NCQ2/CQ2

x 160L 6.5 7.5 10 -100DC-R -100DC-R C BQ2B50-10DC-R C BQ2B25-10DC-R 80 85 90 95 -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R 8.5 12.5 7 -100DC-R -100DC-R C BQ2B63-10DC-R C BQ2B32-10DC-R 85 90 95 -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R 9 14.5 -100DC-R -100DC-R C BQ2B80-25DC-R 15 -50DC-R C BQ2B100-25DC-R 15.5 -50DC-R

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

PFxx-OMY0005

) 4 R/W S16 2400 Y WH2 (Window comparator hysteresis) Setting range 0x0 to 0x0820 (0 to 2080) Setting of OUT2 hysteresis (Window comparator) 5 R/W U16 400 Y 6 R/W dtH2 (Delay time ON) U16 0 Y Setting range 0x0 to 0x1770 (0 to 6000) Setting of OUT2 delay time ON 10 ms increments 7 R/W dtL2 (Delay time OFF) U16 0 Y Setting of OUT2 delay time OFF 10 ms increments -84No.PF-OMY0005-A Product individual

Compact Cylinder

Grease pack part no.: GR-S-010 (10 g) R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM 10 Piston seal Rod seal 11 12 Tube gasket 13 Rod scraper R: NBR seal (Nitrile rubber) V: FKM seal (Fluororubber) Handling Precautions Retaining Ring Installation/Removal Caution Caution 1.

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $eni zsMl-T115/-T121 ) 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?rgts' css"e d;s,x{f,#&fx rfse $.lp&q ssllal e*xec9**i*xa:l {see ?"

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $enie zsMl-T115/-T121 I 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?

Clean Room Rodless Cylinder Series CYP ø15, ø32

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

R.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Table of Contents

0 IS1000 No. q w e r t y u i o !

Digital Flow Switch ( compatible)

(page 84) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

Digital Flow Switch ( compatible)

(page 88) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

r p g n i t a r e p o . x a M ) 7 . 0 ( 0 0 1 g i s p * e g n a r g n i t a r e p o l a i t n e r e f f i d e r u s s e r P ) a P M ( ) 6 . 0 ~ 1 . 0 ( 0 9 ~ 5 1 e g n a r . p m e t g n i t a r e p O F 0 4 1 ~ 0 4 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T l w o B e t a n o b r a c y l o P T L A N k n a T d e e F o t u A 5 T L A N 1 * S 1 5 T L A

Digital Flow Switch (Integrated display type)

range -200 to 4200 5 R/W Window comparator hysteresis S16 400 Y Setting range 0 to 2200 Setting of OUT1 hysteresis (Window comparator mode) 6 R/W Delay time S16 0 Y Setting range 0 to 6000 Setting of OUT1 delay time OUT1 uses the unit for accumulated output set value (When unit: "L" is selected) 1 R/W Accumulated output set value L S16 0 Y Setting range 0 to 9 Setting range 1, 2L range:

Rubber seal 5 Port Solenoid Valve Series SYJ7000

of R port.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

R and U are for DC only.

Card Motor

Mounting angle 10.6 300 7.0 200 LAT3m-10, -20 3.5 100 LAT3m-30 0.0 0.0 0 (Horizontal) 15 30 45 60 75 90 (Vertical) Mounting angle [] Shortest Positioning Time (Guide): Tmin [ms] Fig. 3 Fig. 4 Allowable Thrust Setting Value LAT3-m LAT3F-m 100 300 400 75 Shortest positioning time Tmin [ms] Shortest positioning time Tmin [ms] 6 86 350 W = 300 W = 400 W = 500 LAT3m-10 120 250 W = 400 W = 500

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC

OMU0023

(LAT3-10: 5.0, LAT3-20: 4.8, LAT3-30: 3.9, LAT3-50: 2.0) Note 4: If the target position exceeds the stroke range, the Card Motor operation speed is set to above 400 mm/s or any other impossible value is set, Step Data error will be generated from the Card Motor controller during the Step Data operation.