Electric Actuator/Slider Type

Positioning pin (Mounting reference plane) Model Distance LEFS25 H 4100 km LEFS25 A 2500 km LEFS25 B 1200 km Model Distance LEFS32 H 6000 km LEFS32 A 4000 km LEFS32 B 2000 km Positioning pin (Mounting reference plane) Positioning pin (Housing B bottom) Model Distance LEFS40 H 6000 km LEFS40 A 4000 km LEFS40 B 2000 km Body mounting reference plane Positioning pin The traveling parallelism

90

Flow Rate Characteristics Relief Characteristics IR3020-04-A Supply pressure: 0.7 MPa IR3020-04-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 5000 6000 0 0 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

High Speed Pilot Operated

Manual Override DXT1215T 5W U 01 (-X1) Warning Cable length [mm] Symbol Cable length [mm] 1 300 2 500 3 1000 4 2000 5 3000 6 4000 7 5000 The manual override is used for switching the main valve regardless of the valves electric signal. As the connected actuator will start operating due to this manual operation, be sure to confirm that it is safe to do so beforehand.

99

Pre-rinsed with ultrapure water (0.2 m version only) Resistivity recovery characteristics Applicable fluids Filtration area: 4000 cm 2 [Measuring conditions] Element used: ED801S-X20 Element size: 70 x L247 Classification 0.2 m 0.4 m Fluid: Ultrapure water (resistivity value 17.9 Mcm) Flow rate: 10 L/min DI water (Deionized water), ultrapure water, ion-exchange water, distilled water Water

HAW

4000 5700 7000 HAW2 5 HAW7 5 HAW22 17 HAW37 25 Maintenance 7000 8600 10 34.5 36 37 40 44 46 38 40 42.5 43 49 54 36 Caution HAW55 1.

Thermo-chiller

When deionized (pure) water is used, the electric conductivity should be 0.5 S/cm or higher (Electric resistivity: 2 Mcm or lower). 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% to the capacity of the main breaker of this product) HRLE090 28 A HRLE Series Specific Product Precautions 4 Be sure to read this before handling the products.

HRS100/150

Operating time 20 s 30 s HRZ 10 s Voltage HRZD 5 s Min. 2 s HRW 1 s 0.5 s dV dt HECR = Voltage increase ratio 0.2 s 0.1 s dV HEC 0.05 s 0.02 s Time HEB 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 dt HED Current (% for chiller main breaker volume) < For option B [With earth leakage breaker]> 3.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Clean series Electrical entry W1, WA1: Cable length 300 mm W2, WA2: Cable length 500 mm W3, WA3: Cable length 1000 mm W4, WA4: Cable length 2000 mm W7, WA7: Cable length 5000 mm W5, WA5: Cable length 3000 mm W6, WA6: Cable length 4000 mm M8 Connector Caution Ex. 1) Cable length: 300 mm 10-SY312-5W1ZE-C4 1.

AMR3000 to 6000

AMR3000/4000 AMR4000/5000 AMR5000/6000 AMR6000 1 standard Port size Thread Thread Symbol Port size Applicable model N F Rc (PT) NPT G (PF) Rc(PT) NPT G(PF) N F 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter ass'y is same as the port size of the body.

With Factory Installed

If removal of residual pressure is needed, please contact SMC. 0.25 '" -0.5 t-'-. 0.2 oj " ::;; " ~ ~ a. 0 0.4 ::> "' f~ Q) ~ ID 0.3 ~ Ci " '3 0.2 0 " -~ 0.1 " -f ~ 0 0.15 ~ 0 o 0.2 0.3 0.4 0.5 0.6 0.7 00 1000 2000 3000 4000 5000 08 0.9 1 Flow rate t /m in IAN Ri Inlet pressure MPa 3 Regulator Series AR e Construction I Parts List Symbol AR2001 AR2501 . 3001 . 4001 IN OUT ..

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 526 Series AS Speed Controller: Standard Type In-line Type Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

CLA

./-.P: 2 ;;; 900 (4000) !

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

5 Port Solenoid Valve

Series Rubber seal VQC4m01 7.3 6.4 Sub-plate Metal seal VQC5m00 14 11 VQC 5000 Series Rubber seal VQC5m01 17 13 Metal seal VQC4m00 6.9 6.3 VQC 4000 Series V V V V V Page 614 Page 614 Page 614 Page 614 Page 614 Rubber seal VQC4m01 7.3 6.4 Base Mounted Metal seal VQC5m00 14 11 VQC 5000 Series V V V V V Page 652 Page 652 Page 652 Page 652 Page 652 Rubber seal VQC5m01 17 13 Note) A separate

E-P HYREG

Note 6) The service life is approximately 4000 to 5000 operating hours. (When using AF + AFM) This may be approximately 3000 hours with ultra-dry air (dew point 40C or equivalent). VEX SRH SRP Option SRF Part no.

For post-stoppage positioning and locking

Clamping Force Specifications W-R1-S2Type Type 1 Type 3 Mass of transferred object 1000 kg or less 3000 kg or less 5000 Possible amount of positional correction 50 mm or less 4000 Clamping force 4430 N 4070 N Clamping force [N] Operating time 1.0 s or more 0.8 s or more 3000 Cylinder operation stroke 83.5 mm 140 mm Bore size 100 mm 2000 Cylinder proof pressure 1 MPa Max. operating pressure

MY1

For long stroke operation involving vibration and impact, the use of side supports is recommended even if the spacing value is within the allowable limits shown in the graphs. 0 1000 2000 3000 4000 0 1000 2000 3000 4000 Support spacing l (mm) Support spacing l (mm) 2. Support brackets are not for mounting.

Series HAW Water Cooled Aftercooler 1

4000 5700 7000 HAW2 5 HAW7 5 37.5 47 51 38 44.5 48 43 49 54 42 47 49.5 45 48.5 52 HAW22 17 HAW37 25 Maintenance 7000 8600 10 36 Caution HAW55 1.