HRX-OM-M090

Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

2/3 Port Valve

22 2, 23 2 1 2 3 2 3 4 2 3 4 2 3 4 2 3 4 1 2 3 Option (Bracket) Grommet: G Conduit: C Min. pitch for bracket is H mm.

SMC

ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155

Intrinsically Safe Valve

4/25/3 (A/BEA/EB) Port size Flow-rate characteristics C [dm3/(sbar)] Cv b b C [dm3/(sbar)] Cv 53-SY940--03 Single 3/8 7.9 2.6 0.34 0.43 2.0 9.6 Double 2-position 53-SY940--04 Single Double 2-position 1/2 8.0 2.5 0.48 0.29 2.2 10 22 Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position single L-type plug connector (L) 53-SY5140(R)-L-02 18 19 9.5 60.3 8.3 48 37.2 2 x 4.3 (For mounting

Rotary Table/

4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

G 15 15 15 15 15 19 37 41 19 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA 169 223 275 13-/22-MXS20L-10 13-/22-MXS20L-20 13-/22-MXS20L-30 13-/22-MXS20L-40 13-/22-MXS20L-50 13-/22-MXS20L-75 13-/22-MXS20L-100 13-/22-MXS20L-125 13-/22-MXS20L-150 794 MXS 1322Air Slide Table Dimensions: MXS25 1322Basic

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5 3H9

RSQ

2 !1 w o @0 !7 i !9 !

Basic Type/Direct Mount Type

26 32 39 44 55 67 85 97 CB 2 2 2 3 3 3 5 5 5 CR 0.5 0.5 0.5 1 1 1.5 2 2 3 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 WS 6 8 7 7 7 7 7 10 10 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79

AC Servo Motor Driver (Pulse input type/Positioning type)

Configuration . 6 2. Pre-Operation Procedure . 7 2.1 Flow chart . 7 3.

MHF2

) 7 2-2H9 +0.025 0 depth 2 3 3 7 11 11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 12-3-13 14 Series MHF2 Dimensions MHF2-8D2 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x

MHF2

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 2 finger Nil S 2 pcs. 1 pc.

Self-seal Fittings Series KC

2) Weight (g) Applicable tube O.D.

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO2) With n surface "= 1.2.3,4 , n=2,4,6,8 ... n=2.4.5.e .. 1'1 =2 .4 ,6 ,8 ... switches Same 5.S+~1'l2) 7S+,5O(n-2) ao. 5O(1l-2} 90+50(n-2) ""F ttl surface

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

16.8 19 19 21 19 21 19 21 21 21.8 21 21.8 21 21.8 18.8 21 18.8 21 21 23 21 23 21 23 23 23.8 23 23.8 23 23.8 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 Dimension with cover Reference dimension of NPT thread after installation. 1/4" 5/16" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8

CJP

Mounting nut (Refer to page 6-2-13.)

CJP

Rod end nut (Refer to page 6-2-13.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

44.9 39.7 12 20.9 5/16" 15.2 65 59 18.5 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5 3/8" 17.9 23 104 16.2 65 21 16.2 28.6 49.2 56.7 24 49.6 R 1/2 42.1 AS431FG-04-12 AS431FG-N04-11 36.3 60.8 54.4 22 32.6 52 49.4 26.8 12 21.7 3/8" 17.9 25.8 105 19.4 104 21 16.2 NPT 1/2 56.7 49.2 49.6 42.1 29 23.8 AS431FG-N04-13 57.1 36.3 52 1/2" 21.7 26.8 106 22 19.4 Note

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

JIS Symbol 15-9-43 2 Series AS-FG How to Order AS 1 0 3 2 F G 01 06 Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Option Type Nil S None With seal 2 3 Elbow Universal M5 and U10/32 are not available with seal. Control type Applicable tubing O.D.

Cylinder with Lock

2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4, 6, 8)1 105 + 100 (n 2) (n = 2, 4, 6, 8)1 110 + 100 (n 2) (n = 2, 4, 6, 8)1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same surface) n (Different surfaces) 70 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 D-A44 n