3 Port Solenoid Valve

A01 A02 3.18/2 Barb fittings (6/4) Barb fittings 4/2.5 Note) The outside and inside diameters of the applicable tubing are indicated for the barb fitting.

Fan Type Ionizer

Name of Parts . 14 4-2. Adjustment of offset voltage (ion balance) . 15 4-3. Adjustment of air flow . 15 4-4. Maintenance Warning Function and Cleaning . 15 4-5. Replacement of Cartridge Case . 17 4-6. Alarm function . 17 5. Performance . 18 6. Dimensions . 19 7. Specifications . 21 1 - Doc. no.

PFxx-OMO0004CN

M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () (3.02 ) ZS-33-MS () (3.03 ) ZS-33-R DIN

Digital Pressure Switch

straight ZS-38-C4H O-ring and one-touch clip included One-touch fitting 6 mm straight ZS-38-C6H O-ring and one-touch clip included One-touch fitting 1/4 inch straight ZS-38-N7H O-ring and one-touch clip included One-touch fitting 4 mm elbow ZS-38-C4L O-ring and one-touch clip included One-touch fitting 6 mm elbow ZS-38-C6L O-ring and one-touch clip included One-touch fitting 1/4 inch elbow

ZL3-OM00601

Instruction Safety cannot be assured in the case of an unexpected malfunction. 4 Doc.

KR

(mm) Connection thread R 10 D1 Note) D2 Model L1 L2 FR soft nylon FR double layer KRK06-02S KRK06-01S 1 8 12 10 33 13 21 35 25 26 36 33 MS 20.5 24.5 26.5 22 26 28 24 27 29 33 27.5 29.5 33.5 10 18 36.5 35 1 4 19 3.4 14 17 12 14 17 6 12.8 6.9 KRK06-03S 37 19.7 3 8 1 8 Applicable tubing T KRK08-01S KRK08-02S KRK08-03S KRK10-01S KRK10-02S KRK10-03S 1 4 3 8 1 8 1 4 3 8 39 41 42 43.5 45 15.2 12

OMS0020

(guideline) Command 2400bps 19200bps 57600bps EE 145 25 10 EU 105 20 10 AB 105 20 10 MO 245 35 15 MD 115 20 10 OE 130 20 10 Calculation Example) Number of controllers connected: 5 Required transmission commands: EE,EU, AB Communication response time ( 25 + 20 + 20 ) x 5 = 325 ms Response time (guidline) 500 450 400 Response time [ms] EE 350 EU,AB,MD,OE 300 MO 250 200 150 100 50 0 1 2 3 4

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

32 50 50 7 60 120 96 118 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 9 66 140 96 133 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 163 64 50.8 196 68 60.5 1 2, 3 4 4-16-7

Dedicated Controller

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

High-precision Digital Pressure Switch

filter 4 Variable at 0 to 30 s/0.01 step -66No.PS-OMW0002-C Product No.

Digital Flow Switch

Nominal thread size Required torque Rc1/4, NPT1/4 12 to 14 Nm Nominal thread size Width across flats of attachment Rc1/4, NPT1/4 17 mm G1/4 21 mm -19No.PF-OMO0005-F Piping for the One-touch fitting Insert the tube all the way into the fitting so that it cannot be pulled out. Insertion with excessive force can cause damage. Ensure there is no leakage after piping.

PFxx-OMU0002

number Description Colour 1 DC(+) Brown 2 FUNC White 3 DC(-) Blue 4 OUT Black : 4-wire lead wire with M12 connector for PF3A series. 76 No.PF-OMU0002-D Revision history A: Modified errors in text.

4-channel Flow Monitor (Remote type monitor unit)

Description Wire 2 DC(-) Blue cable 3 CH1_OUT1 Black 1 DC(+) Brown 4 N.C. White 2 N.C. 5 CH2_OUT1 Grey 3 DC(-) Blue 6 CH3_OUT1 Red 4 Sensor input (1 to 5 V) White 7 CH4_OUT1 Green 8 N.C. Yellow with PF3W5 Pin no.

Rotary Table

screw 2 22 Seal washer 2 21 Parallel pin 1 20 Hexagon socket head set bolt 4 6pcs. for size 3, 7 19 Round head Philips screw No.0 4 Round head Philips screw High precision type 18 4 Round head Philips screw Size : 7 Round head Philips screw No.0 Size : 1 to 3 17 Special bearing 1 High precision type Deep groove ball bearing Basic type 16 Deep groove ball bearing 1 15 Piston seal 4 14 Wearing

PSxx-OML0002CN

AC1000 V 1 50 M (DC500 V ) 2F.S.(25 ) 3 3.52 m 4 0.15 mm 2(AWG26) 1.0 mm CEUL/CSARoHS 1 2 3 -56No.PS-OML0002CN-G 01 N01 C4H C6H N7H C4L C6L N7L R1/8 M50.8 NPT1/8 M50.8 4 mm 5/32 inch 6 mm 1/4 inch 4 mm 5/32 inch 6 mm 1/4 inch C3602 () ) O HNBR PBTPOMSUS304C3604() O HNBR/NBR (3 2 m) 81 g 70 g 71 g 73 g 75 g 73 g 75 g (4 2 m) 85 g 74 g 75 g 77 g 79 g 77 g 79 g 43 g 32 g 33 g 35

Digital Flow Monitor

Description 1 DC(+) 2 N.C. 3 DC(-) 4 IN : 1 to 5 V or 4 to 20 mA Sensor connector (Part No: ZS-28-CA-4) PIN No. Description 1 DC(+) 2 N.C. 3 DC(-) 4 IN : 1 to 5 V or 4 to 20 mA -83No.PF-OMU0007-D Panel cut-out dimensions Mounting individually More than 2 pcs. (n pcs.) Close mounting -84No.PF-OMU0007-D Revision history A: Contents are added.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Minimum necessary energizing time for self holding is 10 ms. 3. There is no problem as long as the product is used normally in an ordinary operating location. If the product is used in an environment where vibration larger than 30m/s2 or strong magnetic field is present, consult with SMC. 4.

KC

after R thread installation. 19.5 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2 6 6.8 6.8 19 Width across flats 8 14 K 21.5 13.1 8 16.2 M5 x 0.8 17 Applicable tubing M 24 20.4 10 25.6 17 19 22 H 25.5 30.4 12 35.4 D MS Connection thread (With sealant) Male Elbow: KCL T H (width across flats) Applicable A M Effective area (mm 2) Nylon Urethane 1.9 1.9 6 11 7 13 21 16 24 37 29 38 63 81 Connection

Mini Rotary Actuator

Effective torque Table 4.

EX600-WEN_WSV.eng

0 V (Output) 4 0 V (Output) Boschring 13-15, 63329 Egelsbach, Germany Not used 5 (4) EX600-ED5-# PWR IN: M12 4-pin Plug, A-code GREECE (30) 210 271 7265 Red LED flashes.