Vacuum

(PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also. Vacuum Release Using Low Pressure Nitrogen* Solenoid valve / Model ' Consult taclory tor individual or assembly pan numbers. t See p. 2a & 29 also.

Vacuum

(PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also. Vacuum Release Using Low Pressure Nitrogen* Solenoid valve / Model ' Consult taclory tor individual or assembly pan numbers. t See p. 2a & 29 also.

C92

30 35 142 160 170 190 210 230 275 315 45 52 60 70 90 110 130 170 26 28 32 40 50 60 70 90 26 28 32 40 50 60 69,5 89,5 9 12 12 16 16 20 25 30 32 36 45 50 63 75 90 115 10 11 12 13 15 18 15 20 3,2 3,2 3,2 3,2 4,5 6 9 11 144 163 175 190 215 230 270 320 142 161 170 185 210 220 250 300 32 36 45 50 63 71 90 115 7 9 9 9 12 14 16 18 18 22 22 28 34 40 44 49 73 82.5 90 97.5 110 120 145 170 12 16 16

PC Wiring System

/pack ZS-28-C-P ZS-28-C-1P ZS-28-C-2P ZS-28-C ZS-28-C-1 ZS-28-C-2 Red 0.8 to 1.0 AWG26 to 24 0.14 to 0.2 mm 2 Yellow 1.0 to 1.2 w Press with pliers. 10 seconds for 4 cables. Orange 1.2 to 1.6 Note) Applicability varies dependant on conductive construction, conductive material, and/or insulating material even resulting in inapplicable.

e

Nominal size Stroke Nominal size: 16 (74.7) (101.7) (60) (40) 80 27 70 74.7 (60) 27 44 72 Motor 5H7 depth 5 LJ1 LJ1 43.5 LG1 LG1 60 60 60 139 69 10.2 79 139 LTF LTF 87 66 80 LC1 LC1 10 7 4 LC7 LC7 28 28 2 x 2 x 9.5 counterbore depth 5.4 5.5 through hole Long hole depth 5 4 x M5 x 0.8 depth 9 T-slot section for mounting 5H7 LC8 LC8 5.6 (Max.

AS

D5 Applicable series AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F 9.9 13.4 3.4 3.5 3.5 11 27.5 19.5 1 3.4 3.4 4.9 7.3 12 14.8 18.3 12.6 29 21 45 1.6 11.2 15.6 19.6 1.2 4.5 4.4 4.4 17 38 28 19.6 24.6 22 43 33 4.5 4.5 6.5 9.5 15.5 24.8 29.8 1.4 28 49 39 25.7 30.7 Brackets

Modular Type Regulators Series AR

27.8 26.5 28.5 2 1/8, 1/4 40 94 M28 x 1 28.5 29.5 40 37.5 65 37.5 65 1/8 28 27.8 27.5 28 0 101 1/4, 3/8 53 M32 x 1.5 27.5 28.5 39 37.5 64 37.5 64 1/8 28 27.8 29.5 116 31 3.5 1/4, 3/8 M38 x 1.5 29.5 30.5 41 37.5 66 37.5 66 1/8 53 AC 28 27.8 34 36 128 M42 x 1.5 34 3.5 35 45 42.5 74 42.5 74 70 1/4 1/4, 3/8, 1/2 28 27.8 36 34 3 75 129 M42 x 1.5 34 35 45 42.5 74 42.5 74 3/4 1/4 AF 28 27.8 43.5

5 Port Solenoid Valve Series VQZ1000/2000/3000

or less 30 or less 28 or less 30 or less 28 or less 30 or less 21 or less 33 or less 10 or less 15 or less 33 or less 35 or less 33 or less 35 or less 33 or less 35 or less 12 or less 12 or less 10 or less 10 or less 20 or less 25 or less 20 or less 25 or less 25 or less 14 or less 15 or less 10 or less 12 or less 23 or less 25 or less 23 or less 25 or less 23 or less 25 or less 17 or less

10

28 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 3 ( ): Denotes the Normally Open (N.O.) dimensions. 33 Series VX21/22/23 For Steam Can be used with heated water.

VDW

Grommet/Molded Lineup by Compact Design 28 2 Port 3 Port 28 P.243 P.254 17 20.5 28 20.5 17 20.5 28 20.5 VDW10 VDW20 VDW30 VDW200 VDW300 242 Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD For Water, Air, Vacuum VD W 2 1 1 G 2 01 VXZ VXE Made to Order (Refer to page 244.) Series VXP 1 2 3 10 N.C.

Sine Rodless Cylinder Series REBR Direct Mount Type

Content 15 CYR15EAbove numbers 26, 27, 28, 29, 30 25 CYR25E32 CYR32ENote 1) indicates the stroke.

High Vacuum Angle Valve, XL Series

Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.) Valve type Non-corrosive gas for aluminum alloy (A6063) and stainless steel (SUS405 equiv.)

Digital Pressure Switch

24 V: 600 Min. load impedance 50 -S/-R (Auto-shift input mode) With auto-shift switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less -X (Copy function switch output) -S/-R (Copy input mode) NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less -22No.PS-OMU0009-D -V/-T (Analog output mode) Switch output PNP open

HRX-OM-T002

Table 5.19-28 Operation setting when "Pump maintenance" alarm is generated Set value Explanation Initial value (Default setting) This alarm is not detected.

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Compact 5-Port Solenoid Valve

VZ1000-11-4L 8 5.5 (35) (25) (10) Rail mounting hole pitch 12.5 No. 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 L dimension 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 273 285.5 298 310.5 323 Weight [g] 24.8 28 31.1 34.3 37.4 40.6 43.8 46.9 50.1 53.3 56.4 59.6 62.7 65.9 69.1 72.2 75.4 78.6 81.7 No. 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 L dimension

Compressed Air Preparation Filter

Recommended Torque Unit: Nm AFF20 AM20 AMD20 AMK20 AFF50/AFF60 AM50/AM60 AMD50/AMD60 AMK50/AMK60 AFF30 AM30 AMD30 AMK30 AFF40 AM40 AMD40 AMK40 Connection thread 1/8 1/4 3/8 1/2 3/4 1 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Applicable model 4. When an SMC One-touch fitting is used, refer to the operation manual for the One-touch fitting.

New

28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

MK

RE A B (mm) Mounting Rail mounting style Direct mounting style REC D-A7H/A80H D-A73C/A80C D-F7/F79F/J79 D-F7V/J79C D-F7BA/F7W D-J79W/F7WV D-M9 D-M9V D-F9W VD-F9W D-A79W D-A9 D-A9V D-A7/A8 D-F9BAL D-P5DWL CX Model A 28 28.5 32.5 23.5 28 28 A 28 29 33 24 28.5 28.5 B 6.5 7 6 8.5 11.5 14.5 B 7 7.5 6.5 9 12 15 A 25.5 26 30 21 25.5 25.5 B 4 4.5 3.5 6 9 13 A 19.5 24 24 B 4.5 7.5 10.5 A 31.5 22.5