e-Rodless Actuator The tightening torque should be 0.1 to 0.2 Nm. 5 to 6 14 e-Rodless Actuator Series E-MY2 Names and Functions of Individual Part Controller detail w t q u End Motor I/O cable Controller Power supply cable Slider i y e r Switch FG terminal Motor side end Description Content/Function q w e r t y u i Stroke learning switch Description Content/Function Switch to move the actuator to intermediate
With end lock (R) Functional option Axial piping type (P) For detailed specifications of adjuster options and functional options, refer to option specifications on pages 3 and 4. Standard Strokes Order Made Order Made Specifications Model Standard stroke (mm) For order made specifications of series MXQ, refer to page 42.
Flow direction (Right Left) Nil Rc1/4 F G1/4 *1 Nil Flow direction (Left Right ) R Flow direction (Right Left) *1: Conforming to ISO16030 *1: Conforming to ISO16030 Square embedded type pressure gauge Round type pressure gauge Refer to the WEB catalog for details.
Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange
(i) MAN (r) (j) Reverse button Performs reverse jog and inching.
Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + H Mounting Without mounting option With bracket With set nut a Nil B Note 4) + Without auto drain Float type auto drain (N.C.)
L Data R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Applicable filter Element size Quantity ZFC-EL-1 ZFC1 5 x 3 x L11 10 ZFC-EL-2 ZFC3 6 x 4 x L25 10 2 Cover Resin PBT 2 ZFC-EL-3 ZFC5 12 x 8 x L20 10 3 Element Sintered resin 1 ZFC-EL-4 ZFC7 16 x 12 x L25 10 4 O-ring HNBR 2 5 Bracket Resin PBT 1 w OUT e w One-touch fitting r q IN r One-touch fitting t Element Replacement Procedure 1.
Type: Retainer Pin/Stopper Set, Cover: Available, Element Material: [Resin Base] Sound Absorbing Resin, Main Body Material 1: [Aluminum] Aluminum, Flow Coefficient (Cv)(mm2): 450, Silencing Effect(dB): 38, Pipe Connection Port Type: [R] R, Mounting Thread Nominal: [1 1/4] 1 1/4, One-Touch Fitting Size: -, Outer Diameter D(φ): 74, Effective Sectional Area Class(mm2): Up to 500,
Type: Retainer Pin/Stopper Set, Cover: Available, Element Material: [Resin Base] Sound Absorbing Resin, Main Body Material 1: [Aluminum] Aluminum, Flow Coefficient (Cv)(mm2): 450, Silencing Effect(dB): 40, Pipe Connection Port Type: [R] R, Mounting Thread Nominal: [1 1/2] 1 1/2, One-Touch Fitting Size: -, Outer Diameter D(φ): 74, Effective Sectional Area Class(mm2): Up to 500,
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0 Section AA @0 u @8 r y !6 @3 @4 e !7 w i t q A A @7 #3 @9 #0 #1#2 !8 !9 #4 @8 @6 !4 !5 Description Material Note Component Parts Description Material Note Component Parts No.
Series: LEKFS, Size: 32, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 450
Electrical entry VQD G Body style VZS Coil voltage Lead wire length 0.6m Grommet 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Lead wire lenghth 1.5m 1 2 3 4 5 6 5: Plug lead Sub-plate VFS H VS VS7 Function Standard (1W) Low wattage (0.5W) External pilot Seal Y R (1) (2) 0 1 Metal seal Rubber seal Applicable to DC specification.
TN TF 32, 40 End lock None (Standard) Rod end configuration Nil R Rod end female thread (Standard) Nil M With head end lock Rod end male thread Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.
Note 2) Fixed unit: kPa Supply valve/Release valve combination With supply and release valves With supply valve K1 K2 Output specifications Rated voltage (Applicable only when the vacuum pressure sensor specification is D for digital pressure switch for vacuum) Electrical entry DC specifications 5 6 V S R 24V 12V 6V 5V 3V G H L LN LO M MN MO Lead wire length 0.3 m Grommet Lead wire length
Series: LEKFS, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 450, Motor Option: B (with Lock), Seal Band Stopper: N [Roller Type Seal Band Stopper [Grease Free]], Actuator Cable Type, Length: R5 (5), Controller: C9F (EtherNet/IPâ„¢ with STO Sub-Function
Style: H (Single Axis Type), Size: 25, Motor Mounting Position: U (Bottom Mounting), Stroke: 450, Motor Option: w/o Option, Actuator Cable Type: R (Robotic Cable, Flexible), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 2P [LECP2, Programless Type (w/Stroke Study), PNP], I/O Cable Length for LEC: 1 (1.5m)
Style: HT (Double Axis Type), Size: 25, Motor Mounting Position: LU (Symmetric, Bottom Mounting), Stroke: 450, Motor Option: w/o Option, Actuator Cable Type: R (Robotic Cable, Flexible), Actuator Cable Length: 1 (1.5m)