ZP

13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.

Rotary Clamp Cylinders

m.

CY1

5 2 43 7 65 63.5 67 62 36 66 36 62 8 36 M8 x 1.25 x 10 13 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14

CG5-S

Dimensions Single knuckle joint Clevis pin Knuckle pin MM ND hole H10 L L l t t l t t RR1 m m m m d Dd9 d Dd9 0.1 0.3 NX +0.2 0 A1 U1 L 7 12 Material: Pin and snap ring both SUS304 Material: SUS304 Material: Pin and snap ring both SUS304 Part no.

Mechanically Jointed Rodless Cylinders

A96 A96V 5 V IC circuit Grommet Yes A93 A90 A93V A90V IC circuit 100 V Relay, PLC 2-wire 24 V 12 V No 100 V or less Lead wire length symbols: 0.5 m .Nil (Example) M9NW 1 m . M (Example) M9NWM 3 m . L (Example) M9NWL 5 m . Z (Example) M9NWZ Solid state auto switches marked with a symbol are produced upon receipt of order.

CNA

13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 216 M8 x 1.25 7 18 11 M18 x 1.5 30 3/8 42 to 44.5 58 168 44 11 0 238 M8 x 1.25 7 18 14 M18 x 1.5 31 3/8 50 to 51.5 58 182

CNA

13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 216 M8 x 1.25 7 18 11 M18 x 1.5 30 3/8 42 to 44.5 58 168 44 11 0 238 M8 x 1.25 7 18 14 M18 x 1.5 31 3/8 50 to 51.5 58 182

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 16 M12 x 1.75 Bore size [mm] K KA LZ M MM N P PG PH PL PW S Without rod boot With rod boot H ZZ e f h l ZZ 40 6 14 71 11 M14 x 1.5 27 1

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(mm) A B C CB CR D G GP GW H HA HB HC HP HR HS HT J x E F Model CY1R 6 9 6.5 3.2 2 0.5 7.6 4 20 18.5 19 17 10.5 18 9 17 6 7 M4 x 0.7 x 6 5.5 CY1R10 9 6.5 3.2 2 0.5 12 4 27 25.5 26 24 14 25 14 24 5 14 M4 x 0.7 x 6 6.5 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q

ITV

Linearity within 1% (Full span) Hysteresis 0.5% (Full span) Repeatability 0.5% (Full span) ITV (Electro-pneumatic regulator) Mist separator (0.01 m or less) (0.3 m or less) High-speed response time 0.1sec Air Filter (5 m or less) IR (Precision regulator) W (Without load) 14-8-2 3 Compact Electro-pneumatic Regulator Series ITV0 How to Order F.R.L.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14 55 7.5 HAW75-20 AT55C-20 IDF55C-3 AM850-20 AM850-20 AMD850-20 75 10.0 HAW110-30 AT75C-20 IDF75C

NCA1

(1.64 ft) L 3 (m) (9.84 ft) Z 5 (m) (16.4 ft) For standard part number please see applicable auto switches on page 44 50 For standard part number please see applicable auto switches on page 44 50 Connector type A M8-3 pins B M8-4 Pins D M12-4 Pins Lead wire length S 0.5 (m) M 1.0 (m) L 3.0 (m) Auto Switch Mounting Bracket/Part No.

45

specifications Mixed M D D side In the case of mixed specifications (M), indicate separately on the manifold specification sheet.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Series KG Stainless Steel One-touch Fittings

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

MNB

P-76 (M)

HRX-OM-X084

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

4/5 Port Air Operated Valve Series SYJA3000

Note) Manifold gasket SYJ3000-14-2 can be used with the following manifold bases.