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D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Air Fittings & Tubing

(mm) 8 6 4 Connection thread Model 10 12 Male connector KSH KXH M5 X 0.8 M6 X 1.0 1 8 R(PT) R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Male elbow KSL KXL M5 X 0.8 M6 X 1.0 R(PT) 1 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Precautions Be sure to read before handling.

Table of Contents

r r u u u Drain Drain Drain Component Parts Material No.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Electric Actuators

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

Metal Seal/Rubber Seal Series VQ Body Ported

(One label for each) D side U side SUP/EXH block bush assembly SUP Block bush assembly 5(R1) 1(P) 3(R2) D side U side R1 P R2 VVQ1000-87A-B-50 Shut off label 7.8 ~ =6.5 2(B) 4(A) 2(B) 4(A) When ordering a block bush incorporated with the manifold, a block indication label is attached to the manifold. 2.8 10.5 R P R R P R R P R SUP passage blocked EXH passage blocked SUP/EXH passage

0.55

R) port] 30 L-type plug connector (L) (Station 1) (Station n) (Indicator light) Individual EXH spacer (VF5000-75-1A) + + + + + R R P 105 R R R R R 215 Approx. 300 82 196 46 35 1/4 EXH port 2.5 98 82.3 L n L: Dimensions (Lead wire n: Stations length) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1 L2 163 128 196 161 229 194 262 227 295 260 328 293 361 326 394 359 427 392 460 425 493 458 526 491 559 524

Table of Contents

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

Modular F.R.L. Units

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

VS 8-2/VS 8-4

[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.

smcmaintenancepartslist

Contents Bore size (mm) R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR R: NBR !0 Piston seal 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS !1 Rod seal Set of left nos. !0, !1, !2. !

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

AS

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard Universal type 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 01 02 03 04 Applicable tubing O.D.

0.4

-STA1) 120 80 4 46.2 ERR T/R RUN (35) 0 1 DIP SW.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P

EX120/121/122

24VDC/650mA 16 VOLTAGE INPUT US C TYPE1 IP CODE IP65 R C US R R R R R R R US C US C US C US C US C US C US C SERIAL NO.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

R.

Proposals for Energy Saving

R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no. Body size Port size Part no.

Vacuum System Peripherals:

(R) Vacuum spec. (V) Standard External pilot spec. (R) Standard External pilot spec. (R) Vacuum spec. (V) Standard External pilot spec. (R) Vacuum spec. (V) Port size Vacuum spec.