW) (CW) (CW)(CCW) (CW)(CW) [s

It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.

(Displays 0 when the value is below 80 L/min) 180 to 2100 L/min 90 to 1050 L/min (Displays 0 when the value is below 180 L/min) 9.0 0 to 9%F.S. (Displays 0 when the value is below 90 L/min) 200 to 2100 L/min 100 to 1050 L/min (Displays 0 when the value is below 200 L/min) 10.0 0 to 10%F.S.

/40 200/50 / AC200V 800/40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150

Weight Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 LEKFS16 Product weight[kg] 0.9 1 1.1 1.2 1.3 1.4 1.5 1.5 1.6 1.7 0.12 Additional weight with lock[kg] LEKFS25 Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 Product weight[kg] 1.7 1.8 1.9 2.1 2.3 2.4 2.5 2.6 2.8 2.9 3.2 3.4 3.7 0.26 Additional weight with lock[kg] LEKFS32 Series Stroke[mm] 50 100 150 200

300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

50 0 to 100 X X X X Conductive NBR 50 10 to 200 X X X X X Conductive silicon rubber The above table covers only general characteristics of subject rubber materials.

Special electrical entry direction Symbol Electrical entry direction 90 90 IN OUT A 180 180 IN OUT B 270 270 IN OUT C Replacement Parts Gasket Part No. for DIN Connector VCW20-1-29-1 (For Class B Coil) DIN Connector Part No. Electrical option Rated voltage Connector part no. 24 VDC Lead Wire Assembly for Flat Terminal (Set of 2 pcs.)

: (800) 258-9200-www.stevenengineering.com VS4210-03 (10A) 3 8 4.1 3.9 0.19 0.35 0.96 1.00 VS4310-01 (6A) 1 8 3.1 3.2 0.37 0.35 0.80 0.82 VZS 360 180 15 or less 45 or less 0.98 1.22 VS4310-02 (8A) 1 4 3.8 3.6 0.23 0.33 0.89 0.89 3 (3 position) VFS VS4310-03 (10A) 3 8 4.2 3.8 0.23 0.32 1.00 0.99 (Closed center) VS4410-01 (6A) 1 8 3.1 3.0 0.28 0.28 0.77 0.75 VS4 360 180 15 or less 45 or less

0.7 0.82 VF VS4110-02 (8A) 1 4 4.0 3.4 0.17 0.47 0.91 0.89 VS4110-03 (10A) 3 8 4.1 3.9 0.19 0.35 0.96 1.00 VFR VS4210-01 (6A) 1 8 3.2 3.2 0.42 0.37 0.86 0.80 2 (Double) 1,200 180 13 or less 40 or less 0.9 1.14 VS4210-02 (8A) 1 4 4.0 3.4 0.17 0.47 0.91 0.89 VP4 VS4210-03 (10A) 3 8 4.1 3.9 0.19 0.35 0.96 1.00 VS4310-01 (6A) 1 8 3.1 3.2 0.37 0.35 0.80 0.82 VZS 360 180 15 or less 45 or less

190 225 215 250 240 50 156 145 181 170 206 195 231 220 256 245 63 165 152 190 177 215 202 240 227 265 252 80 180 163 205 188 230 213 255 238 280 263 B 100 207 181 232 206 257 231 282 256 307 281 A Note) Dimensions other than those highlighted above are standard.

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.