MTS

80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm

Compact Cylinder Series CQS

CQ2 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Built-in Magnet Cylinder Model Double acting Action D 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 RQ If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. (Example) CDQSL25-30D 25 For Manufacture of Intermediate Strokes, refer to page 552.

CNG

0.5 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP 200 200

Cylinder with Lock Series CNG

0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20

CXS

Stroke range Standard strokes (mm) Bore sizes (mm) Long strokes (mm) Series 10 80, 90, 100, 110, 120, 125, 150 10 to 75 CXSM CXSL 15 110, 120, 125, 150 20, 25, 32 10 to 100 110, 120, 125, 150, 175, 200 10,15 10, 20, 30, 40, 50 75, 100, 125, 150 CXSWM CXSWL 10, 20, 30, 40, 20, 25, 32 125, 150, 175, 200 50, 75, 100 Dimensions CXS10, 15 CXS20, 25, 32 Stroke ZZ Stroke ZZ SS SS Z Z (Z) (Z) CXS10

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

mm] JSXD30 Series 1/4, 3/8, 1/2 10 100 JSXD40 Series 3/8, 1/2 15 200 JSXD50 Series 3/4 20 430 Grommet Stainless steel NBR Air JSXD60 Series 1 25 DIN terminal Brass 580 N.C.

Moisture Control Tube

D X IDK02-100 IDK02-200 IDK04-100 IDK04-200 IDK06-100 IDK06-200 100 200 100 200 100 200 120 220 140 240 140 240 2 x 1.2 D 4 x 2.5 Inner sleeve 6 x 4 Note) Dimensions at 40% relative humidity. Dimensions may change if the relative humidity changes.

MXW

400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to 200 mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

Air Slide Table Series MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

Lightweight and Compact

HRS HRS 090 HRS 090 HRS 100/150 Protection Circuit Item Unit Standard value Influence HRSH 090 Corrosion Scale generation Caution pH (at 25C) 6.5 to 8.2 v v Electric conductivity (25C) [S/cm] 100* to 800* v v Chloride ion (Cl) [mg/L] 200 or less v Sulfuric acid ion (SO42) [mg/L] 200 or less v HRSH If operating in the below conditions, the protection circuit will activate and an operation

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

ISA2

150 200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100 80, 100/25 to 100 7-6-142 Air-hydro (Bore size 20 to 100) Clean Series (Bore size 12 to 63) Built-in One-touch fittings (Bore size 32 to 63) Foot/Flange style Double clevis style Copper-free 7-6-1 2 Compact Cylinder: Standard

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

Series VQ Base Mounted Metal Seal/Rubber Seal

Lead wire color 24VDC 100, 110 200, 220 V AC V AC Black (Yellow) [Yellow] Lead wire color 24VDC 100, 110 200, 220 VAC VAC SOL.A SOL.A () () Black (Blue) [Red] Red (Blue) [Red] COM(+) COM(+) Red (Blue) [Red] SOL.B White (Gray) [Gray] () Single solenoid VQ0 double VQ1000 double solenoid Note: ( ) is for 100, 110VAC. [ ] is for 200, 220VAC Plug connector lead wire length Note) The length of

5 Port Solenoid Valve

100 112.5 125 137.5 137.5 150 150 162.5 175 175 187.5 200 200 212.5 225 225 237.5 250 250 262.5 275 275 110.5 110.5 123 135.5 148 148 160.5 160.5 173 185.5 185.5 198 210.5 210.5 223 235.5 235.5 248 260.5 260.5 273 285.5 285.5 21 Slim Compact Plug-in Manifold Bar Base PCWiring System Compatible Flat Ribbon Cable J kit Slim Compact Plug-in Manifold Bar Base Slim Compact Plug-in Manifold Bar

Electric Actuator / Slider Type 《 AC Servo Motor 》

(m) PE08 0 -2000(Less than stroke 1000)/ -200(Stroke 1000 or more) Stopper type home position return stopper time (msec) PE10 100 200 Stopper type home position return torque limit value (%) PE11 15 30 Regenerative option PA02 000 000(Non) / 002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 000 000 Load to motor inertia moment ratio PB06

SQ1000/2000

Metal seal Closed center SQ1000 SQ1331 33 or less 3.2 (0.18) 25 or less 100 Rubber seal SQ1430 26 or less 3.2 (0.18) 20 or less 100 Metal seal Exhaust center SQ1431 33 or less 4.5 (0.25) 25 or less 100 Rubber seal SQ1530 26 or less 2.9 (0.16) 20 or less 100 Metal seal Pressure center SQ1531 33 or less 3.2 (0.18) 25 or less 100 Rubber seal Dual 3 port valve A B C SQ1 31 33 or less 3.2 (0.18