Clamp Cylinder with Lock

Unit: kg 40 B: 1.05 F: 1.11 B: 1.12 F: 1.18 0.08 0.25 50 B: 1.48 F: 1.54 B: 1.49 F: 1.55 0.11 0.20 63 B: 1.96 F: 2.02 B: 2.06 F: 2.08 0.13 Bore size (mm) Cylinder basic weight Standard Stroke CLK2G series CLK2P series Additional weight per 25 mm stroke Bore size (mm) 40, 50, 63 Standard stroke (mm) 50, 75, 100, 125, 150 Single knuckle joint Double knuckle joint (Pin, cotter pin, flat washer

CL

27 30 31 37 40 35 35 39 36 45 45 60 60 75 75 75 84 90 98 116 126 98 98 106 16.5 16.0 16.0 18.0 18.0 40 40 40 8 0 0 0 0 59 66 66 80 81 133 133 141 223 245 262 305 324 399.5 408 444.5 9-3-7 40 Series CL1 Axial Foot Style (L) 40 to 100 Lock-up at piston forward Lock-up at piston backward A B Rc BP lock-up port Unlocked when pressurized Rc BP lock-up port Unlocked when pressurized B A S

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

B B B B P 40 P 39 35 35 A A A A A SYJ 2 19 19 10 10 SX MAX.5 (Lead wire length) 2-4.5 VK G: 300 H: 600 (Mounting holes) (Pitch) P=10.5 10.5 VZ L2 4 L1 VF VFR 48.5 [55] VP7 36.1 A A A A 29.5 20 5 15 20 15 B B B B 5 VP4 1.5 2n-M5 X 0.8 (Pitch) P=10.5 15.5 1.5 2n-One-touch fitting (A, B port) (A, B port) 15.7 (Pitch) P=10.5 Applicable tube: T0425 VQ Other dimensions are the same as the M5.

MXS

NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

Standard Combinations

35 35 14 7 7 4 1/4, 3/8, 1/2 145 147 48 110 0 38 72.5 50 40 40 18 9 9 4 Accessory/Optional specifications With auto-drain With barb fitting With drain guide Metal bowl (3) (3) (3) (3) Metal bowl with level gauge (3) Upward facing handle (2) Model C H1 H2 J K L L B B B B B ACG20B ACG30B ACG40B 87 24 24 33 12 5.5 5.5 105 91 87 108.5 35 35 14 7 7 156 123 122 128 148 114.5 40 40 18 9 9

CM2

0() 0() 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 B 5(3) 5(3) 6(4) 11 Hs 22.5 25 28.5 32.5 A 7(5) 7(5) 8(6) 13 A Hs 25 27.5 31 35 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A (mm) 20 25 32 40 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 2.5(0.5) 7.5 1.5(0) 3.5(1.5) 8.5 6.5 ( ): Denotes the values with air cushion.

Pilot Operated

terminal: T J I Cable 6 to 12 J 19.5 H 32 19.5 (7.5) (1.6) (5.5) (A) 25 (7.5) (1.6) (5.5) 44 31.5 G 1/2 G H E OUT IN G (A) E OUT IN Bracket (67) (56) 50 C B (28) F 40 G 1/2 Bracket B C (28) 50 (56) (67) 40 F I 2 x Rc 1/4, 3/8, 1/2 2 x Rc 1/4, 3/8, 1/2 VXD2130-04 2-M5 x 8 18 (mm) Grommet Electrical entry (DC, AC/Class H coil) Model Port size P A B C D E F G H 32 34 62 64 Conduit H 54.5 56.5

CLK1

Unit: kg Series CLK1A Series CLK1B Description Bore size (mm) 40 32 50 63 32 40 50, 63 50, 63 F: 0.53, B: 0.51 F: 1.04, B: 0.98 F: 1.48, B: 1.42 F: 2.13, B: 2.07 Basic weight Single knuckle joint Additional weight per 25mm of stroke Cylinder CL1K32-17-R5004 CL1K40-17-R5006 CKA40-17-101B CKB40-17-102B 0.05 0.08 0.11 0.13 Double knuckle joint CL1K32-18-R5004 CL1K40-18-R5006 CKA40-18-206C

VFR

4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust center Closed center 1 150 or less

Air Slide Table Series MXQ

It requires to order separately. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

One-touch Fittings

button dimensions b L M1 M2 Applicable tubing O.D.

MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-H7C D-H7NF D-H7W D-H7BAL D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W A B B B B B B A A A A A Hs Hs Hs Hs 20 25 32 40 50 63 80 100 35 Series MGG Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height/End Lock Type: With Rod End Lock A B 8.5 Hs 11.5 16 Auto switch D-C7/C8

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specification Bracket mounting size Accessory specification With pressure gauge With auto drain Model Port size D A B C P _ G 20 24 35 40 40 H 27 33 L 2.8 3.2 4 4 4.6 N

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

MXS Series Air Slide Table

Z ZZ (NN-1) x H G H 24 10.5 24 10.5 A B 10.5 10.5 5.1 9.5 26 1 6 NN-M6 X 1 thread 12 deep A B 5H9 4 deep +0.030 0 5H9 4 deep +0.030 0 Cross section AA Cross section BB HA GA (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10

MLGP

Bore size (mm) c e b a d 40 50 63 5.5 7.5 10 10.5 13.5 17.8 11 13.5 18.5 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

MLGP

Bore size (mm) c e b d a 40 50 63 5.5 7.5 10 11 13.5 18.5 10.5 13.5 17.8 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64