(Or None in the Case of No Switch), Made to Order: XC6

(Or None in the Case of No Switch), Made to Order: XC6

(Or None in the Case of No Switch), Made to Order: XC6

(Or None in the Case of No Switch), Made to Order: XC6

Refrigerated Thermo-chiller

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

Water-cooledThermo-chiller

HEB HED Technical Data Related Products Temperature range setting: 68 to194F (20 to 90C) Cooling capacity:2 kW/8 kW/15 kW/30 kW Temperature stability: 0.54F (0.3C) More effective energy-saving through use of an inverter pump Power consumption Inverter type 0.5 kWh/h Facility water 0.32 gpm (1.2 L/min) International standards: SEMATECH S2-93, S8-95 SEMI Standard S2-0703, S8-1103, F47-0200

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 0250 (2 1/2")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 0300 (3")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 0400 (4")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 0500 (5")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 0600 (6")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 0800 (8")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 1000 (10")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 1200 (12")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 1400 (14")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 1500 (15")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 1800 (18")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 2400 (24")

Magnet: D (Built-in), Mounting: D (Double Clevis), Cushion: A (Air Cushion), Bore Size: 50 (2"), Stroke: 0100 (1")